Abstract
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the |
| Subtitle of host publication | 13th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2013 |
| Editors | R. Leach, P. Shore |
| Publisher | Euspen |
| Pages | 35 - 38 |
| ISBN (Print) | 978-095667902-4 |
| Publication status | Published - 2013 |
| MoE publication type | Not Eligible |
| Event | 13th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2013 - Berlin, Germany Duration: 27 May 2013 → 31 May 2013 |
Conference
| Conference | 13th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2013 |
|---|---|
| Abbreviated title | EUSPEN 2013 |
| Country | Germany |
| City | Berlin |
| Period | 27/05/13 → 31/05/13 |
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Keywords
- aluminium
- atomic layer deposition
- brass
- coatings
- lenses
- milling
- mirrors
- optical testing
- precision engineering
- reflection
- spectometers
- mechanical structures
- optical characteristics
- reflectance characteristics
- reflectance standards
- spectral measurement
- ultra-precision machine tools
- UV-vis spectometer
Cite this
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Manufacturing of freeform mirror by milling and altering its optical characteristics by ALD SiO2 coating. / Mutanen, J.; Väyrynen, J.; Kivi, Sini; Toiviainen, Maunu; Laukkanen, J.; Pääkkönen, P.; Itkonen, T.; Partanen, A.; Juuti, Mikko; Kuittinen, M.; Mönkkönen, K.
Proceedings of the: 13th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2013. ed. / R. Leach; P. Shore. Euspen, 2013. p. 35 - 38.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
TY - GEN
T1 - Manufacturing of freeform mirror by milling and altering its optical characteristics by ALD SiO2 coating
AU - Mutanen, J.
AU - Väyrynen, J.
AU - Kivi, Sini
AU - Toiviainen, Maunu
AU - Laukkanen, J.
AU - Pääkkönen, P.
AU - Itkonen, T.
AU - Partanen, A.
AU - Juuti, Mikko
AU - Kuittinen, M.
AU - Mönkkönen, K.
PY - 2013
Y1 - 2013
N2 - In this study four aluminium and brass freeform mirrors used as fiber optic spectrometer probes were micro-milled and ALD SiO2 coating was added. Freeform surfaces were designed by combining optical modeling with the mechanical structure. Moore 350 FG ultra precision machine tool was used for milling the freeform parts. To evaluate the surface roughness of the machining one aluminium and one brass freeform mirror also contained a 40 mm radius reference lens. The surface roughness's of parts containing reference lenses were analysed prior to coating them with SiO2 on atomic layer deposition (ALD) device. The uncoated and coated reference lenses were measured with optical profiler. The Ra values of micro-milled reference lenses on uncoated aluminium and brass surfaces were in good correlation to theoretical values. On uncoated aluminium mirror surface roughness Ra was 6.8 nm and for uncoated brass mirror Ra was 5.7 nm. On coated aluminium mirror surface roughness Ra was 5.2 nm and on coated brass mirror Ra was 5.5 nm. For the testing of the spectral functionality of the system the mirrors were coupled to a fiber-optic UV-VIS spectrometer. Spectral measurements were done on coated and uncoated mirrors with several different coloured reflectance standards. Spectral measurements show that SiO2 coating affects the reflectance characteristics of both mirror surfaces while maintaining high reflectivity characteristics.
AB - In this study four aluminium and brass freeform mirrors used as fiber optic spectrometer probes were micro-milled and ALD SiO2 coating was added. Freeform surfaces were designed by combining optical modeling with the mechanical structure. Moore 350 FG ultra precision machine tool was used for milling the freeform parts. To evaluate the surface roughness of the machining one aluminium and one brass freeform mirror also contained a 40 mm radius reference lens. The surface roughness's of parts containing reference lenses were analysed prior to coating them with SiO2 on atomic layer deposition (ALD) device. The uncoated and coated reference lenses were measured with optical profiler. The Ra values of micro-milled reference lenses on uncoated aluminium and brass surfaces were in good correlation to theoretical values. On uncoated aluminium mirror surface roughness Ra was 6.8 nm and for uncoated brass mirror Ra was 5.7 nm. On coated aluminium mirror surface roughness Ra was 5.2 nm and on coated brass mirror Ra was 5.5 nm. For the testing of the spectral functionality of the system the mirrors were coupled to a fiber-optic UV-VIS spectrometer. Spectral measurements were done on coated and uncoated mirrors with several different coloured reflectance standards. Spectral measurements show that SiO2 coating affects the reflectance characteristics of both mirror surfaces while maintaining high reflectivity characteristics.
KW - aluminium
KW - atomic layer deposition
KW - brass
KW - coatings
KW - lenses
KW - milling
KW - mirrors
KW - optical testing
KW - precision engineering
KW - reflection
KW - spectometers
KW - mechanical structures
KW - optical characteristics
KW - reflectance characteristics
KW - reflectance standards
KW - spectral measurement
KW - ultra-precision machine tools
KW - UV-vis spectometer
UR - http://www.gbv.de/dms/tib-ub-hannover/756514517.pdf
M3 - Conference article in proceedings
SN - 978-095667902-4
SP - 35
EP - 38
BT - Proceedings of the
A2 - Leach, R.
A2 - Shore, P.
PB - Euspen
ER -