Manufacturing solutions for nano-imprinting

G. Lecarpentier, J. Kuenholz, Tomi Haatainen, Jouni Ahopelto

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publicationProceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002
Place of PublicationSan Francisco
Pages95
Publication statusPublished - 2002
Event1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 - San Francisco, United States
Duration: 11 Dec 200213 Dec 2002

Conference

Conference1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02
Abbreviated titleNNT 2002
CountryUnited States
CitySan Francisco
Period11/12/0213/12/02

Keywords

  • Nanoimprint Lithography

Cite this

Lecarpentier, G., Kuenholz, J., Haatainen, T., & Ahopelto, J. (2002). Manufacturing solutions for nano-imprinting. In Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002 (pp. 95).