Mechanical property mapping of ALD thin films

Riikka L. Puurunen; Saima Ali; Kai Arstila; Maria Berdova; Eero Haimi; Hannele Heikkinen; Jaakko Julin; Lauri Kilpi; Mikko Laitinen; Xuwen Liu; Jussi Lyytinen; Jari Malm; Alexander Pyymaki-Perros; Ville Rontu; Sakari Sintonen; Oili Ylivaara; Timo Sajavaara; Harri Lipsanen; Sami Franssila; Jari  Koskinen; Helena Ronkainen; Simo-Pekka Hannula; Jyrki Kiihamäki

Mechanical property mapping of ALD thin films

Riikka L. Puurunen
, Saima Ali
, Kai Arstila
, Maria Berdova
, Eero Haimi
, Hannele Heikkinen
, Jaakko Julin
, Lauri Kilpi
, Mikko Laitinen
, Xuwen Liu
, Jussi Lyytinen
, Jari Malm
, Alexander Pyymaki-Perros
, Ville Rontu
, Sakari Sintonen
, Oili Ylivaara
, Timo Sajavaara
, Harri Lipsanen
, Sami Franssila
, Jari Koskinen

Helena Ronkainen, Simo-Pekka Hannula, Jyrki Kiihamäki

University of Jyväskylä
Aalto University

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	Technical Program & Abstracts
Publisher	American Vacuum Society (AVS)
Publication status	Published - 2015
Event	13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015 - Tartu, Estonia Duration: 28 Sept 2015 → 29 Sept 2015

Conference

Conference	13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015
Abbreviated title	Baltic ALD 2015
Country/Territory	Estonia
City	Tartu
Period	28/09/15 → 29/09/15

Cite this

Puurunen, R. L., Ali, S., Arstila, K., Berdova, M., Haimi, E., Heikkinen, H., Julin, J., Kilpi, L., Laitinen, M., Liu, X., Lyytinen, J., Malm, J., Pyymaki-Perros, A., Rontu, V., Sintonen, S., Ylivaara, O., Sajavaara, T., Lipsanen, H., Franssila, S., ... Kiihamäki, J. (2015). Mechanical property mapping of ALD thin films. In Technical Program & Abstracts American Vacuum Society (AVS).

@inbook{d714375113324e738f0b9a397d66d07e,

title = "Mechanical property mapping of ALD thin films",

author = "Puurunen, \{Riikka L.\} and Saima Ali and Kai Arstila and Maria Berdova and Eero Haimi and Hannele Heikkinen and Jaakko Julin and Lauri Kilpi and Mikko Laitinen and Xuwen Liu and Jussi Lyytinen and Jari Malm and Alexander Pyymaki-Perros and Ville Rontu and Sakari Sintonen and Oili Ylivaara and Timo Sajavaara and Harri Lipsanen and Sami Franssila and Jari Koskinen and Helena Ronkainen and Simo-Pekka Hannula and Jyrki Kiiham{\"a}ki",

note = "Published abstract of a poster presentation Project 74717 MECHALD; 13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015, Baltic ALD 2015 ; Conference date: 28-09-2015 Through 29-09-2015",

year = "2015",

language = "English",

booktitle = "Technical Program \& Abstracts",

publisher = "American Vacuum Society (AVS)",

address = "United States",

}

Puurunen, RL, Ali, S, Arstila, K, Berdova, M, Haimi, E, Heikkinen, H, Julin, J, Kilpi, L, Laitinen, M, Liu, X, Lyytinen, J, Malm, J, Pyymaki-Perros, A, Rontu, V, Sintonen, S, Ylivaara, O, Sajavaara, T, Lipsanen, H, Franssila, S, Koskinen, J, Ronkainen, H, Hannula, S-P & Kiihamäki, J 2015, Mechanical property mapping of ALD thin films. in Technical Program & Abstracts. American Vacuum Society (AVS), 13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015, Tartu, Estonia, 28/09/15.

TY - CHAP

T1 - Mechanical property mapping of ALD thin films

AU - Puurunen, Riikka L.

AU - Ali, Saima

AU - Arstila, Kai

AU - Berdova, Maria

AU - Haimi, Eero

AU - Heikkinen, Hannele

AU - Julin, Jaakko

AU - Kilpi, Lauri

AU - Laitinen, Mikko

AU - Liu, Xuwen

AU - Lyytinen, Jussi

AU - Malm, Jari

AU - Pyymaki-Perros, Alexander

AU - Rontu, Ville

AU - Sintonen, Sakari

AU - Ylivaara, Oili

AU - Sajavaara, Timo

AU - Lipsanen, Harri

AU - Franssila, Sami

AU - Koskinen, Jari

AU - Ronkainen, Helena

AU - Hannula, Simo-Pekka

AU - Kiihamäki, Jyrki

N1 - Published abstract of a poster presentation Project 74717 MECHALD

PY - 2015

Y1 - 2015

M3 - Conference abstract in proceedings

BT - Technical Program & Abstracts

PB - American Vacuum Society (AVS)

T2 - 13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015

Y2 - 28 September 2015 through 29 September 2015

ER -