Measurement of dispersion properties of active and surrounding regions in BAW resonator

K. Kokkonen, Johanna Meltaus, Tuomas Pensala, M. Kaivola

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    Acoustic wave fields both within the active electrode area of a solidly mounted 1.8 GHz bulk acoustic wave resonator, and around it, are measured using a heterodyne laser interferometer. Plate wave dispersion diagrams for both regions are extracted from the measurement data. The waves leaking from the resonator area enable the determination of the dispersion properties of the sourceless outside region. The experimental dispersion data reveal the cutoff frequencies of the acoustic vibration modes in the region surrounding the resonator, and therefore, the lateral energy trapping range of the resonator can be directly determined from the measurements. The onset of the acoustic leakage from the resonator is signalled on one hand by propagating wave modes appearing in the dispersion diagram of the surrounding region, and on the other hand by the abruptly diminishing amplitude of curves in the resonator dispersion diagram. This information is important for verifying and further developing the simulation tools used for the design of the resonators. Experimental wave field images, dispersion diagrams for both regions, and the threshold for energy leakage are discussed
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publicationIEEE International Ultrasonics Symposium, IUS 2011
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages308-311
    ISBN (Electronic)978-1-4577-1252-4
    ISBN (Print)978-1-4577-1253-1
    DOIs
    Publication statusPublished - 2011
    MoE publication typeA4 Article in a conference publication
    EventIEEE International Ultrasonics Symposium, IUS 2011 - Orlando, United States
    Duration: 18 Oct 201121 Oct 2011

    Conference

    ConferenceIEEE International Ultrasonics Symposium, IUS 2011
    Abbreviated titleIUS 2011
    CountryUnited States
    CityOrlando
    Period18/10/1121/10/11

    Fingerprint

    resonators
    diagrams
    acoustics
    leakage
    wave dispersion
    sound waves
    vibration mode
    cut-off
    interferometers
    trapping
    thresholds
    electrodes
    energy
    curves
    lasers
    simulation

    Cite this

    Kokkonen, K., Meltaus, J., Pensala, T., & Kaivola, M. (2011). Measurement of dispersion properties of active and surrounding regions in BAW resonator. In Proceedings: IEEE International Ultrasonics Symposium, IUS 2011 (pp. 308-311). IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/ULTSYM.2011.0074
    Kokkonen, K. ; Meltaus, Johanna ; Pensala, Tuomas ; Kaivola, M. / Measurement of dispersion properties of active and surrounding regions in BAW resonator. Proceedings: IEEE International Ultrasonics Symposium, IUS 2011. IEEE Institute of Electrical and Electronic Engineers , 2011. pp. 308-311
    @inproceedings{2a46e4a59318498cb1113d450c25d889,
    title = "Measurement of dispersion properties of active and surrounding regions in BAW resonator",
    abstract = "Acoustic wave fields both within the active electrode area of a solidly mounted 1.8 GHz bulk acoustic wave resonator, and around it, are measured using a heterodyne laser interferometer. Plate wave dispersion diagrams for both regions are extracted from the measurement data. The waves leaking from the resonator area enable the determination of the dispersion properties of the sourceless outside region. The experimental dispersion data reveal the cutoff frequencies of the acoustic vibration modes in the region surrounding the resonator, and therefore, the lateral energy trapping range of the resonator can be directly determined from the measurements. The onset of the acoustic leakage from the resonator is signalled on one hand by propagating wave modes appearing in the dispersion diagram of the surrounding region, and on the other hand by the abruptly diminishing amplitude of curves in the resonator dispersion diagram. This information is important for verifying and further developing the simulation tools used for the design of the resonators. Experimental wave field images, dispersion diagrams for both regions, and the threshold for energy leakage are discussed",
    author = "K. Kokkonen and Johanna Meltaus and Tuomas Pensala and M. Kaivola",
    year = "2011",
    doi = "10.1109/ULTSYM.2011.0074",
    language = "English",
    isbn = "978-1-4577-1253-1",
    pages = "308--311",
    booktitle = "Proceedings",
    publisher = "IEEE Institute of Electrical and Electronic Engineers",
    address = "United States",

