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Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques
M. Berdova (Corresponding Author), T. Ylitalo, I. Kassamakov, J. Heino, P.T. Törmä, Lauri Kilpi, Helena Ronkainen, J. Koskinen, E. Hæggström, S. Franssila
Research output: Contribution to journal › Article › Scientific › peer-review
44
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(Scopus)