MEMS- and MOEMS-Based Near-Infrared Spectrometers: Field-portable instrumentation

Jarkko Antila; Mikko Tuohiniemi; Anna Rissanen; Uula Kantojärvi; Markku Lahti; Kai Viherkanto; Marko Kaarre; Jouko Malinen

doi:10.1002/9780470027318.a9376

MEMS- and MOEMS-Based Near-Infrared Spectrometers: Field-portable instrumentation

Jarkko Antila, Mikko Tuohiniemi, Anna Rissanen, Uula Kantojärvi, Markku Lahti, Kai Viherkanto, Marko Kaarre, Jouko Malinen

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Professional

Abstract

The trend in near-infrared (NIR) spectroscopy is to go toward on-site, in-field, on-the-go applications with calibration-free instruments and off-the-shelf chemometrics software. Micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) represent manufacturing techniques and components, capable of enabling highly miniaturized, robust, and low-cost sensors and actuators. This article presents common MEMS and MOEMS manufacturing techniques and gives an insight into the demands of NIR spectroscopic applications. The main instrument categories are covered by a short theory followed by examples. Most thoroughly handled topics are Fourier transform spectrometers (FTSs), Fabry-Perot interferometers (FPIs), and dispersive spectrometers. Two other categories are also separately presented, namely light modulator systems and tunable MEMS light sources. We give an overview on NIR spectroscopy and its special requirements regarding the realization of MEMS spectrometers

Original language	English
Title of host publication	Encyclopedia of Analytical Chemistry
Publisher	Wiley
Pages	1-36
ISBN (Electronic)	978-0-470-02731-8
ISBN (Print)	978-0-471-97670-7
DOIs	https://doi.org/10.1002/9780470027318.a9376
Publication status	Published - 9 Jan 2014
MoE publication type	D2 Article in professional manuals or guides or professional information systems or text book material

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10.1002/9780470027318.a9376

1 Chapter or book article

MEMS- and MOEMS-Based Visible and Near-Infrared Spectrometers: Field-portable instrumentation
Antila, J., Tuohiniemi, M., Rissanen, A., Kantojärvi, U., Lahti, M., Viherkanto, K., Kaarre, M., Malinen, J. & Näsilä, A., 24 May 2021, Encyclopedia of Analytical Chemistry. Wiley
Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Professional

Cite this

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title = "MEMS- and MOEMS-Based Near-Infrared Spectrometers: Field-portable instrumentation",

abstract = "The trend in near-infrared (NIR) spectroscopy is to go toward on-site, in-field, on-the-go applications with calibration-free instruments and off-the-shelf chemometrics software. Micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) represent manufacturing techniques and components, capable of enabling highly miniaturized, robust, and low-cost sensors and actuators. This article presents common MEMS and MOEMS manufacturing techniques and gives an insight into the demands of NIR spectroscopic applications. The main instrument categories are covered by a short theory followed by examples. Most thoroughly handled topics are Fourier transform spectrometers (FTSs), Fabry-Perot interferometers (FPIs), and dispersive spectrometers. Two other categories are also separately presented, namely light modulator systems and tunable MEMS light sources. We give an overview on NIR spectroscopy and its special requirements regarding the realization of MEMS spectrometers",

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AU - Antila, Jarkko

AU - Tuohiniemi, Mikko

AU - Rissanen, Anna

AU - Kantojärvi, Uula

AU - Lahti, Markku

AU - Viherkanto, Kai

AU - Kaarre, Marko

AU - Malinen, Jouko

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N2 - The trend in near-infrared (NIR) spectroscopy is to go toward on-site, in-field, on-the-go applications with calibration-free instruments and off-the-shelf chemometrics software. Micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) represent manufacturing techniques and components, capable of enabling highly miniaturized, robust, and low-cost sensors and actuators. This article presents common MEMS and MOEMS manufacturing techniques and gives an insight into the demands of NIR spectroscopic applications. The main instrument categories are covered by a short theory followed by examples. Most thoroughly handled topics are Fourier transform spectrometers (FTSs), Fabry-Perot interferometers (FPIs), and dispersive spectrometers. Two other categories are also separately presented, namely light modulator systems and tunable MEMS light sources. We give an overview on NIR spectroscopy and its special requirements regarding the realization of MEMS spectrometers

AB - The trend in near-infrared (NIR) spectroscopy is to go toward on-site, in-field, on-the-go applications with calibration-free instruments and off-the-shelf chemometrics software. Micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) represent manufacturing techniques and components, capable of enabling highly miniaturized, robust, and low-cost sensors and actuators. This article presents common MEMS and MOEMS manufacturing techniques and gives an insight into the demands of NIR spectroscopic applications. The main instrument categories are covered by a short theory followed by examples. Most thoroughly handled topics are Fourier transform spectrometers (FTSs), Fabry-Perot interferometers (FPIs), and dispersive spectrometers. Two other categories are also separately presented, namely light modulator systems and tunable MEMS light sources. We give an overview on NIR spectroscopy and its special requirements regarding the realization of MEMS spectrometers

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SP - 1

EP - 36

BT - Encyclopedia of Analytical Chemistry

PB - Wiley

ER -

MEMS- and MOEMS-Based Near-Infrared Spectrometers: Field-portable instrumentation

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Research output

MEMS- and MOEMS-Based Visible and Near-Infrared Spectrometers: Field-portable instrumentation

Cite this