MEMS-4-MMIC: Advances in combined GaAs MEMS-MMIC technology

L. Baggen, W. Simon, R. Malmqvist, Tauno Vähä-Heikkilä, D. Smith

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)

Abstract

This article describes the progress made during the first project year of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS switch designs with established MMIC-technology. The ultimate goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches will then become standard building blocks for MMIC circuits such as transistors, resistors and capacitors. Besides the development and qualification of the MEMS-MMIC designs and processes, MEMS-MMIC components are designed for specific applications (phased arrays, switch beam networks, etc.) that will benefit from this type of building blocks. First prototypes of latter components have been realized and measured in the first year of the project, and are presented in this paper. (11 refs.)
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publication14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Institute of Electrical and Electronic Engineers
Number of pages4
ISBN (Print)978-1-4244-5049-7, 978-1-4244-5050-3
DOIs
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication
Event14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010 - Ottawa, ON, Canada
Duration: 5 Jul 20108 Jul 2010

Conference

Conference14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010
Abbreviated titleANTEM/AMEREM 2010
CountryCanada
CityOttawa, ON
Period5/07/108/07/10

Fingerprint

Monolithic microwave integrated circuits
MEMS
Switches
Foundries
Merging
Resistors
Transistors
Capacitors
Networks (circuits)

Cite this

Baggen, L., Simon, W., Malmqvist, R., Vähä-Heikkilä, T., & Smith, D. (2010). MEMS-4-MMIC: Advances in combined GaAs MEMS-MMIC technology. In Proceedings: 14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010 [5552490] Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/ANTEM.2010.5552490
Baggen, L. ; Simon, W. ; Malmqvist, R. ; Vähä-Heikkilä, Tauno ; Smith, D. / MEMS-4-MMIC : Advances in combined GaAs MEMS-MMIC technology. Proceedings: 14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010. Piscataway, NJ, USA : IEEE Institute of Electrical and Electronic Engineers , 2010.
@inproceedings{92c400453a524b9997f879ee01d8f2c0,
title = "MEMS-4-MMIC: Advances in combined GaAs MEMS-MMIC technology",
abstract = "This article describes the progress made during the first project year of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS switch designs with established MMIC-technology. The ultimate goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches will then become standard building blocks for MMIC circuits such as transistors, resistors and capacitors. Besides the development and qualification of the MEMS-MMIC designs and processes, MEMS-MMIC components are designed for specific applications (phased arrays, switch beam networks, etc.) that will benefit from this type of building blocks. First prototypes of latter components have been realized and measured in the first year of the project, and are presented in this paper. (11 refs.)",
author = "L. Baggen and W. Simon and R. Malmqvist and Tauno V{\"a}h{\"a}-Heikkil{\"a} and D. Smith",
year = "2010",
doi = "10.1109/ANTEM.2010.5552490",
language = "English",
isbn = "978-1-4244-5049-7",
booktitle = "Proceedings",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
address = "United States",

}

Baggen, L, Simon, W, Malmqvist, R, Vähä-Heikkilä, T & Smith, D 2010, MEMS-4-MMIC: Advances in combined GaAs MEMS-MMIC technology. in Proceedings: 14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010., 5552490, IEEE Institute of Electrical and Electronic Engineers , Piscataway, NJ, USA, 14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010, Ottawa, ON, Canada, 5/07/10. https://doi.org/10.1109/ANTEM.2010.5552490

MEMS-4-MMIC : Advances in combined GaAs MEMS-MMIC technology. / Baggen, L.; Simon, W.; Malmqvist, R.; Vähä-Heikkilä, Tauno; Smith, D.

Proceedings: 14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010. Piscataway, NJ, USA : IEEE Institute of Electrical and Electronic Engineers , 2010. 5552490.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - MEMS-4-MMIC

T2 - Advances in combined GaAs MEMS-MMIC technology

AU - Baggen, L.

AU - Simon, W.

AU - Malmqvist, R.

AU - Vähä-Heikkilä, Tauno

AU - Smith, D.

PY - 2010

Y1 - 2010

N2 - This article describes the progress made during the first project year of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS switch designs with established MMIC-technology. The ultimate goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches will then become standard building blocks for MMIC circuits such as transistors, resistors and capacitors. Besides the development and qualification of the MEMS-MMIC designs and processes, MEMS-MMIC components are designed for specific applications (phased arrays, switch beam networks, etc.) that will benefit from this type of building blocks. First prototypes of latter components have been realized and measured in the first year of the project, and are presented in this paper. (11 refs.)

AB - This article describes the progress made during the first project year of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS switch designs with established MMIC-technology. The ultimate goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches will then become standard building blocks for MMIC circuits such as transistors, resistors and capacitors. Besides the development and qualification of the MEMS-MMIC designs and processes, MEMS-MMIC components are designed for specific applications (phased arrays, switch beam networks, etc.) that will benefit from this type of building blocks. First prototypes of latter components have been realized and measured in the first year of the project, and are presented in this paper. (11 refs.)

U2 - 10.1109/ANTEM.2010.5552490

DO - 10.1109/ANTEM.2010.5552490

M3 - Conference article in proceedings

SN - 978-1-4244-5049-7

SN - 978-1-4244-5050-3

BT - Proceedings

PB - IEEE Institute of Electrical and Electronic Engineers

CY - Piscataway, NJ, USA

ER -

Baggen L, Simon W, Malmqvist R, Vähä-Heikkilä T, Smith D. MEMS-4-MMIC: Advances in combined GaAs MEMS-MMIC technology. In Proceedings: 14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers . 2010. 5552490 https://doi.org/10.1109/ANTEM.2010.5552490