Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques

M. Berdova (Corresponding Author), T. Ylitalo, I. Kassamakov, J. Heino, P.T. Törmä, Lauri Kilpi, Helena Ronkainen, J. Koskinen, E. Hæggström, S. Franssila

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    34 Citations (Scopus)

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    Chemical Compounds

    Engineering & Materials Science