Measurement of dispersion properties of active and surrounding regions in BAW resonator

K. Kokkonen, Johanna Meltaus, Tuomas Pensala, M. Kaivola

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

Acoustic wave fields both within the active electrode area of a solidly mounted 1.8 GHz bulk acoustic wave resonator, and around it, are measured using a heterodyne laser interferometer. Plate wave dispersion diagrams for both regions are extracted from the measurement data. The waves leaking from the resonator area enable the determination of the dispersion properties of the sourceless outside region. The experimental dispersion data reveal the cutoff frequencies of the acoustic vibration modes in the region surrounding the resonator, and therefore, the lateral energy trapping range of the resonator can be directly determined from the measurements. The onset of the acoustic leakage from the resonator is signalled on one hand by propagating wave modes appearing in the dispersion diagram of the surrounding region, and on the other hand by the abruptly diminishing amplitude of curves in the resonator dispersion diagram. This information is important for verifying and further developing the simulation tools used for the design of the resonators. Experimental wave field images, dispersion diagrams for both regions, and the threshold for energy leakage are discussed
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationIEEE International Ultrasonics Symposium, IUS 2011
PublisherInstitute of Electrical and Electronic Engineers IEEE
Pages308-311
ISBN (Electronic)978-1-4577-1252-4
ISBN (Print)978-1-4577-1253-1
DOIs
Publication statusPublished - 2011
MoE publication typeA4 Article in a conference publication
EventIEEE International Ultrasonics Symposium, IUS 2011 - Orlando, United States
Duration: 18 Oct 201121 Oct 2011

Conference

ConferenceIEEE International Ultrasonics Symposium, IUS 2011
Abbreviated titleIUS 2011
CountryUnited States
CityOrlando
Period18/10/1121/10/11

Fingerprint

resonators
diagrams
acoustics
leakage
wave dispersion
sound waves
vibration mode
cut-off
interferometers
trapping
thresholds
electrodes
energy
curves
lasers
simulation

Cite this

Kokkonen, K., Meltaus, J., Pensala, T., & Kaivola, M. (2011). Measurement of dispersion properties of active and surrounding regions in BAW resonator. In Proceedings: IEEE International Ultrasonics Symposium, IUS 2011 (pp. 308-311). Institute of Electrical and Electronic Engineers IEEE. https://doi.org/10.1109/ULTSYM.2011.0074
Kokkonen, K. ; Meltaus, Johanna ; Pensala, Tuomas ; Kaivola, M. / Measurement of dispersion properties of active and surrounding regions in BAW resonator. Proceedings: IEEE International Ultrasonics Symposium, IUS 2011. Institute of Electrical and Electronic Engineers IEEE, 2011. pp. 308-311
@inproceedings{2a46e4a59318498cb1113d450c25d889,
title = "Measurement of dispersion properties of active and surrounding regions in BAW resonator",
abstract = "Acoustic wave fields both within the active electrode area of a solidly mounted 1.8 GHz bulk acoustic wave resonator, and around it, are measured using a heterodyne laser interferometer. Plate wave dispersion diagrams for both regions are extracted from the measurement data. The waves leaking from the resonator area enable the determination of the dispersion properties of the sourceless outside region. The experimental dispersion data reveal the cutoff frequencies of the acoustic vibration modes in the region surrounding the resonator, and therefore, the lateral energy trapping range of the resonator can be directly determined from the measurements. The onset of the acoustic leakage from the resonator is signalled on one hand by propagating wave modes appearing in the dispersion diagram of the surrounding region, and on the other hand by the abruptly diminishing amplitude of curves in the resonator dispersion diagram. This information is important for verifying and further developing the simulation tools used for the design of the resonators. Experimental wave field images, dispersion diagrams for both regions, and the threshold for energy leakage are discussed",
author = "K. Kokkonen and Johanna Meltaus and Tuomas Pensala and M. Kaivola",
year = "2011",
doi = "10.1109/ULTSYM.2011.0074",
language = "English",
isbn = "978-1-4577-1253-1",
pages = "308--311",
booktitle = "Proceedings",
publisher = "Institute of Electrical and Electronic Engineers IEEE",
address = "United States",

}

Kokkonen, K, Meltaus, J, Pensala, T & Kaivola, M 2011, Measurement of dispersion properties of active and surrounding regions in BAW resonator. in Proceedings: IEEE International Ultrasonics Symposium, IUS 2011. Institute of Electrical and Electronic Engineers IEEE, pp. 308-311, IEEE International Ultrasonics Symposium, IUS 2011, Orlando, United States, 18/10/11. https://doi.org/10.1109/ULTSYM.2011.0074

Measurement of dispersion properties of active and surrounding regions in BAW resonator. / Kokkonen, K.; Meltaus, Johanna; Pensala, Tuomas; Kaivola, M.

Proceedings: IEEE International Ultrasonics Symposium, IUS 2011. Institute of Electrical and Electronic Engineers IEEE, 2011. p. 308-311.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Measurement of dispersion properties of active and surrounding regions in BAW resonator

AU - Kokkonen, K.

AU - Meltaus, Johanna

AU - Pensala, Tuomas

AU - Kaivola, M.

PY - 2011

Y1 - 2011

N2 - Acoustic wave fields both within the active electrode area of a solidly mounted 1.8 GHz bulk acoustic wave resonator, and around it, are measured using a heterodyne laser interferometer. Plate wave dispersion diagrams for both regions are extracted from the measurement data. The waves leaking from the resonator area enable the determination of the dispersion properties of the sourceless outside region. The experimental dispersion data reveal the cutoff frequencies of the acoustic vibration modes in the region surrounding the resonator, and therefore, the lateral energy trapping range of the resonator can be directly determined from the measurements. The onset of the acoustic leakage from the resonator is signalled on one hand by propagating wave modes appearing in the dispersion diagram of the surrounding region, and on the other hand by the abruptly diminishing amplitude of curves in the resonator dispersion diagram. This information is important for verifying and further developing the simulation tools used for the design of the resonators. Experimental wave field images, dispersion diagrams for both regions, and the threshold for energy leakage are discussed

AB - Acoustic wave fields both within the active electrode area of a solidly mounted 1.8 GHz bulk acoustic wave resonator, and around it, are measured using a heterodyne laser interferometer. Plate wave dispersion diagrams for both regions are extracted from the measurement data. The waves leaking from the resonator area enable the determination of the dispersion properties of the sourceless outside region. The experimental dispersion data reveal the cutoff frequencies of the acoustic vibration modes in the region surrounding the resonator, and therefore, the lateral energy trapping range of the resonator can be directly determined from the measurements. The onset of the acoustic leakage from the resonator is signalled on one hand by propagating wave modes appearing in the dispersion diagram of the surrounding region, and on the other hand by the abruptly diminishing amplitude of curves in the resonator dispersion diagram. This information is important for verifying and further developing the simulation tools used for the design of the resonators. Experimental wave field images, dispersion diagrams for both regions, and the threshold for energy leakage are discussed

U2 - 10.1109/ULTSYM.2011.0074

DO - 10.1109/ULTSYM.2011.0074

M3 - Conference article in proceedings

SN - 978-1-4577-1253-1

SP - 308

EP - 311

BT - Proceedings

PB - Institute of Electrical and Electronic Engineers IEEE

ER -

Kokkonen K, Meltaus J, Pensala T, Kaivola M. Measurement of dispersion properties of active and surrounding regions in BAW resonator. In Proceedings: IEEE International Ultrasonics Symposium, IUS 2011. Institute of Electrical and Electronic Engineers IEEE. 2011. p. 308-311 https://doi.org/10.1109/ULTSYM.2011.0074