MEMS- and MOEMS-Based Visible and Near-Infrared Spectrometers: Field-portable instrumentation

Jarkko Antila, Mikko Tuohiniemi, Anna Rissanen, Uula Kantojärvi, Markku Lahti, Kai Viherkanto, Marko Kaarre, Jouko Malinen, Antti Näsilä

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional


The trend in near-infrared (NIR) spectroscopy is to go toward on-site, in-field, on-the-go applications with calibration-free instruments and off-the-shelf chemometrics software. Micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) represent manufacturing techniques and components, capable of enabling highly miniaturized, robust, and low-cost sensors and actuators. This article presents common MEMS and MOEMS manufacturing techniques and gives an insight into the demands of NIR spectroscopic applications. The main instrument categories are covered by a short theory followed by examples. Most thoroughly handled topics are Fourier-transform spectrometers (FTSs), Fabry–Perot interferometers (FPIs), and dispersive spectrometers. Two other categories are also separately presented, namely light modulator systems and tunable MEMS light sources. We give an overview on NIR spectroscopy and its special requirements regarding the realization of MEMS spectrometers.
Original languageEnglish
Title of host publicationEncyclopedia of Analytical Chemistry
ISBN (Electronic)978-0-470-02731-8
ISBN (Print)978-0-471-97670-7
Publication statusPublished - 24 May 2021
MoE publication typeD2 Article in professional manuals or guides or professional information systems or text book material


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