MEMS-4-MMIC: The next step in combined GaAs MEMS-MMIC technology

L. Baggen; W. Simon; R. Malmqvist; Tauno Vähä-Heikkilä; H. Maher; S. Seok

doi:10.1109/ANTEM.2012.6262342

MEMS-4-MMIC: The next step in combined GaAs MEMS-MMIC technology

L. Baggen
, W. Simon
, R. Malmqvist
, Tauno Vähä-Heikkilä
, H. Maher
, S. Seok

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

this article summarizes the overall progress made during the last 4 project years of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS (Micro-Electrical-Mechanical-Systems) switch designs with established MMIC-technology. The final goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches can become standard building blocks for MMIC circuits such as transistors, resistors and capacitors and can be used for specific RF-applications such as phased arrays, reconfigurable arrays with switch beam networks, or cognitive systems, for example. The complete value chain for manufacturing is addressed within the project with reliability and 0-level packaging as key issues for manufacturing

Original language	English
Title of host publication	Proceedings
Subtitle of host publication	15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012
Publisher	IEEE Institute of Electrical and Electronic Engineers
ISBN (Electronic)	978-1-4673-0292-0
ISBN (Print)	978-1-4673-0291-3, 978-1-4673-0290-6
DOIs	https://doi.org/10.1109/ANTEM.2012.6262342
Publication status	Published - 2012
MoE publication type	Not Eligible
Event	15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012 - Toulouse, France Duration: 25 Jun 2012 → 28 Jun 2012

Conference

Conference	15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012
Abbreviated title	ANTEM 2012
Country/Territory	France
City	Toulouse
Period	25/06/12 → 28/06/12

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Agile systems
foundry
GaAs
LNA
MMIC
packaging
phased array
radar
reliability
SPDT
SPST

Access to Document

10.1109/ANTEM.2012.6262342

Cite this

Baggen, L., Simon, W., Malmqvist, R., Vähä-Heikkilä, T., Maher, H., & Seok, S. (2012). MEMS-4-MMIC: The next step in combined GaAs MEMS-MMIC technology. In Proceedings: 15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012 Article 6262342 IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/ANTEM.2012.6262342

@inproceedings{2a562138e0a149019d7c1c06afea88a2,

title = "MEMS-4-MMIC: The next step in combined GaAs MEMS-MMIC technology",

abstract = "this article summarizes the overall progress made during the last 4 project years of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS (Micro-Electrical-Mechanical-Systems) switch designs with established MMIC-technology. The final goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches can become standard building blocks for MMIC circuits such as transistors, resistors and capacitors and can be used for specific RF-applications such as phased arrays, reconfigurable arrays with switch beam networks, or cognitive systems, for example. The complete value chain for manufacturing is addressed within the project with reliability and 0-level packaging as key issues for manufacturing",

keywords = "Agile systems, foundry, GaAs, LNA, MMIC, packaging, phased array, radar, reliability, SPDT, SPST",

author = "L. Baggen and W. Simon and R. Malmqvist and Tauno V{\"a}h{\"a}-Heikkil{\"a} and H. Maher and S. Seok",

year = "2012",

doi = "10.1109/ANTEM.2012.6262342",

language = "English",

isbn = "978-1-4673-0291-3",

booktitle = "Proceedings",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012, ANTEM 2012 ; Conference date: 25-06-2012 Through 28-06-2012",

}

Baggen, L, Simon, W, Malmqvist, R, Vähä-Heikkilä, T, Maher, H & Seok, S 2012, MEMS-4-MMIC: The next step in combined GaAs MEMS-MMIC technology. in Proceedings: 15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012., 6262342, IEEE Institute of Electrical and Electronic Engineers, 15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012, Toulouse, France, 25/06/12. https://doi.org/10.1109/ANTEM.2012.6262342

MEMS-4-MMIC: The next step in combined GaAs MEMS-MMIC technology. / Baggen, L.; Simon, W.; Malmqvist, R. et al.
Proceedings: 15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012. IEEE Institute of Electrical and Electronic Engineers, 2012. 6262342.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - MEMS-4-MMIC

T2 - 15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012

AU - Baggen, L.

AU - Simon, W.

AU - Malmqvist, R.

AU - Vähä-Heikkilä, Tauno

AU - Maher, H.

AU - Seok, S.

PY - 2012

Y1 - 2012

N2 - this article summarizes the overall progress made during the last 4 project years of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS (Micro-Electrical-Mechanical-Systems) switch designs with established MMIC-technology. The final goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches can become standard building blocks for MMIC circuits such as transistors, resistors and capacitors and can be used for specific RF-applications such as phased arrays, reconfigurable arrays with switch beam networks, or cognitive systems, for example. The complete value chain for manufacturing is addressed within the project with reliability and 0-level packaging as key issues for manufacturing

AB - this article summarizes the overall progress made during the last 4 project years of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS (Micro-Electrical-Mechanical-Systems) switch designs with established MMIC-technology. The final goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches can become standard building blocks for MMIC circuits such as transistors, resistors and capacitors and can be used for specific RF-applications such as phased arrays, reconfigurable arrays with switch beam networks, or cognitive systems, for example. The complete value chain for manufacturing is addressed within the project with reliability and 0-level packaging as key issues for manufacturing

KW - Agile systems

KW - foundry

KW - GaAs

KW - LNA

KW - MMIC

KW - packaging

KW - phased array

KW - radar

KW - reliability

KW - SPDT

KW - SPST

U2 - 10.1109/ANTEM.2012.6262342

DO - 10.1109/ANTEM.2012.6262342

M3 - Conference article in proceedings

SN - 978-1-4673-0291-3

SN - 978-1-4673-0290-6

BT - Proceedings

PB - IEEE Institute of Electrical and Electronic Engineers

Y2 - 25 June 2012 through 28 June 2012

ER -

MEMS-4-MMIC: The next step in combined GaAs MEMS-MMIC technology

Abstract

Conference

UN SDGs

Keywords

Access to Document

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Cite this