MEMS-4-MMIC: Advances in combined GaAs MEMS-MMIC technology

L. Baggen, W. Simon, R. Malmqvist, Tauno Vähä-Heikkilä, D. Smith

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)

    Abstract

    This article describes the progress made during the first project year of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS switch designs with established MMIC-technology. The ultimate goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches will then become standard building blocks for MMIC circuits such as transistors, resistors and capacitors. Besides the development and qualification of the MEMS-MMIC designs and processes, MEMS-MMIC components are designed for specific applications (phased arrays, switch beam networks, etc.) that will benefit from this type of building blocks. First prototypes of latter components have been realized and measured in the first year of the project, and are presented in this paper. (11 refs.)
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publication14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010
    Place of PublicationPiscataway, NJ, USA
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Number of pages4
    ISBN (Print)978-1-4244-5049-7, 978-1-4244-5050-3
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication
    Event14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010 - Ottawa, ON, Canada
    Duration: 5 Jul 20108 Jul 2010

    Conference

    Conference14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010
    Abbreviated titleANTEM/AMEREM 2010
    CountryCanada
    CityOttawa, ON
    Period5/07/108/07/10

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