Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques

M. Berdova (Corresponding Author), T. Ylitalo, I. Kassamakov, J. Heino, P.T. Törmä, Lauri Kilpi, Helena Ronkainen, J. Koskinen, E. Hæggström, S. Franssila

Research output: Contribution to journalArticleScientificpeer-review

29 Citations (Scopus)

Abstract

We assessed mechanical properties of free-standing atomic-layer-deposited (ALD) Al2O3 thin films, mixed oxide (AlxTiyOz) films and Al2O3/TiO2 nanolaminates (75 and 200 nm). Using bulge and microelectromechanical system shaft-loading techniques, we evaluated the Young’s modulus, residual stress and ultimate tensile stress of these films and laminates. Fits to the load–displacement curves provided estimates for the residual stress and Young’s modulus. We extracted a residual stress of 347–403 MPa for Al2O3, 365–389 MPa for AlxTiyOz and 450–455 MPa for the nanolaminate. The Young’s modulus was 164–165 GPa for Al2O3, 151–154 GPa for mixed oxide and 148–169 GPa for the nanolaminate. Thin membranes exhibited an ultimate tensile strength of 1.57–2.56 GPa for Al2O3, 1.17–2.09 GPa for AlxTiyOz and 1.23–2.26 GPa for the nanolaminate. The ability to make thin, yet mechanically strong, suspended membranes is useful in micro- and nanosystem applications ranging from thermally insulated devices to large stroke mechanical actuators.
Original languageEnglish
Pages (from-to)370-377
Number of pages8
JournalActa Materialia
Volume66
DOIs
Publication statusPublished - 2014
MoE publication typeA1 Journal article-refereed

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Residual stresses
Elastic moduli
Thin films
Mechanical actuators
Nanosystems
Membranes
Microsystems
Tensile stress
Oxides
Oxide films
MEMS
Laminates
Tensile strength
Mechanical properties

Keywords

  • atomic layer deposition
  • bulge testing
  • mechanical properties
  • shaft-loading testing

Cite this

Berdova, M., Ylitalo, T., Kassamakov, I., Heino, J., Törmä, P. T., Kilpi, L., ... Franssila, S. (2014). Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques. Acta Materialia, 66, 370-377. https://doi.org/10.1016/j.actamat.2013.11.024
Berdova, M. ; Ylitalo, T. ; Kassamakov, I. ; Heino, J. ; Törmä, P.T. ; Kilpi, Lauri ; Ronkainen, Helena ; Koskinen, J. ; Hæggström, E. ; Franssila, S. / Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques. In: Acta Materialia. 2014 ; Vol. 66. pp. 370-377.
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abstract = "We assessed mechanical properties of free-standing atomic-layer-deposited (ALD) Al2O3 thin films, mixed oxide (AlxTiyOz) films and Al2O3/TiO2 nanolaminates (75 and 200 nm). Using bulge and microelectromechanical system shaft-loading techniques, we evaluated the Young’s modulus, residual stress and ultimate tensile stress of these films and laminates. Fits to the load–displacement curves provided estimates for the residual stress and Young’s modulus. We extracted a residual stress of 347–403 MPa for Al2O3, 365–389 MPa for AlxTiyOz and 450–455 MPa for the nanolaminate. The Young’s modulus was 164–165 GPa for Al2O3, 151–154 GPa for mixed oxide and 148–169 GPa for the nanolaminate. Thin membranes exhibited an ultimate tensile strength of 1.57–2.56 GPa for Al2O3, 1.17–2.09 GPa for AlxTiyOz and 1.23–2.26 GPa for the nanolaminate. The ability to make thin, yet mechanically strong, suspended membranes is useful in micro- and nanosystem applications ranging from thermally insulated devices to large stroke mechanical actuators.",
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Berdova, M, Ylitalo, T, Kassamakov, I, Heino, J, Törmä, PT, Kilpi, L, Ronkainen, H, Koskinen, J, Hæggström, E & Franssila, S 2014, 'Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques', Acta Materialia, vol. 66, pp. 370-377. https://doi.org/10.1016/j.actamat.2013.11.024

Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques. / Berdova, M. (Corresponding Author); Ylitalo, T.; Kassamakov, I.; Heino, J.; Törmä, P.T.; Kilpi, Lauri; Ronkainen, Helena; Koskinen, J.; Hæggström, E.; Franssila, S.

In: Acta Materialia, Vol. 66, 2014, p. 370-377.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques

AU - Berdova, M.

AU - Ylitalo, T.

AU - Kassamakov, I.

AU - Heino, J.

AU - Törmä, P.T.

AU - Kilpi, Lauri

AU - Ronkainen, Helena

AU - Koskinen, J.

AU - Hæggström, E.

AU - Franssila, S.

N1 - Project code: 74717

PY - 2014

Y1 - 2014

N2 - We assessed mechanical properties of free-standing atomic-layer-deposited (ALD) Al2O3 thin films, mixed oxide (AlxTiyOz) films and Al2O3/TiO2 nanolaminates (75 and 200 nm). Using bulge and microelectromechanical system shaft-loading techniques, we evaluated the Young’s modulus, residual stress and ultimate tensile stress of these films and laminates. Fits to the load–displacement curves provided estimates for the residual stress and Young’s modulus. We extracted a residual stress of 347–403 MPa for Al2O3, 365–389 MPa for AlxTiyOz and 450–455 MPa for the nanolaminate. The Young’s modulus was 164–165 GPa for Al2O3, 151–154 GPa for mixed oxide and 148–169 GPa for the nanolaminate. Thin membranes exhibited an ultimate tensile strength of 1.57–2.56 GPa for Al2O3, 1.17–2.09 GPa for AlxTiyOz and 1.23–2.26 GPa for the nanolaminate. The ability to make thin, yet mechanically strong, suspended membranes is useful in micro- and nanosystem applications ranging from thermally insulated devices to large stroke mechanical actuators.

AB - We assessed mechanical properties of free-standing atomic-layer-deposited (ALD) Al2O3 thin films, mixed oxide (AlxTiyOz) films and Al2O3/TiO2 nanolaminates (75 and 200 nm). Using bulge and microelectromechanical system shaft-loading techniques, we evaluated the Young’s modulus, residual stress and ultimate tensile stress of these films and laminates. Fits to the load–displacement curves provided estimates for the residual stress and Young’s modulus. We extracted a residual stress of 347–403 MPa for Al2O3, 365–389 MPa for AlxTiyOz and 450–455 MPa for the nanolaminate. The Young’s modulus was 164–165 GPa for Al2O3, 151–154 GPa for mixed oxide and 148–169 GPa for the nanolaminate. Thin membranes exhibited an ultimate tensile strength of 1.57–2.56 GPa for Al2O3, 1.17–2.09 GPa for AlxTiyOz and 1.23–2.26 GPa for the nanolaminate. The ability to make thin, yet mechanically strong, suspended membranes is useful in micro- and nanosystem applications ranging from thermally insulated devices to large stroke mechanical actuators.

KW - atomic layer deposition

KW - bulge testing

KW - mechanical properties

KW - shaft-loading testing

U2 - 10.1016/j.actamat.2013.11.024

DO - 10.1016/j.actamat.2013.11.024

M3 - Article

VL - 66

SP - 370

EP - 377

JO - Acta Materialia

JF - Acta Materialia

SN - 1359-6454

ER -