Manufacturing solutions for nano-imprinting

G. Lecarpentier; J. Kuenholz; Tomi Haatainen; Jouni Ahopelto

Manufacturing solutions for nano-imprinting

G. Lecarpentier, J. Kuenholz, Tomi Haatainen, Jouni Ahopelto

VTT Technical Research Centre of Finland

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002
Place of Publication	San Francisco
Publisher	Naval Research Laboratory
Pages	95
Publication status	Published - 2002
Event	1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 - San Francisco, United States Duration: 11 Dec 2002 → 13 Dec 2002 http://www.nntconf.org/pdf/2002ProgramSchedule.pdf (Conference Programme)

Conference

Conference	1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02
Abbreviated title	NNT 2002
Country/Territory	United States
City	San Francisco
Period	11/12/02 → 13/12/02
Internet address	http://www.nntconf.org/pdf/2002ProgramSchedule.pdf (Conference Programme)

Keywords

Nanoimprint Lithography

Cite this

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title = "Manufacturing solutions for nano-imprinting",

keywords = "Nanoimprint Lithography",

author = "G. Lecarpentier and J. Kuenholz and Tomi Haatainen and Jouni Ahopelto",

year = "2002",

language = "English",

pages = "95",

booktitle = "Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002",

publisher = "Naval Research Laboratory",

address = "United States",

note = "1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 , NNT 2002 ; Conference date: 11-12-2002 Through 13-12-2002",

url = "http://www.nntconf.org/pdf/2002ProgramSchedule.pdf",

}

Lecarpentier, G, Kuenholz, J, Haatainen, T & Ahopelto, J 2002, Manufacturing solutions for nano-imprinting. in Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002. Naval Research Laboratory, San Francisco, pp. 95, 1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 , San Francisco, United States, 11/12/02.

Manufacturing solutions for nano-imprinting. / Lecarpentier, G.; Kuenholz, J.; Haatainen, Tomi et al.
Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002. San Francisco: Naval Research Laboratory, 2002. p. 95.

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

TY - CHAP

T1 - Manufacturing solutions for nano-imprinting

AU - Lecarpentier, G.

AU - Kuenholz, J.

AU - Haatainen, Tomi

AU - Ahopelto, Jouni

PY - 2002

Y1 - 2002

KW - Nanoimprint Lithography

M3 - Conference abstract in proceedings

SP - 95

BT - Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002

PB - Naval Research Laboratory

CY - San Francisco

T2 - 1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02

Y2 - 11 December 2002 through 13 December 2002

ER -