Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological AFM

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)

    Abstract

    Gratings and step height standards are useful transfer standards for lateral and vertical length scale calibration of AFMs. In order to have traceability to the SI-metre, the standards must have been calibrated prior to use. Metrological AFMs (MAFMs) with online laser interferometric position measurements are versatile instruments for the calibrations. The developed task specific measurement strategies for step height and pitch calibrations with MIKES metrological AFM are described. The strategies were developed to give high accuracy and to reduce the measurement time. Detailed uncertainty estimations for step height and grating pitch calibrations are also given.

    Original languageEnglish
    Title of host publicationProceedings of SPIE, Scanning Microscopies 2011
    Subtitle of host publicationAdvanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)978-0-8194-8610-3
    DOIs
    Publication statusPublished - 2011
    MoE publication typeA4 Article in a conference publication
    EventScanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences - Orlando, FL, United States
    Duration: 26 Apr 201128 Apr 2011

    Publication series

    SeriesProceedings of SPIE
    Volume8036
    ISSN0277-786X

    Conference

    ConferenceScanning Microscopies 2011
    CountryUnited States
    CityOrlando, FL
    Period26/04/1128/04/11

    Keywords

    • Atomic force microscope (AFM)
    • Calibration
    • Grating pitch
    • Step height
    • Uncertainty

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