Mechanical property mapping of ALD thin films

Riikka L. Puurunen, Saima Ali, Kai Arstila, Maria Berdova, Eero Haimi, Hannele Heikkinen, Jaakko Julin, Lauri Kilpi, Mikko Laitinen, Xuwen Liu, Jussi Lyytinen, Jari Malm, Alexander Pyymaki-Perros, Ville Rontu, Sakari Sintonen, Oili Ylivaara, Timo Sajavaara, Harri Lipsanen, Sami Franssila, Jari KoskinenHelena Ronkainen, Simo-Pekka Hannula, Jyrki Kiihamäki

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publicationTechnical Program & Abstracts
PublisherAmerican Vacuum Society AVS
Publication statusPublished - 2015
Event13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015 - Tartu, Estonia
Duration: 28 Sep 201529 Sep 2015

Conference

Conference13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015
Abbreviated titleBaltic ALD 2015
CountryEstonia
CityTartu
Period28/09/1529/09/15

Cite this

Puurunen, R. L., Ali, S., Arstila, K., Berdova, M., Haimi, E., Heikkinen, H., ... Kiihamäki, J. (2015). Mechanical property mapping of ALD thin films. In Technical Program & Abstracts American Vacuum Society AVS.
Puurunen, Riikka L. ; Ali, Saima ; Arstila, Kai ; Berdova, Maria ; Haimi, Eero ; Heikkinen, Hannele ; Julin, Jaakko ; Kilpi, Lauri ; Laitinen, Mikko ; Liu, Xuwen ; Lyytinen, Jussi ; Malm, Jari ; Pyymaki-Perros, Alexander ; Rontu, Ville ; Sintonen, Sakari ; Ylivaara, Oili ; Sajavaara, Timo ; Lipsanen, Harri ; Franssila, Sami ; Koskinen, Jari ; Ronkainen, Helena ; Hannula, Simo-Pekka ; Kiihamäki, Jyrki. / Mechanical property mapping of ALD thin films. Technical Program & Abstracts. American Vacuum Society AVS, 2015.
@inbook{d714375113324e738f0b9a397d66d07e,
title = "Mechanical property mapping of ALD thin films",
author = "Puurunen, {Riikka L.} and Saima Ali and Kai Arstila and Maria Berdova and Eero Haimi and Hannele Heikkinen and Jaakko Julin and Lauri Kilpi and Mikko Laitinen and Xuwen Liu and Jussi Lyytinen and Jari Malm and Alexander Pyymaki-Perros and Ville Rontu and Sakari Sintonen and Oili Ylivaara and Timo Sajavaara and Harri Lipsanen and Sami Franssila and Jari Koskinen and Helena Ronkainen and Simo-Pekka Hannula and Jyrki Kiiham{\"a}ki",
note = "Published abstract of a poster presentation Project 74717 MECHALD",
year = "2015",
language = "English",
booktitle = "Technical Program & Abstracts",
publisher = "American Vacuum Society AVS",
address = "United States",

}

Puurunen, RL, Ali, S, Arstila, K, Berdova, M, Haimi, E, Heikkinen, H, Julin, J, Kilpi, L, Laitinen, M, Liu, X, Lyytinen, J, Malm, J, Pyymaki-Perros, A, Rontu, V, Sintonen, S, Ylivaara, O, Sajavaara, T, Lipsanen, H, Franssila, S, Koskinen, J, Ronkainen, H, Hannula, S-P & Kiihamäki, J 2015, Mechanical property mapping of ALD thin films. in Technical Program & Abstracts. American Vacuum Society AVS, 13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015, Tartu, Estonia, 28/09/15.

Mechanical property mapping of ALD thin films. / Puurunen, Riikka L.; Ali, Saima; Arstila, Kai; Berdova, Maria; Haimi, Eero; Heikkinen, Hannele; Julin, Jaakko; Kilpi, Lauri; Laitinen, Mikko; Liu, Xuwen; Lyytinen, Jussi; Malm, Jari; Pyymaki-Perros, Alexander; Rontu, Ville; Sintonen, Sakari; Ylivaara, Oili; Sajavaara, Timo; Lipsanen, Harri; Franssila, Sami; Koskinen, Jari ; Ronkainen, Helena; Hannula, Simo-Pekka; Kiihamäki, Jyrki.

Technical Program & Abstracts. American Vacuum Society AVS, 2015.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

TY - CHAP

T1 - Mechanical property mapping of ALD thin films

AU - Puurunen, Riikka L.

AU - Ali, Saima

AU - Arstila, Kai

AU - Berdova, Maria

AU - Haimi, Eero

AU - Heikkinen, Hannele

AU - Julin, Jaakko

AU - Kilpi, Lauri

AU - Laitinen, Mikko

AU - Liu, Xuwen

AU - Lyytinen, Jussi

AU - Malm, Jari

AU - Pyymaki-Perros, Alexander

AU - Rontu, Ville

AU - Sintonen, Sakari

AU - Ylivaara, Oili

AU - Sajavaara, Timo

AU - Lipsanen, Harri

AU - Franssila, Sami

AU - Koskinen, Jari

AU - Ronkainen, Helena

AU - Hannula, Simo-Pekka

AU - Kiihamäki, Jyrki

N1 - Published abstract of a poster presentation Project 74717 MECHALD

PY - 2015

Y1 - 2015

M3 - Conference abstract in proceedings

BT - Technical Program & Abstracts

PB - American Vacuum Society AVS

ER -

Puurunen RL, Ali S, Arstila K, Berdova M, Haimi E, Heikkinen H et al. Mechanical property mapping of ALD thin films. In Technical Program & Abstracts. American Vacuum Society AVS. 2015