Replication of the e-beam master into thermosetting polymers was investigated for low cost working stamp fabrication for nanoimprint lithography (NIL). Negative as well as positive replicas from a master were fabricated in a thermal replication step from duroplastic material. Without any further treatment these working stamps were able to imprint thermoplastic polymers. To demonstrate the procedure we used the custom polymers mr-I-8130 and mr-I-9030 as well as PMMA for comparison. All replications were done in a NIL process. The replication quality is excellent when a suitable imprint procedure is used.
|Pages (from-to)||3582 - 3585|
|Number of pages||4|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Publication status||Published - 2000|
|MoE publication type||A1 Journal article-refereed|
Schulz, H., Lyebyedev, D., Scheer, H-C., Pfeiffer, G., Bleidiessel, G., Grützner, D., & Ahopelto, J. (2000). Master replication into thermosetting polymers for nanoimprinting. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 18(6), 3582 - 3585. https://doi.org/10.1116/1.1319821