Master replication into thermosetting polymers for nanoimprinting

H. Schulz, D. Lyebyedev, H.-C. Scheer, G. Pfeiffer, G. Bleidiessel, D. Grützner, Jouni Ahopelto

    Research output: Contribution to journal › Article › Scientific › peer-review

    56 Citations (Scopus)

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    Material Science