MEMS and emerging nanopatterning methods

    Research output: Contribution to conferenceConference articleScientific

    Original languageEnglish
    Publication statusPublished - 2008
    MoE publication typeNot Eligible
    Event14th International Micromachine/Nanotech Symposium - Tokyo, Japan
    Duration: 29 Jul 2009 → …

    Conference

    Conference14th International Micromachine/Nanotech Symposium
    Country/TerritoryJapan
    CityTokyo
    Period29/07/09 → …

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