MEMS-4-MMIC: The next step in combined GaAs MEMS-MMIC technology

L. Baggen, W. Simon, R. Malmqvist, Tauno Vähä-Heikkilä, H. Maher, S. Seok

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    this article summarizes the overall progress made during the last 4 project years of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS (Micro-Electrical-Mechanical-Systems) switch designs with established MMIC-technology. The final goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches can become standard building blocks for MMIC circuits such as transistors, resistors and capacitors and can be used for specific RF-applications such as phased arrays, reconfigurable arrays with switch beam networks, or cognitive systems, for example. The complete value chain for manufacturing is addressed within the project with reliability and 0-level packaging as key issues for manufacturing
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publication15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Electronic)978-1-4673-0292-0
    ISBN (Print)978-1-4673-0291-3, 978-1-4673-0290-6
    DOIs
    Publication statusPublished - 2012
    MoE publication typeNot Eligible
    Event15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012 - Toulouse, France
    Duration: 25 Jun 201228 Jun 2012

    Conference

    Conference15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012
    Abbreviated titleANTEM 2012
    Country/TerritoryFrance
    CityToulouse
    Period25/06/1228/06/12

    Keywords

    • Agile systems
    • foundry
    • GaAs
    • LNA
    • MMIC
    • packaging
    • phased array
    • radar
    • reliability
    • SPDT
    • SPST

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