Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological AFM

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1 Citation (Scopus)

Abstract

Gratings and step height standards are useful transfer standards for lateral and vertical length scale calibration of AFMs. In order to have traceability to the SI-metre, the standards must have been calibrated prior to use. Metrological AFMs (MAFMs) with online laser interferometric position measurements are versatile instruments for the calibrations. The developed task specific measurement strategies for step height and pitch calibrations with MIKES metrological AFM are described. The strategies were developed to give high accuracy and to reduce the measurement time. Detailed uncertainty estimations for step height and grating pitch calibrations are also given.

Original languageEnglish
Title of host publicationProceedings of SPIE, Scanning Microscopies 2011
Subtitle of host publicationAdvanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)978-0-8194-8610-3
DOIs
Publication statusPublished - 2011
MoE publication typeA4 Article in a conference publication
EventScanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences - Orlando, FL, United States
Duration: 26 Apr 201128 Apr 2011

Publication series

SeriesProceedings of SPIE
Volume8036
ISSN0277-786X

Conference

ConferenceScanning Microscopies 2011
CountryUnited States
CityOrlando, FL
Period26/04/1128/04/11

Keywords

  • Atomic force microscope (AFM)
  • Calibration
  • Grating pitch
  • Step height
  • Uncertainty

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    Korpelainen, V., Seppä, J., & Lassila, A. (2011). Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological AFM. In Proceedings of SPIE, Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences [80360Q] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 8036 https://doi.org/10.1117/12.883818