Measurement of aperture diameters using an optical coordinate

Björn Hemming (Corresponding Author), Erkki Ikonen, Mart Noorma

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)

Abstract

The use of an optical coordinate measuring machine (CMM) for the diameter measurement of optical apertures is described. The traceability and mechanical stability of the aperture areas are of importance for accurate photometric and radiometric measurements. Detailed evaluation of the measurement uncertainty for the aperture diameter is presented. High-accuracy mechanical CMM was used to confirm the validity of the optical CMM results. The difference between the contact and non-contact measurement was 0.1 µm for the mean diameter result. If the required standard uncertainty for the mean diameter is of the order of 1 µm, the optical CMM provides an efficient method for aperture area measurements.
Original languageEnglish
Pages (from-to)297-311
JournalInternational Journal of Optomechatronics
Volume1
Issue number3
DOIs
Publication statusPublished - 2007
MoE publication typeA1 Journal article-refereed

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Coordinate measuring machines
apertures
Mechanical stability
evaluation
Uncertainty

Cite this

@article{74fe7272ac144fd9a480250cb081330c,
title = "Measurement of aperture diameters using an optical coordinate",
abstract = "The use of an optical coordinate measuring machine (CMM) for the diameter measurement of optical apertures is described. The traceability and mechanical stability of the aperture areas are of importance for accurate photometric and radiometric measurements. Detailed evaluation of the measurement uncertainty for the aperture diameter is presented. High-accuracy mechanical CMM was used to confirm the validity of the optical CMM results. The difference between the contact and non-contact measurement was 0.1 µm for the mean diameter result. If the required standard uncertainty for the mean diameter is of the order of 1 µm, the optical CMM provides an efficient method for aperture area measurements.",
author = "Bj{\"o}rn Hemming and Erkki Ikonen and Mart Noorma",
year = "2007",
doi = "10.1080/15599610701548803",
language = "English",
volume = "1",
pages = "297--311",
journal = "International Journal of Optomechatronics",
issn = "1559-9612",
publisher = "Taylor & Francis",
number = "3",

}

Measurement of aperture diameters using an optical coordinate. / Hemming, Björn (Corresponding Author); Ikonen, Erkki; Noorma, Mart.

In: International Journal of Optomechatronics, Vol. 1, No. 3, 2007, p. 297-311.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Measurement of aperture diameters using an optical coordinate

AU - Hemming, Björn

AU - Ikonen, Erkki

AU - Noorma, Mart

PY - 2007

Y1 - 2007

N2 - The use of an optical coordinate measuring machine (CMM) for the diameter measurement of optical apertures is described. The traceability and mechanical stability of the aperture areas are of importance for accurate photometric and radiometric measurements. Detailed evaluation of the measurement uncertainty for the aperture diameter is presented. High-accuracy mechanical CMM was used to confirm the validity of the optical CMM results. The difference between the contact and non-contact measurement was 0.1 µm for the mean diameter result. If the required standard uncertainty for the mean diameter is of the order of 1 µm, the optical CMM provides an efficient method for aperture area measurements.

AB - The use of an optical coordinate measuring machine (CMM) for the diameter measurement of optical apertures is described. The traceability and mechanical stability of the aperture areas are of importance for accurate photometric and radiometric measurements. Detailed evaluation of the measurement uncertainty for the aperture diameter is presented. High-accuracy mechanical CMM was used to confirm the validity of the optical CMM results. The difference between the contact and non-contact measurement was 0.1 µm for the mean diameter result. If the required standard uncertainty for the mean diameter is of the order of 1 µm, the optical CMM provides an efficient method for aperture area measurements.

U2 - 10.1080/15599610701548803

DO - 10.1080/15599610701548803

M3 - Article

VL - 1

SP - 297

EP - 311

JO - International Journal of Optomechatronics

JF - International Journal of Optomechatronics

SN - 1559-9612

IS - 3

ER -