Manufacturing solutions for nano-imprinting

G. Lecarpentier, J. Kuenholz, Tomi Haatainen, Jouni Ahopelto

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publicationProceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002
Place of PublicationSan Francisco
Pages95
Publication statusPublished - 2002
Event1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 - San Francisco, United States
Duration: 11 Dec 200213 Dec 2002

Conference

Conference1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02
Abbreviated titleNNT 2002
CountryUnited States
CitySan Francisco
Period11/12/0213/12/02

Keywords

  • Nanoimprint Lithography

Cite this

Lecarpentier, G., Kuenholz, J., Haatainen, T., & Ahopelto, J. (2002). Manufacturing solutions for nano-imprinting. In Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002 (pp. 95). San Francisco.
Lecarpentier, G. ; Kuenholz, J. ; Haatainen, Tomi ; Ahopelto, Jouni. / Manufacturing solutions for nano-imprinting. Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002. San Francisco, 2002. pp. 95
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year = "2002",
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pages = "95",
booktitle = "Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002",

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Lecarpentier, G, Kuenholz, J, Haatainen, T & Ahopelto, J 2002, Manufacturing solutions for nano-imprinting. in Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002. San Francisco, pp. 95, 1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 , San Francisco, United States, 11/12/02.

Manufacturing solutions for nano-imprinting. / Lecarpentier, G.; Kuenholz, J.; Haatainen, Tomi; Ahopelto, Jouni.

Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002. San Francisco, 2002. p. 95.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

TY - CHAP

T1 - Manufacturing solutions for nano-imprinting

AU - Lecarpentier, G.

AU - Kuenholz, J.

AU - Haatainen, Tomi

AU - Ahopelto, Jouni

PY - 2002

Y1 - 2002

KW - Nanoimprint Lithography

M3 - Conference abstract in proceedings

SP - 95

BT - Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002

CY - San Francisco

ER -

Lecarpentier G, Kuenholz J, Haatainen T, Ahopelto J. Manufacturing solutions for nano-imprinting. In Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002. San Francisco. 2002. p. 95