Mechanical property mapping of ALD thin films

Riikka L. Puurunen, Saima Ali, Kai Arstila, Maria Berdova, Eero Haimi, Hannele Heikkinen, Jaakko Julin, Lauri Kilpi, Mikko Laitinen, Xuwen Liu, Jussi Lyytinen, Jari Malm, Alexander Pyymaki-Perros, Ville Rontu, Sakari Sintonen, Oili Ylivaara, Timo Sajavaara, Harri Lipsanen, Sami Franssila, Jari KoskinenHelena Ronkainen, Simo-Pekka Hannula, Jyrki Kiihamäki

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationTechnical Program & Abstracts
    PublisherAmerican Vacuum Society AVS
    Publication statusPublished - 2015
    Event13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015 - Tartu, Estonia
    Duration: 28 Sep 201529 Sep 2015

    Conference

    Conference13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015
    Abbreviated titleBaltic ALD 2015
    CountryEstonia
    CityTartu
    Period28/09/1529/09/15

    Cite this

    Puurunen, R. L., Ali, S., Arstila, K., Berdova, M., Haimi, E., Heikkinen, H., Julin, J., Kilpi, L., Laitinen, M., Liu, X., Lyytinen, J., Malm, J., Pyymaki-Perros, A., Rontu, V., Sintonen, S., Ylivaara, O., Sajavaara, T., Lipsanen, H., Franssila, S., ... Kiihamäki, J. (2015). Mechanical property mapping of ALD thin films. In Technical Program & Abstracts American Vacuum Society AVS.