Membranes and tubules by nanoimprinting and atomic layer deposition

Tomi Haatainen, Markku Kainlauri, Sanna Arpiainen, Merja Markkanen, Jaana Marles, Riikka Puurunen, Jouni Ahopelto

    Research output: Contribution to conferenceConference AbstractScientificpeer-review

    Abstract

    The residual layer inherent for nanoimprinting is usually taken to be a problem in the process. We exploit the residual layer in fabrication of the complex free-standing membranes by growing a layer of Al2O3 or Al2O3/TiO2 lamellae by ALD directly on top of the nanoimprinted polymer film, following by removal of the sacrificial polymer layer.
    Original languageEnglish
    Publication statusPublished - 2013
    MoE publication typeNot Eligible
    Event12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013 - Barcelona, Spain
    Duration: 21 Oct 201323 Oct 2013
    Conference number: 12

    Conference

    Conference12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013
    Abbreviated titleNNT 2013
    CountrySpain
    CityBarcelona
    Period21/10/1323/10/13

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    Keywords

    • ALD
    • NIL
    • nanoimprinting
    • SSIL
    • step and stamp
    • step&repeat

    Cite this

    Haatainen, T., Kainlauri, M., Arpiainen, S., Markkanen, M., Marles, J., Puurunen, R., & Ahopelto, J. (2013). Membranes and tubules by nanoimprinting and atomic layer deposition. Abstract from 12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013, Barcelona, Spain.