Mechanical properties of ALD TiN films made from TiCl4 and NH3

Riikka L. Puurunen (Corresponding author), Oili Ylivaara, Xuwen Liu, Jaakko Julin, Sakari Sintonen, B. Marchand, Pasi Jalkanen, Eero Haimi, Marko Tuominen, Jyrki Räisänen, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publicationBALD2014 Abstract book
Publication statusPublished - 2014
Event12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014 - Helsinki, Finland
Duration: 12 May 201413 May 2014
Conference number: 12
http://www.aldcoe.fi/bald2014/program.pdf (Program)
http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

Conference

Conference12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014
Abbreviated titleBaltic ALD 2014
CountryFinland
CityHelsinki
Period12/05/1413/05/14
OtherAbstracts reviewed and published.
Internet address

Cite this

Puurunen, R. L., Ylivaara, O., Liu, X., Julin, J., Sintonen, S., Marchand, B., ... Hannula, S-P. (2014). Mechanical properties of ALD TiN films made from TiCl4 and NH3. In BALD2014 Abstract book
Puurunen, Riikka L. ; Ylivaara, Oili ; Liu, Xuwen ; Julin, Jaakko ; Sintonen, Sakari ; Marchand, B. ; Jalkanen, Pasi ; Haimi, Eero ; Tuominen, Marko ; Räisänen, Jyrki ; Sajavaara, Timo ; Lipsanen, Harri ; Hannula, Simo-Pekka. / Mechanical properties of ALD TiN films made from TiCl4 and NH3. BALD2014 Abstract book. 2014.
@inbook{29b78a58581e43ba94cec55dd58471ad,
title = "Mechanical properties of ALD TiN films made from TiCl4 and NH3",
author = "Puurunen, {Riikka L.} and Oili Ylivaara and Xuwen Liu and Jaakko Julin and Sakari Sintonen and B. Marchand and Pasi Jalkanen and Eero Haimi and Marko Tuominen and Jyrki R{\"a}is{\"a}nen and Timo Sajavaara and Harri Lipsanen and Simo-Pekka Hannula",
note = "Published abstract of a poster presentation Project 74717 MECHALD",
year = "2014",
language = "English",
booktitle = "BALD2014 Abstract book",

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Puurunen, RL, Ylivaara, O, Liu, X, Julin, J, Sintonen, S, Marchand, B, Jalkanen, P, Haimi, E, Tuominen, M, Räisänen, J, Sajavaara, T, Lipsanen, H & Hannula, S-P 2014, Mechanical properties of ALD TiN films made from TiCl4 and NH3. in BALD2014 Abstract book. 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014, Helsinki, Finland, 12/05/14.

Mechanical properties of ALD TiN films made from TiCl4 and NH3. / Puurunen, Riikka L. (Corresponding author); Ylivaara, Oili; Liu, Xuwen; Julin, Jaakko; Sintonen, Sakari; Marchand, B.; Jalkanen, Pasi; Haimi, Eero; Tuominen, Marko; Räisänen, Jyrki; Sajavaara, Timo; Lipsanen, Harri; Hannula, Simo-Pekka.

BALD2014 Abstract book. 2014.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

TY - CHAP

T1 - Mechanical properties of ALD TiN films made from TiCl4 and NH3

AU - Puurunen, Riikka L.

AU - Ylivaara, Oili

AU - Liu, Xuwen

AU - Julin, Jaakko

AU - Sintonen, Sakari

AU - Marchand, B.

AU - Jalkanen, Pasi

AU - Haimi, Eero

AU - Tuominen, Marko

AU - Räisänen, Jyrki

AU - Sajavaara, Timo

AU - Lipsanen, Harri

AU - Hannula, Simo-Pekka

N1 - Published abstract of a poster presentation Project 74717 MECHALD

PY - 2014

Y1 - 2014

M3 - Conference abstract in proceedings

BT - BALD2014 Abstract book

ER -

Puurunen RL, Ylivaara O, Liu X, Julin J, Sintonen S, Marchand B et al. Mechanical properties of ALD TiN films made from TiCl4 and NH3. In BALD2014 Abstract book. 2014