Mechanical properties of ALD TiN films made from TiCl4 and NH3

Riikka L. Puurunen (Corresponding author), Oili Ylivaara, Xuwen Liu, Jaakko Julin, Sakari Sintonen, B. Marchand, Pasi Jalkanen, Eero Haimi, Marko Tuominen, Jyrki Räisänen, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationBALD2014 Abstract book
    Publication statusPublished - 2014
    Event12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014 - Helsinki, Finland
    Duration: 12 May 201413 May 2014
    Conference number: 12
    http://www.aldcoe.fi/bald2014/program.pdf (Program)
    http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

    Conference

    Conference12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014
    Abbreviated titleBaltic ALD 2014
    CountryFinland
    CityHelsinki
    Period12/05/1413/05/14
    OtherAbstracts reviewed and published.
    Internet address

    Cite this

    Puurunen, R. L., Ylivaara, O., Liu, X., Julin, J., Sintonen, S., Marchand, B., ... Hannula, S-P. (2014). Mechanical properties of ALD TiN films made from TiCl4 and NH3. In BALD2014 Abstract book
    Puurunen, Riikka L. ; Ylivaara, Oili ; Liu, Xuwen ; Julin, Jaakko ; Sintonen, Sakari ; Marchand, B. ; Jalkanen, Pasi ; Haimi, Eero ; Tuominen, Marko ; Räisänen, Jyrki ; Sajavaara, Timo ; Lipsanen, Harri ; Hannula, Simo-Pekka. / Mechanical properties of ALD TiN films made from TiCl4 and NH3. BALD2014 Abstract book. 2014.
    @inbook{29b78a58581e43ba94cec55dd58471ad,
    title = "Mechanical properties of ALD TiN films made from TiCl4 and NH3",
    author = "Puurunen, {Riikka L.} and Oili Ylivaara and Xuwen Liu and Jaakko Julin and Sakari Sintonen and B. Marchand and Pasi Jalkanen and Eero Haimi and Marko Tuominen and Jyrki R{\"a}is{\"a}nen and Timo Sajavaara and Harri Lipsanen and Simo-Pekka Hannula",
    note = "Published abstract of a poster presentation Project 74717 MECHALD",
    year = "2014",
    language = "English",
    booktitle = "BALD2014 Abstract book",

    }

    Puurunen, RL, Ylivaara, O, Liu, X, Julin, J, Sintonen, S, Marchand, B, Jalkanen, P, Haimi, E, Tuominen, M, Räisänen, J, Sajavaara, T, Lipsanen, H & Hannula, S-P 2014, Mechanical properties of ALD TiN films made from TiCl4 and NH3. in BALD2014 Abstract book. 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014, Helsinki, Finland, 12/05/14.

    Mechanical properties of ALD TiN films made from TiCl4 and NH3. / Puurunen, Riikka L. (Corresponding author); Ylivaara, Oili; Liu, Xuwen; Julin, Jaakko; Sintonen, Sakari; Marchand, B.; Jalkanen, Pasi; Haimi, Eero; Tuominen, Marko; Räisänen, Jyrki; Sajavaara, Timo; Lipsanen, Harri; Hannula, Simo-Pekka.

    BALD2014 Abstract book. 2014.

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    TY - CHAP

    T1 - Mechanical properties of ALD TiN films made from TiCl4 and NH3

    AU - Puurunen, Riikka L.

    AU - Ylivaara, Oili

    AU - Liu, Xuwen

    AU - Julin, Jaakko

    AU - Sintonen, Sakari

    AU - Marchand, B.

    AU - Jalkanen, Pasi

    AU - Haimi, Eero

    AU - Tuominen, Marko

    AU - Räisänen, Jyrki

    AU - Sajavaara, Timo

    AU - Lipsanen, Harri

    AU - Hannula, Simo-Pekka

    N1 - Published abstract of a poster presentation Project 74717 MECHALD

    PY - 2014

    Y1 - 2014

    M3 - Conference abstract in proceedings

    BT - BALD2014 Abstract book

    ER -

    Puurunen RL, Ylivaara O, Liu X, Julin J, Sintonen S, Marchand B et al. Mechanical properties of ALD TiN films made from TiCl4 and NH3. In BALD2014 Abstract book. 2014