MEMS and emerging nanopatterning methods

    Research output: Contribution to conferenceConference articleScientific

    Original languageEnglish
    Publication statusPublished - 2008
    MoE publication typeNot Eligible
    Event14th International Micromachine/Nanotech Symposium - Tokyo, Japan
    Duration: 29 Jul 2009 → …

    Conference

    Conference14th International Micromachine/Nanotech Symposium
    CountryJapan
    CityTokyo
    Period29/07/09 → …

    Cite this

    Ahopelto, J. (2008). MEMS and emerging nanopatterning methods. Paper presented at 14th International Micromachine/Nanotech Symposium, Tokyo, Japan.