Mechanical property mapping of ALD thin films

Riikka L. Puurunen, Saima Ali, Kai Arstila, Maria Berdova, Eero Haimi, Hannele Heikkinen, Jaakko Julin, Lauri Kilpi, Mikko Laitinen, Xuwen Liu, Jussi Lyytinen, Jari Malm, Alexander Pyymaki-Perros, Ville Rontu, Sakari Sintonen, Oili Ylivaara, Timo Sajavaara, Harri Lipsanen, Sami Franssila, Jari KoskinenHelena Ronkainen, Simo-Pekka Hannula, Jyrki Kiihamäki

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationTechnical Program & Abstracts
    PublisherAmerican Vacuum Society AVS
    Publication statusPublished - 2015
    Event13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015 - Tartu, Estonia
    Duration: 28 Sep 201529 Sep 2015

    Conference

    Conference13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015
    Abbreviated titleBaltic ALD 2015
    CountryEstonia
    CityTartu
    Period28/09/1529/09/15

    Cite this

    Puurunen, R. L., Ali, S., Arstila, K., Berdova, M., Haimi, E., Heikkinen, H., ... Kiihamäki, J. (2015). Mechanical property mapping of ALD thin films. In Technical Program & Abstracts American Vacuum Society AVS.
    Puurunen, Riikka L. ; Ali, Saima ; Arstila, Kai ; Berdova, Maria ; Haimi, Eero ; Heikkinen, Hannele ; Julin, Jaakko ; Kilpi, Lauri ; Laitinen, Mikko ; Liu, Xuwen ; Lyytinen, Jussi ; Malm, Jari ; Pyymaki-Perros, Alexander ; Rontu, Ville ; Sintonen, Sakari ; Ylivaara, Oili ; Sajavaara, Timo ; Lipsanen, Harri ; Franssila, Sami ; Koskinen, Jari ; Ronkainen, Helena ; Hannula, Simo-Pekka ; Kiihamäki, Jyrki. / Mechanical property mapping of ALD thin films. Technical Program & Abstracts. American Vacuum Society AVS, 2015.
    @inbook{d714375113324e738f0b9a397d66d07e,
    title = "Mechanical property mapping of ALD thin films",
    author = "Puurunen, {Riikka L.} and Saima Ali and Kai Arstila and Maria Berdova and Eero Haimi and Hannele Heikkinen and Jaakko Julin and Lauri Kilpi and Mikko Laitinen and Xuwen Liu and Jussi Lyytinen and Jari Malm and Alexander Pyymaki-Perros and Ville Rontu and Sakari Sintonen and Oili Ylivaara and Timo Sajavaara and Harri Lipsanen and Sami Franssila and Jari Koskinen and Helena Ronkainen and Simo-Pekka Hannula and Jyrki Kiiham{\"a}ki",
    note = "Published abstract of a poster presentation Project 74717 MECHALD",
    year = "2015",
    language = "English",
    booktitle = "Technical Program & Abstracts",
    publisher = "American Vacuum Society AVS",
    address = "United States",

    }

    Puurunen, RL, Ali, S, Arstila, K, Berdova, M, Haimi, E, Heikkinen, H, Julin, J, Kilpi, L, Laitinen, M, Liu, X, Lyytinen, J, Malm, J, Pyymaki-Perros, A, Rontu, V, Sintonen, S, Ylivaara, O, Sajavaara, T, Lipsanen, H, Franssila, S, Koskinen, J, Ronkainen, H, Hannula, S-P & Kiihamäki, J 2015, Mechanical property mapping of ALD thin films. in Technical Program & Abstracts. American Vacuum Society AVS, 13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015, Tartu, Estonia, 28/09/15.

    Mechanical property mapping of ALD thin films. / Puurunen, Riikka L.; Ali, Saima; Arstila, Kai; Berdova, Maria; Haimi, Eero; Heikkinen, Hannele; Julin, Jaakko; Kilpi, Lauri; Laitinen, Mikko; Liu, Xuwen; Lyytinen, Jussi; Malm, Jari; Pyymaki-Perros, Alexander; Rontu, Ville; Sintonen, Sakari; Ylivaara, Oili; Sajavaara, Timo; Lipsanen, Harri; Franssila, Sami; Koskinen, Jari ; Ronkainen, Helena; Hannula, Simo-Pekka; Kiihamäki, Jyrki.

    Technical Program & Abstracts. American Vacuum Society AVS, 2015.

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    TY - CHAP

    T1 - Mechanical property mapping of ALD thin films

    AU - Puurunen, Riikka L.

    AU - Ali, Saima

    AU - Arstila, Kai

    AU - Berdova, Maria

    AU - Haimi, Eero

    AU - Heikkinen, Hannele

    AU - Julin, Jaakko

    AU - Kilpi, Lauri

    AU - Laitinen, Mikko

    AU - Liu, Xuwen

    AU - Lyytinen, Jussi

    AU - Malm, Jari

    AU - Pyymaki-Perros, Alexander

    AU - Rontu, Ville

    AU - Sintonen, Sakari

    AU - Ylivaara, Oili

    AU - Sajavaara, Timo

    AU - Lipsanen, Harri

    AU - Franssila, Sami

    AU - Koskinen, Jari

    AU - Ronkainen, Helena

    AU - Hannula, Simo-Pekka

    AU - Kiihamäki, Jyrki

    N1 - Published abstract of a poster presentation Project 74717 MECHALD

    PY - 2015

    Y1 - 2015

    M3 - Conference abstract in proceedings

    BT - Technical Program & Abstracts

    PB - American Vacuum Society AVS

    ER -

    Puurunen RL, Ali S, Arstila K, Berdova M, Haimi E, Heikkinen H et al. Mechanical property mapping of ALD thin films. In Technical Program & Abstracts. American Vacuum Society AVS. 2015