Master replication into thermosetting polymers for nanoimprinting

H. Schulz; D. Lyebyedev; H.-C. Scheer; G. Pfeiffer; G. Bleidiessel; D. Grützner; Jouni Ahopelto

doi:10.1116/1.1319821

Master replication into thermosetting polymers for nanoimprinting

H. Schulz
, D. Lyebyedev
, H.-C. Scheer
, G. Pfeiffer
, G. Bleidiessel
, D. Grützner
, Jouni Ahopelto

Research output: Contribution to journal › Article › Scientific › peer-review

54 Citations (Scopus)

Abstract

Replication of the e-beam master into thermosetting polymers was investigated for low cost working stamp fabrication for nanoimprint lithography (NIL). Negative as well as positive replicas from a master were fabricated in a thermal replication step from duroplastic material. Without any further treatment these working stamps were able to imprint thermoplastic polymers. To demonstrate the procedure we used the custom polymers mr-I-8130 and mr-I-9030 as well as PMMA for comparison. All replications were done in a NIL process. The replication quality is excellent when a suitable imprint procedure is used.

Original language	English
Pages (from-to)	3582 - 3585
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	18
Issue number	6
DOIs	https://doi.org/10.1116/1.1319821
Publication status	Published - 2000
MoE publication type	A1 Journal article-refereed

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10.1116/1.1319821

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title = "Master replication into thermosetting polymers for nanoimprinting",

abstract = "Replication of the e-beam master into thermosetting polymers was investigated for low cost working stamp fabrication for nanoimprint lithography (NIL). Negative as well as positive replicas from a master were fabricated in a thermal replication step from duroplastic material. Without any further treatment these working stamps were able to imprint thermoplastic polymers. To demonstrate the procedure we used the custom polymers mr-I-8130 and mr-I-9030 as well as PMMA for comparison. All replications were done in a NIL process. The replication quality is excellent when a suitable imprint procedure is used.",

author = "H. Schulz and D. Lyebyedev and H.-C. Scheer and G. Pfeiffer and G. Bleidiessel and D. Gr{\"u}tzner and Jouni Ahopelto",

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language = "English",

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T1 - Master replication into thermosetting polymers for nanoimprinting

AU - Schulz, H.

AU - Lyebyedev, D.

AU - Scheer, H.-C.

AU - Pfeiffer, G.

AU - Bleidiessel, G.

AU - Grützner, D.

AU - Ahopelto, Jouni

PY - 2000

Y1 - 2000

N2 - Replication of the e-beam master into thermosetting polymers was investigated for low cost working stamp fabrication for nanoimprint lithography (NIL). Negative as well as positive replicas from a master were fabricated in a thermal replication step from duroplastic material. Without any further treatment these working stamps were able to imprint thermoplastic polymers. To demonstrate the procedure we used the custom polymers mr-I-8130 and mr-I-9030 as well as PMMA for comparison. All replications were done in a NIL process. The replication quality is excellent when a suitable imprint procedure is used.

AB - Replication of the e-beam master into thermosetting polymers was investigated for low cost working stamp fabrication for nanoimprint lithography (NIL). Negative as well as positive replicas from a master were fabricated in a thermal replication step from duroplastic material. Without any further treatment these working stamps were able to imprint thermoplastic polymers. To demonstrate the procedure we used the custom polymers mr-I-8130 and mr-I-9030 as well as PMMA for comparison. All replications were done in a NIL process. The replication quality is excellent when a suitable imprint procedure is used.

U2 - 10.1116/1.1319821

DO - 10.1116/1.1319821

M3 - Article

SN - 1071-1023

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JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6

ER -

Master replication into thermosetting polymers for nanoimprinting

Abstract

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