INIS
surfaces
100%
applications
100%
manufacturing
100%
ultrasonics
100%
transducers
100%
layers
25%
silicon
25%
coupling
25%
yields
25%
porous materials
25%
fabrication
25%
mhz range
25%
etching
25%
levels
12%
data
12%
construction
12%
single crystals
12%
cost
12%
processing
12%
detection
12%
membranes
12%
air
12%
machining
12%
frequency range
12%
filters
12%
drying
12%
flow rate
12%
gas flow
12%
passivation
12%
shock waves
12%
Keyphrases
Surface Micromachining
100%
Capacitive Micromachined Ultrasonic Transducer
100%
Environmental Conditions
37%
Manufacturing Process
12%
Mechanical Strength
12%
Detection Method
12%
Multicrystalline Silicon
12%
Measurement Technology
12%
High-frequency Range
12%
Processing Methods
12%
Sacrificial Layer
12%
Passivation
12%
Environmental Measurements
12%
Fabrication Technology
12%
Mechanical Shock
12%
Polysilicon
12%
Micromachining Technology
12%
HF Etching
12%
Excellent Yields
12%
Low-cost Applications
12%
Porous Silicon Membrane
12%
Coupling Factor
12%
Gas Flow Rate Measurement
12%
Measurement Basis
12%
Passivated
12%
Phase Difference Detection
12%
Inventive Process
12%
Engineering
Capacitive
100%
Ultrasonics
100%
Transducer
100%
Manufacturing Process
12%
Phase Difference
12%
Processing Method
12%
Passivation
12%
Micro Machining
12%
Gas Flowrate
12%
Silicon Single Crystal
12%
Porous Silicon
12%
Porosity
12%
Mechanical Shock
12%
Polysilicon
12%