Membranes and tubules by nanoimprinting and atomic layer deposition

Tomi Haatainen; Markku Kainlauri; Sanna Arpiainen; Merja Markkanen; Jaana Marles; Riikka Puurunen; Jouni Ahopelto

Membranes and tubules by nanoimprinting and atomic layer deposition

Tomi Haatainen, Markku Kainlauri, Sanna Arpiainen, Merja Markkanen, Jaana Marles, Riikka Puurunen, Jouni Ahopelto

Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

Abstract

The residual layer inherent for nanoimprinting is usually taken to be a problem in the process. We exploit the residual layer in fabrication of the complex free-standing membranes by growing a layer of Al2O3 or Al2O3/TiO2 lamellae by ALD directly on top of the nanoimprinted polymer film, following by removal of the sacrificial polymer layer.

Original language	English
Publication status	Published - 2013
MoE publication type	Not Eligible
Event	12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013 - Barcelona, Spain Duration: 21 Oct 2013 → 23 Oct 2013 Conference number: 12

Conference

Conference	12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013
Abbreviated title	NNT 2013
Country/Territory	Spain
City	Barcelona
Period	21/10/13 → 23/10/13

Keywords

ALD
NIL
nanoimprinting
SSIL
step and stamp
step&repeat

Cite this

@conference{09edefbfb3984758a54d1b3518f274a4,

title = "Membranes and tubules by nanoimprinting and atomic layer deposition",

abstract = "The residual layer inherent for nanoimprinting is usually taken to be a problem in the process. We exploit the residual layer in fabrication of the complex free-standing membranes by growing a layer of Al2O3 or Al2O3/TiO2 lamellae by ALD directly on top of the nanoimprinted polymer film, following by removal of the sacrificial polymer layer.",

keywords = "ALD, NIL, nanoimprinting, SSIL, step and stamp, step&repeat",

author = "Tomi Haatainen and Markku Kainlauri and Sanna Arpiainen and Merja Markkanen and Jaana Marles and Riikka Puurunen and Jouni Ahopelto",

year = "2013",

language = "English",

note = "12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013, NNT 2013 ; Conference date: 21-10-2013 Through 23-10-2013",

}

TY - CONF

T1 - Membranes and tubules by nanoimprinting and atomic layer deposition

AU - Haatainen, Tomi

AU - Kainlauri, Markku

AU - Arpiainen, Sanna

AU - Markkanen, Merja

AU - Marles, Jaana

AU - Puurunen, Riikka

AU - Ahopelto, Jouni

N1 - Conference code: 12

PY - 2013

Y1 - 2013

N2 - The residual layer inherent for nanoimprinting is usually taken to be a problem in the process. We exploit the residual layer in fabrication of the complex free-standing membranes by growing a layer of Al2O3 or Al2O3/TiO2 lamellae by ALD directly on top of the nanoimprinted polymer film, following by removal of the sacrificial polymer layer.

AB - The residual layer inherent for nanoimprinting is usually taken to be a problem in the process. We exploit the residual layer in fabrication of the complex free-standing membranes by growing a layer of Al2O3 or Al2O3/TiO2 lamellae by ALD directly on top of the nanoimprinted polymer film, following by removal of the sacrificial polymer layer.

KW - ALD

KW - NIL

KW - nanoimprinting

KW - SSIL

KW - step and stamp

KW - step&repeat

M3 - Conference Abstract

T2 - 12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013

Y2 - 21 October 2013 through 23 October 2013

ER -

Membranes and tubules by nanoimprinting and atomic layer deposition

Abstract

Conference

Keywords

Fingerprint

Cite this