Master replication into thermosetting polymers for nanoimprinting

H. Schulz, D. Lyebyedev, H.-C. Scheer, G. Pfeiffer, G. Bleidiessel, D. Grützner, Jouni Ahopelto

    Research output: Contribution to journalArticleScientificpeer-review

    55 Citations (Scopus)

    Abstract

    Replication of the e-beam master into thermosetting polymers was investigated for low cost working stamp fabrication for nanoimprint lithography (NIL). Negative as well as positive replicas from a master were fabricated in a thermal replication step from duroplastic material. Without any further treatment these working stamps were able to imprint thermoplastic polymers. To demonstrate the procedure we used the custom polymers mr-I-8130 and mr-I-9030 as well as PMMA for comparison. All replications were done in a NIL process. The replication quality is excellent when a suitable imprint procedure is used.
    Original languageEnglish
    Pages (from-to)3582 - 3585
    Number of pages4
    JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
    Volume18
    Issue number6
    DOIs
    Publication statusPublished - 2000
    MoE publication typeA1 Journal article-refereed

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