Abstract
this article summarizes the overall progress made during
the last 4 project years of the FP7 EU-project
MEMS-4-MMIC that focuses on the merging of innovative
RF-MEMS (Micro-Electrical-Mechanical-Systems) switch
designs with established MMIC-technology. The final goal
is to include RF-MEMS switches into a standard commercial
foundry process. Such switches can become standard
building blocks for MMIC circuits such as transistors,
resistors and capacitors and can be used for specific
RF-applications such as phased arrays, reconfigurable
arrays with switch beam networks, or cognitive systems,
for example. The complete value chain for manufacturing
is addressed within the project with reliability and
0-level packaging as key issues for manufacturing
Original language | English |
---|---|
Title of host publication | Proceedings |
Subtitle of host publication | 15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012 |
Publisher | IEEE Institute of Electrical and Electronic Engineers |
ISBN (Electronic) | 978-1-4673-0292-0 |
ISBN (Print) | 978-1-4673-0291-3, 978-1-4673-0290-6 |
DOIs | |
Publication status | Published - 2012 |
MoE publication type | Not Eligible |
Event | 15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012 - Toulouse, France Duration: 25 Jun 2012 → 28 Jun 2012 |
Conference
Conference | 15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012 |
---|---|
Abbreviated title | ANTEM 2012 |
Country/Territory | France |
City | Toulouse |
Period | 25/06/12 → 28/06/12 |
Keywords
- Agile systems
- foundry
- GaAs
- LNA
- MMIC
- packaging
- phased array
- radar
- reliability
- SPDT
- SPST