Membranes and tubules by nanoimprinting and atomic layer deposition

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Abstract

The residual layer inherent for nanoimprinting is usually taken to be a problem in the process. We exploit the residual layer in fabrication of the complex free-standing membranes by growing a layer of Al2O3 or Al2O3/TiO2 lamellae by ALD directly on top of the nanoimprinted polymer film, following by removal of the sacrificial polymer layer.
Original languageEnglish
Publication statusPublished - 2013
MoE publication typeNot Eligible
Event12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013 - Barcelona, Spain
Duration: 21 Oct 201323 Oct 2013
Conference number: 12

Conference

Conference12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013
Abbreviated titleNNT 2013
CountrySpain
CityBarcelona
Period21/10/1323/10/13

Fingerprint

atomic layer epitaxy
membranes
polymers
lamella
fabrication

Keywords

  • ALD
  • NIL
  • nanoimprinting
  • SSIL
  • step and stamp
  • step&repeat

Cite this

Haatainen, T., Kainlauri, M., Arpiainen, S., Markkanen, M., Marles, J., Puurunen, R., & Ahopelto, J. (2013). Membranes and tubules by nanoimprinting and atomic layer deposition. Abstract from 12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013, Barcelona, Spain.
Haatainen, Tomi ; Kainlauri, Markku ; Arpiainen, Sanna ; Markkanen, Merja ; Marles, Jaana ; Puurunen, Riikka ; Ahopelto, Jouni. / Membranes and tubules by nanoimprinting and atomic layer deposition. Abstract from 12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013, Barcelona, Spain.
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abstract = "The residual layer inherent for nanoimprinting is usually taken to be a problem in the process. We exploit the residual layer in fabrication of the complex free-standing membranes by growing a layer of Al2O3 or Al2O3/TiO2 lamellae by ALD directly on top of the nanoimprinted polymer film, following by removal of the sacrificial polymer layer.",
keywords = "ALD, NIL, nanoimprinting, SSIL, step and stamp, step&repeat",
author = "Tomi Haatainen and Markku Kainlauri and Sanna Arpiainen and Merja Markkanen and Jaana Marles and Riikka Puurunen and Jouni Ahopelto",
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note = "12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013, NNT 2013 ; Conference date: 21-10-2013 Through 23-10-2013",

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Haatainen, T, Kainlauri, M, Arpiainen, S, Markkanen, M, Marles, J, Puurunen, R & Ahopelto, J 2013, 'Membranes and tubules by nanoimprinting and atomic layer deposition' 12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013, Barcelona, Spain, 21/10/13 - 23/10/13, .

Membranes and tubules by nanoimprinting and atomic layer deposition. / Haatainen, Tomi; Kainlauri, Markku; Arpiainen, Sanna; Markkanen, Merja; Marles, Jaana; Puurunen, Riikka; Ahopelto, Jouni.

2013. Abstract from 12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013, Barcelona, Spain.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

TY - CONF

T1 - Membranes and tubules by nanoimprinting and atomic layer deposition

AU - Haatainen, Tomi

AU - Kainlauri, Markku

AU - Arpiainen, Sanna

AU - Markkanen, Merja

AU - Marles, Jaana

AU - Puurunen, Riikka

AU - Ahopelto, Jouni

PY - 2013

Y1 - 2013

N2 - The residual layer inherent for nanoimprinting is usually taken to be a problem in the process. We exploit the residual layer in fabrication of the complex free-standing membranes by growing a layer of Al2O3 or Al2O3/TiO2 lamellae by ALD directly on top of the nanoimprinted polymer film, following by removal of the sacrificial polymer layer.

AB - The residual layer inherent for nanoimprinting is usually taken to be a problem in the process. We exploit the residual layer in fabrication of the complex free-standing membranes by growing a layer of Al2O3 or Al2O3/TiO2 lamellae by ALD directly on top of the nanoimprinted polymer film, following by removal of the sacrificial polymer layer.

KW - ALD

KW - NIL

KW - nanoimprinting

KW - SSIL

KW - step and stamp

KW - step&repeat

M3 - Conference Abstract

ER -

Haatainen T, Kainlauri M, Arpiainen S, Markkanen M, Marles J, Puurunen R et al. Membranes and tubules by nanoimprinting and atomic layer deposition. 2013. Abstract from 12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013, Barcelona, Spain.