Mechanical properties of ALD TiN films made from TiCl4 and NH3

Riikka L. Puurunen (Corresponding author), Oili Ylivaara, Xuwen Liu, Jaakko Julin, Sakari Sintonen, B. Marchand, Pasi Jalkanen, Eero Haimi, Marko Tuominen, Jyrki Räisänen, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationBALD2014 Abstract book
    Publication statusPublished - 2014
    Event12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014 - Helsinki, Finland
    Duration: 12 May 201413 May 2014
    Conference number: 12
    http://www.aldcoe.fi/bald2014/program.pdf (Program)
    http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

    Conference

    Conference12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014
    Abbreviated titleBaltic ALD 2014
    CountryFinland
    CityHelsinki
    Period12/05/1413/05/14
    OtherAbstracts reviewed and published.
    Internet address

    Cite this

    Puurunen, R. L., Ylivaara, O., Liu, X., Julin, J., Sintonen, S., Marchand, B., Jalkanen, P., Haimi, E., Tuominen, M., Räisänen, J., Sajavaara, T., Lipsanen, H., & Hannula, S-P. (2014). Mechanical properties of ALD TiN films made from TiCl4 and NH3. In BALD2014 Abstract book