Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques

  • M. Berdova*
  • , T. Ylitalo
  • , I. Kassamakov
  • , J. Heino
  • , P.T. Törmä
  • , Lauri Kilpi
  • , Helena Ronkainen
  • , J. Koskinen
  • , E. Hæggström
  • , S. Franssila
    • *Corresponding author for this work

    Research output: Contribution to journal › Article › Scientific › peer-review

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