MEMS- and MOEMS-Based Near-Infrared Spectrometers

Jarkko Antila, Mikko Tuohiniemi, Anna Rissanen, Uula Kantojärvi, Markku Lahti, Kai Viherkanto, Marko Kaarre, Jouko Malinen

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Abstract

The trend in near-infrared (NIR) spectroscopy is to go toward on-site, in-field, on-the-go applications with calibration-free instruments and off-the-shelf chemometrics software. Micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) represent manufacturing techniques and components, capable of enabling highly miniaturized, robust, and low-cost sensors and actuators. This article presents common MEMS and MOEMS manufacturing techniques and gives an insight into the demands of NIR spectroscopic applications. The main instrument categories are covered by a short theory followed by examples. Most thoroughly handled topics are Fourier transform spectrometers (FTSs), Fabry-Perot interferometers (FPIs), and dispersive spectrometers. Two other categories are also separately presented, namely light modulator systems and tunable MEMS light sources. We give an overview on NIR spectroscopy and its special requirements regarding the realization of MEMS spectrometers
Original languageEnglish
Title of host publicationEncyclopedia of Analytical Chemistry
PublisherWiley
Pages1-36
ISBN (Electronic)978-047002731-8
ISBN (Print)978-047197670-7
DOIs
Publication statusPublished - 2014
MoE publication typeD2 Article in professional manuals or guides or professional information systems or text book material

Fingerprint

Infrared spectrometers
Spectrometers
Near infrared spectroscopy
Fabry-Perot interferometers
Light modulators
Light sources
Fourier transforms
Actuators
Calibration
Infrared radiation
Sensors
Costs

Cite this

Antila, J., Tuohiniemi, M., Rissanen, A., Kantojärvi, U., Lahti, M., Viherkanto, K., ... Malinen, J. (2014). MEMS- and MOEMS-Based Near-Infrared Spectrometers. In Encyclopedia of Analytical Chemistry (pp. 1-36). Wiley. https://doi.org/10.1002/9780470027318.a9376
Antila, Jarkko ; Tuohiniemi, Mikko ; Rissanen, Anna ; Kantojärvi, Uula ; Lahti, Markku ; Viherkanto, Kai ; Kaarre, Marko ; Malinen, Jouko. / MEMS- and MOEMS-Based Near-Infrared Spectrometers. Encyclopedia of Analytical Chemistry. Wiley, 2014. pp. 1-36
@inbook{71eaece8efba45a69360c5302e8b3001,
title = "MEMS- and MOEMS-Based Near-Infrared Spectrometers",
abstract = "The trend in near-infrared (NIR) spectroscopy is to go toward on-site, in-field, on-the-go applications with calibration-free instruments and off-the-shelf chemometrics software. Micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) represent manufacturing techniques and components, capable of enabling highly miniaturized, robust, and low-cost sensors and actuators. This article presents common MEMS and MOEMS manufacturing techniques and gives an insight into the demands of NIR spectroscopic applications. The main instrument categories are covered by a short theory followed by examples. Most thoroughly handled topics are Fourier transform spectrometers (FTSs), Fabry-Perot interferometers (FPIs), and dispersive spectrometers. Two other categories are also separately presented, namely light modulator systems and tunable MEMS light sources. We give an overview on NIR spectroscopy and its special requirements regarding the realization of MEMS spectrometers",
author = "Jarkko Antila and Mikko Tuohiniemi and Anna Rissanen and Uula Kantoj{\"a}rvi and Markku Lahti and Kai Viherkanto and Marko Kaarre and Jouko Malinen",
year = "2014",
doi = "10.1002/9780470027318.a9376",
language = "English",
isbn = "978-047197670-7",
pages = "1--36",
booktitle = "Encyclopedia of Analytical Chemistry",
publisher = "Wiley",
address = "United States",

}

Antila, J, Tuohiniemi, M, Rissanen, A, Kantojärvi, U, Lahti, M, Viherkanto, K, Kaarre, M & Malinen, J 2014, MEMS- and MOEMS-Based Near-Infrared Spectrometers. in Encyclopedia of Analytical Chemistry. Wiley, pp. 1-36. https://doi.org/10.1002/9780470027318.a9376

MEMS- and MOEMS-Based Near-Infrared Spectrometers. / Antila, Jarkko; Tuohiniemi, Mikko; Rissanen, Anna; Kantojärvi, Uula; Lahti, Markku; Viherkanto, Kai; Kaarre, Marko; Malinen, Jouko.

Encyclopedia of Analytical Chemistry. Wiley, 2014. p. 1-36.

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

TY - CHAP

T1 - MEMS- and MOEMS-Based Near-Infrared Spectrometers

AU - Antila, Jarkko

AU - Tuohiniemi, Mikko

AU - Rissanen, Anna

AU - Kantojärvi, Uula

AU - Lahti, Markku

AU - Viherkanto, Kai

AU - Kaarre, Marko

AU - Malinen, Jouko

PY - 2014

Y1 - 2014

N2 - The trend in near-infrared (NIR) spectroscopy is to go toward on-site, in-field, on-the-go applications with calibration-free instruments and off-the-shelf chemometrics software. Micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) represent manufacturing techniques and components, capable of enabling highly miniaturized, robust, and low-cost sensors and actuators. This article presents common MEMS and MOEMS manufacturing techniques and gives an insight into the demands of NIR spectroscopic applications. The main instrument categories are covered by a short theory followed by examples. Most thoroughly handled topics are Fourier transform spectrometers (FTSs), Fabry-Perot interferometers (FPIs), and dispersive spectrometers. Two other categories are also separately presented, namely light modulator systems and tunable MEMS light sources. We give an overview on NIR spectroscopy and its special requirements regarding the realization of MEMS spectrometers

AB - The trend in near-infrared (NIR) spectroscopy is to go toward on-site, in-field, on-the-go applications with calibration-free instruments and off-the-shelf chemometrics software. Micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) represent manufacturing techniques and components, capable of enabling highly miniaturized, robust, and low-cost sensors and actuators. This article presents common MEMS and MOEMS manufacturing techniques and gives an insight into the demands of NIR spectroscopic applications. The main instrument categories are covered by a short theory followed by examples. Most thoroughly handled topics are Fourier transform spectrometers (FTSs), Fabry-Perot interferometers (FPIs), and dispersive spectrometers. Two other categories are also separately presented, namely light modulator systems and tunable MEMS light sources. We give an overview on NIR spectroscopy and its special requirements regarding the realization of MEMS spectrometers

U2 - 10.1002/9780470027318.a9376

DO - 10.1002/9780470027318.a9376

M3 - Chapter or book article

SN - 978-047197670-7

SP - 1

EP - 36

BT - Encyclopedia of Analytical Chemistry

PB - Wiley

ER -

Antila J, Tuohiniemi M, Rissanen A, Kantojärvi U, Lahti M, Viherkanto K et al. MEMS- and MOEMS-Based Near-Infrared Spectrometers. In Encyclopedia of Analytical Chemistry. Wiley. 2014. p. 1-36 https://doi.org/10.1002/9780470027318.a9376