MEMS-4-MMIC: The next step in combined GaAs MEMS-MMIC technology

L. Baggen, W. Simon, R. Malmqvist, Tauno Vähä-Heikkilä, H. Maher, S. Seok

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

this article summarizes the overall progress made during the last 4 project years of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS (Micro-Electrical-Mechanical-Systems) switch designs with established MMIC-technology. The final goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches can become standard building blocks for MMIC circuits such as transistors, resistors and capacitors and can be used for specific RF-applications such as phased arrays, reconfigurable arrays with switch beam networks, or cognitive systems, for example. The complete value chain for manufacturing is addressed within the project with reliability and 0-level packaging as key issues for manufacturing
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publication15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012
PublisherIEEE Institute of Electrical and Electronic Engineers
ISBN (Electronic)978-1-4673-0292-0
ISBN (Print)978-1-4673-0291-3, 978-1-4673-0290-6
DOIs
Publication statusPublished - 2012
MoE publication typeNot Eligible
Event15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012 - Toulouse, France
Duration: 25 Jun 201228 Jun 2012

Conference

Conference15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012
Abbreviated titleANTEM 2012
CountryFrance
CityToulouse
Period25/06/1228/06/12

Fingerprint

Monolithic microwave integrated circuits
MEMS
Switches
Cognitive systems
Foundries
Merging
Resistors
Packaging
Transistors
Capacitors
Networks (circuits)

Keywords

  • Agile systems
  • foundry
  • GaAs
  • LNA
  • MMIC
  • packaging
  • phased array
  • radar
  • reliability
  • SPDT
  • SPST

Cite this

Baggen, L., Simon, W., Malmqvist, R., Vähä-Heikkilä, T., Maher, H., & Seok, S. (2012). MEMS-4-MMIC: The next step in combined GaAs MEMS-MMIC technology. In Proceedings: 15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012 [6262342] IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/ANTEM.2012.6262342
Baggen, L. ; Simon, W. ; Malmqvist, R. ; Vähä-Heikkilä, Tauno ; Maher, H. ; Seok, S. / MEMS-4-MMIC : The next step in combined GaAs MEMS-MMIC technology. Proceedings: 15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012. IEEE Institute of Electrical and Electronic Engineers , 2012.
@inproceedings{2a562138e0a149019d7c1c06afea88a2,
title = "MEMS-4-MMIC: The next step in combined GaAs MEMS-MMIC technology",
abstract = "this article summarizes the overall progress made during the last 4 project years of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS (Micro-Electrical-Mechanical-Systems) switch designs with established MMIC-technology. The final goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches can become standard building blocks for MMIC circuits such as transistors, resistors and capacitors and can be used for specific RF-applications such as phased arrays, reconfigurable arrays with switch beam networks, or cognitive systems, for example. The complete value chain for manufacturing is addressed within the project with reliability and 0-level packaging as key issues for manufacturing",
keywords = "Agile systems, foundry, GaAs, LNA, MMIC, packaging, phased array, radar, reliability, SPDT, SPST",
author = "L. Baggen and W. Simon and R. Malmqvist and Tauno V{\"a}h{\"a}-Heikkil{\"a} and H. Maher and S. Seok",
year = "2012",
doi = "10.1109/ANTEM.2012.6262342",
language = "English",
isbn = "978-1-4673-0291-3",
booktitle = "Proceedings",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
address = "United States",

}

Baggen, L, Simon, W, Malmqvist, R, Vähä-Heikkilä, T, Maher, H & Seok, S 2012, MEMS-4-MMIC: The next step in combined GaAs MEMS-MMIC technology. in Proceedings: 15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012., 6262342, IEEE Institute of Electrical and Electronic Engineers , 15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012, Toulouse, France, 25/06/12. https://doi.org/10.1109/ANTEM.2012.6262342

MEMS-4-MMIC : The next step in combined GaAs MEMS-MMIC technology. / Baggen, L.; Simon, W.; Malmqvist, R.; Vähä-Heikkilä, Tauno; Maher, H.; Seok, S.

Proceedings: 15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012. IEEE Institute of Electrical and Electronic Engineers , 2012. 6262342.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - MEMS-4-MMIC

T2 - The next step in combined GaAs MEMS-MMIC technology

AU - Baggen, L.

AU - Simon, W.

AU - Malmqvist, R.

AU - Vähä-Heikkilä, Tauno

AU - Maher, H.

AU - Seok, S.

PY - 2012

Y1 - 2012

N2 - this article summarizes the overall progress made during the last 4 project years of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS (Micro-Electrical-Mechanical-Systems) switch designs with established MMIC-technology. The final goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches can become standard building blocks for MMIC circuits such as transistors, resistors and capacitors and can be used for specific RF-applications such as phased arrays, reconfigurable arrays with switch beam networks, or cognitive systems, for example. The complete value chain for manufacturing is addressed within the project with reliability and 0-level packaging as key issues for manufacturing

AB - this article summarizes the overall progress made during the last 4 project years of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS (Micro-Electrical-Mechanical-Systems) switch designs with established MMIC-technology. The final goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches can become standard building blocks for MMIC circuits such as transistors, resistors and capacitors and can be used for specific RF-applications such as phased arrays, reconfigurable arrays with switch beam networks, or cognitive systems, for example. The complete value chain for manufacturing is addressed within the project with reliability and 0-level packaging as key issues for manufacturing

KW - Agile systems

KW - foundry

KW - GaAs

KW - LNA

KW - MMIC

KW - packaging

KW - phased array

KW - radar

KW - reliability

KW - SPDT

KW - SPST

U2 - 10.1109/ANTEM.2012.6262342

DO - 10.1109/ANTEM.2012.6262342

M3 - Conference article in proceedings

SN - 978-1-4673-0291-3

SN - 978-1-4673-0290-6

BT - Proceedings

PB - IEEE Institute of Electrical and Electronic Engineers

ER -

Baggen L, Simon W, Malmqvist R, Vähä-Heikkilä T, Maher H, Seok S. MEMS-4-MMIC: The next step in combined GaAs MEMS-MMIC technology. In Proceedings: 15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012. IEEE Institute of Electrical and Electronic Engineers . 2012. 6262342 https://doi.org/10.1109/ANTEM.2012.6262342