Abstract
Gratings and step height standards are useful transfer standards for lateral and vertical length scale calibration of AFMs. In order to have traceability to the SI-metre, the standards must have been calibrated prior to use. Metrological AFMs (MAFMs) with online laser interferometric position measurements are versatile instruments for the calibrations. The developed task specific measurement strategies for step height and pitch calibrations with MIKES metrological AFM are described. The strategies were developed to give high accuracy and to reduce the measurement time. Detailed uncertainty estimations for step height and grating pitch calibrations are also given.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of SPIE, Scanning Microscopies 2011 |
| Subtitle of host publication | Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences |
| Publisher | International Society for Optics and Photonics SPIE |
| ISBN (Electronic) | 978-081948610-3 |
| DOIs | |
| Publication status | Published - 2011 |
| MoE publication type | A4 Article in a conference publication |
| Event | Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences - Orlando, FL, United States Duration: 26 Apr 2011 → 28 Apr 2011 |
Publication series
| Series | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 8036 |
| ISSN | 0277-786X |
Conference
| Conference | Scanning Microscopies 2011 |
|---|---|
| Country | United States |
| City | Orlando, FL |
| Period | 26/04/11 → 28/04/11 |
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Keywords
- Atomic force microscope (AFM)
- Calibration
- Grating pitch
- Step height
- Uncertainty
Cite this
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Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological AFM. / Korpelainen, V.; Seppä, J.; Lassila, A.
Proceedings of SPIE, Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences. International Society for Optics and Photonics SPIE, 2011. 80360Q (Proceedings of SPIE - The International Society for Optical Engineering, Vol. 8036).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
TY - GEN
T1 - Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological AFM
AU - Korpelainen, V.
AU - Seppä, J.
AU - Lassila, A.
PY - 2011
Y1 - 2011
N2 - Gratings and step height standards are useful transfer standards for lateral and vertical length scale calibration of AFMs. In order to have traceability to the SI-metre, the standards must have been calibrated prior to use. Metrological AFMs (MAFMs) with online laser interferometric position measurements are versatile instruments for the calibrations. The developed task specific measurement strategies for step height and pitch calibrations with MIKES metrological AFM are described. The strategies were developed to give high accuracy and to reduce the measurement time. Detailed uncertainty estimations for step height and grating pitch calibrations are also given.
AB - Gratings and step height standards are useful transfer standards for lateral and vertical length scale calibration of AFMs. In order to have traceability to the SI-metre, the standards must have been calibrated prior to use. Metrological AFMs (MAFMs) with online laser interferometric position measurements are versatile instruments for the calibrations. The developed task specific measurement strategies for step height and pitch calibrations with MIKES metrological AFM are described. The strategies were developed to give high accuracy and to reduce the measurement time. Detailed uncertainty estimations for step height and grating pitch calibrations are also given.
KW - Atomic force microscope (AFM)
KW - Calibration
KW - Grating pitch
KW - Step height
KW - Uncertainty
UR - http://www.scopus.com/inward/record.url?scp=79960412210&partnerID=8YFLogxK
U2 - 10.1117/12.883818
DO - 10.1117/12.883818
M3 - Conference article in proceedings
AN - SCOPUS:79960412210
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Proceedings of SPIE, Scanning Microscopies 2011
PB - International Society for Optics and Photonics SPIE
ER -