Master replication into thermosetting polymers for nanoimprinting

H. Schulz, D. Lyebyedev, H.-C. Scheer, G. Pfeiffer, G. Bleidiessel, D. Grützner, Jouni Ahopelto

Research output: Contribution to journalArticleScientificpeer-review

55 Citations (Scopus)

Abstract

Replication of the e-beam master into thermosetting polymers was investigated for low cost working stamp fabrication for nanoimprint lithography (NIL). Negative as well as positive replicas from a master were fabricated in a thermal replication step from duroplastic material. Without any further treatment these working stamps were able to imprint thermoplastic polymers. To demonstrate the procedure we used the custom polymers mr-I-8130 and mr-I-9030 as well as PMMA for comparison. All replications were done in a NIL process. The replication quality is excellent when a suitable imprint procedure is used.
Original languageEnglish
Pages (from-to)3582 - 3585
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume18
Issue number6
DOIs
Publication statusPublished - 2000
MoE publication typeA1 Journal article-refereed

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Nanoimprint lithography
Polymers
Thermoplastics
Fabrication
Costs
Hot Temperature

Cite this

Schulz, H. ; Lyebyedev, D. ; Scheer, H.-C. ; Pfeiffer, G. ; Bleidiessel, G. ; Grützner, D. ; Ahopelto, Jouni. / Master replication into thermosetting polymers for nanoimprinting. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2000 ; Vol. 18, No. 6. pp. 3582 - 3585.
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Master replication into thermosetting polymers for nanoimprinting. / Schulz, H.; Lyebyedev, D.; Scheer, H.-C.; Pfeiffer, G.; Bleidiessel, G.; Grützner, D.; Ahopelto, Jouni.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 18, No. 6, 2000, p. 3582 - 3585.

Research output: Contribution to journalArticleScientificpeer-review

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AU - Schulz, H.

AU - Lyebyedev, D.

AU - Scheer, H.-C.

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AU - Grützner, D.

AU - Ahopelto, Jouni

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AB - Replication of the e-beam master into thermosetting polymers was investigated for low cost working stamp fabrication for nanoimprint lithography (NIL). Negative as well as positive replicas from a master were fabricated in a thermal replication step from duroplastic material. Without any further treatment these working stamps were able to imprint thermoplastic polymers. To demonstrate the procedure we used the custom polymers mr-I-8130 and mr-I-9030 as well as PMMA for comparison. All replications were done in a NIL process. The replication quality is excellent when a suitable imprint procedure is used.

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