The residual layer inherent for nanoimprinting is usually taken to be a problem in the process. We exploit the residual layer in fabrication of the complex free-standing membranes by growing a layer of Al2O3 or Al2O3/TiO2 lamellae by ALD directly on top of the nanoimprinted polymer film, following by removal of the sacrificial polymer layer.
|Publication status||Published - 2013|
|MoE publication type||Not Eligible|
|Event||12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013 - Barcelona, Spain|
Duration: 21 Oct 2013 → 23 Oct 2013
Conference number: 12
|Conference||12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013|
|Abbreviated title||NNT 2013|
|Period||21/10/13 → 23/10/13|
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Haatainen, T., Kainlauri, M., Arpiainen, S., Markkanen, M., Marles, J., Puurunen, R., & Ahopelto, J. (2013). Membranes and tubules by nanoimprinting and atomic layer deposition. Abstract from 12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013, Barcelona, Spain.