MEMS-4-MMIC: The next step in combined GaAs MEMS-MMIC technology

L. Baggen, W. Simon, R. Malmqvist, Tauno Vähä-Heikkilä, H. Maher, S. Seok

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

this article summarizes the overall progress made during the last 4 project years of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS (Micro-Electrical-Mechanical-Systems) switch designs with established MMIC-technology. The final goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches can become standard building blocks for MMIC circuits such as transistors, resistors and capacitors and can be used for specific RF-applications such as phased arrays, reconfigurable arrays with switch beam networks, or cognitive systems, for example. The complete value chain for manufacturing is addressed within the project with reliability and 0-level packaging as key issues for manufacturing
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publication15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012
PublisherIEEE Institute of Electrical and Electronic Engineers
ISBN (Electronic)978-1-4673-0292-0
ISBN (Print)978-1-4673-0291-3, 978-1-4673-0290-6
DOIs
Publication statusPublished - 2012
MoE publication typeNot Eligible
Event15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012 - Toulouse, France
Duration: 25 Jun 201228 Jun 2012

Conference

Conference15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012
Abbreviated titleANTEM 2012
CountryFrance
CityToulouse
Period25/06/1228/06/12

Keywords

  • Agile systems
  • foundry
  • GaAs
  • LNA
  • MMIC
  • packaging
  • phased array
  • radar
  • reliability
  • SPDT
  • SPST

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