    }

    Kokkonen, K, Meltaus, J, Pensala, T & Kaivola, M 2011, Measurement of dispersion properties of active and surrounding regions in BAW resonator. in Proceedings: IEEE International Ultrasonics Symposium, IUS 2011. IEEE Institute of Electrical and Electronic Engineers , pp. 308-311, IEEE International Ultrasonics Symposium, IUS 2011, Orlando, United States, 18/10/11. https://doi.org/10.1109/ULTSYM.2011.0074

    Measurement of dispersion properties of active and surrounding regions in BAW resonator. / Kokkonen, K.; Meltaus, Johanna; Pensala, Tuomas; Kaivola, M.

    Proceedings: IEEE International Ultrasonics Symposium, IUS 2011. IEEE Institute of Electrical and Electronic Engineers , 2011. p. 308-311.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - Measurement of dispersion properties of active and surrounding regions in BAW resonator

    AU - Kokkonen, K.

    AU - Meltaus, Johanna

    AU - Pensala, Tuomas

    AU - Kaivola, M.

    PY - 2011

    Y1 - 2011

    N2 - Acoustic wave fields both within the active electrode area of a solidly mounted 1.8 GHz bulk acoustic wave resonator, and around it, are measured using a heterodyne laser interferometer. Plate wave dispersion diagrams for both regions are extracted from the measurement data. The waves leaking from the resonator area enable the determination of the dispersion properties of the sourceless outside region. The experimental dispersion data reveal the cutoff frequencies of the acoustic vibration modes in the region surrounding the resonator, and therefore, the lateral energy trapping range of the resonator can be directly determined from the measurements. The onset of the acoustic leakage from the resonator is signalled on one hand by propagating wave modes appearing in the dispersion diagram of the surrounding region, and on the other hand by the abruptly diminishing amplitude of curves in the resonator dispersion diagram. This information is important for verifying and further developing the simulation tools used for the design of the resonators. Experimental wave field images, dispersion diagrams for both regions, and the threshold for energy leakage are discussed

    AB - Acoustic wave fields both within the active electrode area of a solidly mounted 1.8 GHz bulk acoustic wave resonator, and around it, are measured using a heterodyne laser interferometer. Plate wave dispersion diagrams for both regions are extracted from the measurement data. The waves leaking from the resonator area enable the determination of the dispersion properties of the sourceless outside region. The experimental dispersion data reveal the cutoff frequencies of the acoustic vibration modes in the region surrounding the resonator, and therefore, the lateral energy trapping range of the resonator can be directly determined from the measurements. The onset of the acoustic leakage from the resonator is signalled on one hand by propagating wave modes appearing in the dispersion diagram of the surrounding region, and on the other hand by the abruptly diminishing amplitude of curves in the resonator dispersion diagram. This information is important for verifying and further developing the simulation tools used for the design of the resonators. Experimental wave field images, dispersion diagrams for both regions, and the threshold for energy leakage are discussed

    U2 - 10.1109/ULTSYM.2011.0074

    DO - 10.1109/ULTSYM.2011.0074

    M3 - Conference article in proceedings

    SN - 978-1-4577-1253-1

    SP - 308

    EP - 311

    BT - Proceedings

    PB - IEEE Institute of Electrical and Electronic Engineers

    ER -

    Kokkonen K, Meltaus J, Pensala T, Kaivola M. Measurement of dispersion properties of active and surrounding regions in BAW resonator. In Proceedings: IEEE International Ultrasonics Symposium, IUS 2011. IEEE Institute of Electrical and Electronic Engineers . 2011. p. 308-311 https://doi.org/10.1109/ULTSYM.2011.0074