MEMS-4-MMIC: Advances in combined GaAs MEMS-MMIC technology

L. Baggen; W. Simon; R. Malmqvist; Tauno Vähä-Heikkilä; D. Smith

doi:10.1109/ANTEM.2010.5552490

MEMS-4-MMIC: Advances in combined GaAs MEMS-MMIC technology

L. Baggen, W. Simon, R. Malmqvist, Tauno Vähä-Heikkilä, D. Smith

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

1 Citation (Scopus)

Abstract

This article describes the progress made during the first project year of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS switch designs with established MMIC-technology. The ultimate goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches will then become standard building blocks for MMIC circuits such as transistors, resistors and capacitors. Besides the development and qualification of the MEMS-MMIC designs and processes, MEMS-MMIC components are designed for specific applications (phased arrays, switch beam networks, etc.) that will benefit from this type of building blocks. First prototypes of latter components have been realized and measured in the first year of the project, and are presented in this paper. (11 refs.)

Original language	English
Title of host publication	Proceedings
Subtitle of host publication	14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE Institute of Electrical and Electronic Engineers
Number of pages	4
ISBN (Print)	978-1-4244-5049-7, 978-1-4244-5050-3
DOIs	https://doi.org/10.1109/ANTEM.2010.5552490
Publication status	Published - 2010
MoE publication type	A4 Article in a conference publication
Event	14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010 - Ottawa, ON, Canada Duration: 5 Jul 2010 → 8 Jul 2010

Conference

Conference	14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010
Abbreviated title	ANTEM/AMEREM 2010
Country/Territory	Canada
City	Ottawa, ON
Period	5/07/10 → 8/07/10

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10.1109/ANTEM.2010.5552490

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Baggen, L., Simon, W., Malmqvist, R., Vähä-Heikkilä, T., & Smith, D. (2010). MEMS-4-MMIC: Advances in combined GaAs MEMS-MMIC technology. In Proceedings: 14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010 [5552490] IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/ANTEM.2010.5552490

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title = "MEMS-4-MMIC: Advances in combined GaAs MEMS-MMIC technology",

abstract = "This article describes the progress made during the first project year of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS switch designs with established MMIC-technology. The ultimate goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches will then become standard building blocks for MMIC circuits such as transistors, resistors and capacitors. Besides the development and qualification of the MEMS-MMIC designs and processes, MEMS-MMIC components are designed for specific applications (phased arrays, switch beam networks, etc.) that will benefit from this type of building blocks. First prototypes of latter components have been realized and measured in the first year of the project, and are presented in this paper. (11 refs.)",

author = "L. Baggen and W. Simon and R. Malmqvist and Tauno V{\"a}h{\"a}-Heikkil{\"a} and D. Smith",

year = "2010",

doi = "10.1109/ANTEM.2010.5552490",

language = "English",

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Baggen, L, Simon, W, Malmqvist, R, Vähä-Heikkilä, T & Smith, D 2010, MEMS-4-MMIC: Advances in combined GaAs MEMS-MMIC technology. in Proceedings: 14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010., 5552490, IEEE Institute of Electrical and Electronic Engineers, Piscataway, NJ, USA, 14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010, Ottawa, ON, Canada, 5/07/10. https://doi.org/10.1109/ANTEM.2010.5552490

MEMS-4-MMIC: Advances in combined GaAs MEMS-MMIC technology. / Baggen, L.; Simon, W.; Malmqvist, R. et al.
Proceedings: 14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers, 2010. 5552490.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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N2 - This article describes the progress made during the first project year of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS switch designs with established MMIC-technology. The ultimate goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches will then become standard building blocks for MMIC circuits such as transistors, resistors and capacitors. Besides the development and qualification of the MEMS-MMIC designs and processes, MEMS-MMIC components are designed for specific applications (phased arrays, switch beam networks, etc.) that will benefit from this type of building blocks. First prototypes of latter components have been realized and measured in the first year of the project, and are presented in this paper. (11 refs.)

AB - This article describes the progress made during the first project year of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS switch designs with established MMIC-technology. The ultimate goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches will then become standard building blocks for MMIC circuits such as transistors, resistors and capacitors. Besides the development and qualification of the MEMS-MMIC designs and processes, MEMS-MMIC components are designed for specific applications (phased arrays, switch beam networks, etc.) that will benefit from this type of building blocks. First prototypes of latter components have been realized and measured in the first year of the project, and are presented in this paper. (11 refs.)

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Baggen L, Simon W, Malmqvist R, Vähä-Heikkilä T, Smith D. MEMS-4-MMIC: Advances in combined GaAs MEMS-MMIC technology. In Proceedings: 14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers. 2010. 5552490 doi: 10.1109/ANTEM.2010.5552490

MEMS-4-MMIC: Advances in combined GaAs MEMS-MMIC technology

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