Mechanical properties of ALD TiN films made from TiCl4 and NH3

Riikka L. Puurunen; Oili Ylivaara; Xuwen Liu; Jaakko Julin; Sakari Sintonen; B. Marchand; Pasi Jalkanen; Eero Haimi; Marko Tuominen; Jyrki Räisänen; Timo Sajavaara; Harri Lipsanen; Simo-Pekka Hannula

Mechanical properties of ALD TiN films made from TiCl₄ and NH₃

Riikka L. Puurunen^*
, Oili Ylivaara
, Xuwen Liu
, Jaakko Julin
, Sakari Sintonen
, B. Marchand
, Pasi Jalkanen
, Eero Haimi
, Marko Tuominen
, Jyrki Räisänen
, Timo Sajavaara
, Harri Lipsanen
, Simo-Pekka Hannula

^*Corresponding author for this work

VTT (former employee or external)
Aalto University
University of Jyväskylä
University of Helsinki
ASM Microchemistry Oy

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	BALD2014 Abstract book
Publication status	Published - 2014
MoE publication type	Not Eligible
Event	12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014 - Helsinki, Finland Duration: 12 May 2014 → 13 May 2014 Conference number: 12 http://www.aldcoe.fi/bald2014/program.pdf (Program) http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

Conference

Conference	12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014
Abbreviated title	Baltic ALD 2014
Country/Territory	Finland
City	Helsinki
Period	12/05/14 → 13/05/14
Other	Abstracts reviewed and published.
Internet address	http://www.aldcoe.fi/bald2014/program.pdf (Program) http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

Cite this

@inbook{29b78a58581e43ba94cec55dd58471ad,

title = "Mechanical properties of ALD TiN films made from TiCl4 and NH3",

author = "Puurunen, \{Riikka L.\} and Oili Ylivaara and Xuwen Liu and Jaakko Julin and Sakari Sintonen and B. Marchand and Pasi Jalkanen and Eero Haimi and Marko Tuominen and Jyrki R{\"a}is{\"a}nen and Timo Sajavaara and Harri Lipsanen and Simo-Pekka Hannula",

note = "Published abstract of a poster presentation Project 74717 MECHALD; 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014, Baltic ALD 2014 ; Conference date: 12-05-2014 Through 13-05-2014",

year = "2014",

language = "English",

booktitle = "BALD2014 Abstract book",

url = "http://www.aldcoe.fi/bald2014/program.pdf, http://www.aldcoe.fi/bald2014/posters.pdf",

}

Puurunen, RL, Ylivaara, O, Liu, X, Julin, J, Sintonen, S, Marchand, B, Jalkanen, P, Haimi, E, Tuominen, M, Räisänen, J, Sajavaara, T, Lipsanen, H & Hannula, S-P 2014, Mechanical properties of ALD TiN films made from TiCl₄ and NH₃. in BALD2014 Abstract book. 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014, Helsinki, Finland, 12/05/14.

TY - CHAP

T1 - Mechanical properties of ALD TiN films made from TiCl4 and NH3

AU - Puurunen, Riikka L.

AU - Ylivaara, Oili

AU - Liu, Xuwen

AU - Julin, Jaakko

AU - Sintonen, Sakari

AU - Marchand, B.

AU - Jalkanen, Pasi

AU - Haimi, Eero

AU - Tuominen, Marko

AU - Räisänen, Jyrki

AU - Sajavaara, Timo

AU - Lipsanen, Harri

AU - Hannula, Simo-Pekka

N1 - Conference code: 12

PY - 2014

Y1 - 2014

M3 - Conference abstract in proceedings

BT - BALD2014 Abstract book

T2 - 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014

Y2 - 12 May 2014 through 13 May 2014

ER -