MEMS and emerging nanopatterning methods

Research output: Contribution to conferenceConference articleScientific

Original languageEnglish
Publication statusPublished - 2008
MoE publication typeNot Eligible
Event14th International Micromachine/Nanotech Symposium - Tokyo, Japan
Duration: 29 Jul 2009 → …

Conference

Conference14th International Micromachine/Nanotech Symposium
CountryJapan
CityTokyo
Period29/07/09 → …

Cite this

Ahopelto, J. (2008). MEMS and emerging nanopatterning methods. Paper presented at 14th International Micromachine/Nanotech Symposium, Tokyo, Japan.
Ahopelto, Jouni. / MEMS and emerging nanopatterning methods. Paper presented at 14th International Micromachine/Nanotech Symposium, Tokyo, Japan.
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title = "MEMS and emerging nanopatterning methods",
author = "Jouni Ahopelto",
year = "2008",
language = "English",
note = "14th International Micromachine/Nanotech Symposium ; Conference date: 29-07-2009",

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Ahopelto, J 2008, 'MEMS and emerging nanopatterning methods' Paper presented at 14th International Micromachine/Nanotech Symposium, Tokyo, Japan, 29/07/09, .

MEMS and emerging nanopatterning methods. / Ahopelto, Jouni.

2008. Paper presented at 14th International Micromachine/Nanotech Symposium, Tokyo, Japan.

Research output: Contribution to conferenceConference articleScientific

TY - CONF

T1 - MEMS and emerging nanopatterning methods

AU - Ahopelto, Jouni

PY - 2008

Y1 - 2008

M3 - Conference article

ER -

Ahopelto J. MEMS and emerging nanopatterning methods. 2008. Paper presented at 14th International Micromachine/Nanotech Symposium, Tokyo, Japan.