Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition

Oili M.E. Ylivaara (Corresponding Author), Andreas Langner, Xuwen Liu, Dieter Schneider, Jaakko Julin, Kai Arstila, Sakari Sintonen, Saima Ali, Harri Lipsanen, Timo Sajavaara, Simo-pekka Hannula, Riikka L. Puurunen

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