Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological atomic force microscope

Keyphrases

• Measurement Uncertainty 100%
• Uncertainty Estimation 100%
• Pitch Height 100%
• Height Calibration 100%
• Step Height 100%
• Measurement Strategy 100%
• Strategy Evaluation 100%
• Metrological Atomic Force Microscopy 100%
• Step Height Standard 66%
• Pitch Calibration 66%
• Measurement Time 33%
• Transfer Standard 33%
• MIKES 33%
• Atomic Force Microscope 33%
• Metrology 33%
• Grating pitch 33%
• Position Measurement 33%
• Laser Interferometric 33%
• Accreditation 33%
• Grating 33%
• Scale Calibration 33%
• Step Gratings 33%
• Pitch Standard 33%

INIS

• height 100%
• pitches 100%
• atomic force microscopy 100%
• calibration 100%
• gratings 40%
• length 20%
• time measurement 20%
• accuracy 20%
• lasers 20%
• metrology 20%
• meters 20%

Engineering

• Atomic Force Microscope 100%
• Traceability 25%
• Length Scale 25%
• Accreditation 25%
• Measurement Time 25%