Measurement of groove depth standards in the range 1 μm up to 1 mm (EURAMET project 1407)

Uwe Brand, Michael Matus, Laura Carcedo, Lukasz Slusarski, Gian Bartolo Picotto, Antti Lassila, Faith Hungwe, Olena Flys, Murat Aksulu, Vladimir Kosteev

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