MEMS and emerging nanopatterning methods

    Research output: Contribution to conferenceConference articleScientific

    Original languageEnglish
    Publication statusPublished - 2008
    MoE publication typeNot Eligible
    Event14th International Micromachine/Nanotech Symposium - Tokyo, Japan
    Duration: 29 Jul 2009 → …

    Conference

    Conference14th International Micromachine/Nanotech Symposium
    CountryJapan
    CityTokyo
    Period29/07/09 → …

    Cite this

    Ahopelto, J. (2008). MEMS and emerging nanopatterning methods. Paper presented at 14th International Micromachine/Nanotech Symposium, Tokyo, Japan.
    Ahopelto, Jouni. / MEMS and emerging nanopatterning methods. Paper presented at 14th International Micromachine/Nanotech Symposium, Tokyo, Japan.
    @conference{9b32ff7da2454fd89e4d98ee2d3954f2,
    title = "MEMS and emerging nanopatterning methods",
    author = "Jouni Ahopelto",
    year = "2008",
    language = "English",
    note = "14th International Micromachine/Nanotech Symposium ; Conference date: 29-07-2009",

    }

    Ahopelto, J 2008, 'MEMS and emerging nanopatterning methods', Paper presented at 14th International Micromachine/Nanotech Symposium, Tokyo, Japan, 29/07/09.

    MEMS and emerging nanopatterning methods. / Ahopelto, Jouni.

    2008. Paper presented at 14th International Micromachine/Nanotech Symposium, Tokyo, Japan.

    Research output: Contribution to conferenceConference articleScientific

    TY - CONF

    T1 - MEMS and emerging nanopatterning methods

    AU - Ahopelto, Jouni

    PY - 2008

    Y1 - 2008

    M3 - Conference article

    ER -

    Ahopelto J. MEMS and emerging nanopatterning methods. 2008. Paper presented at 14th International Micromachine/Nanotech Symposium, Tokyo, Japan.