MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT

Jarkko Antila, Akseli Miranto, Jussi Mäkynen, Mari Laamanen, Anna Rissanen, Martti Blomberg, Heikki Saari, Jouko Malinen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

21 Citations (Scopus)


Miniaturized spectrometers covering spectral regions from UV to thermal IR are of interest for several applications.
For these purposes VTT has for many years been developing tuneable MEMS-based and more recently piezo-actuated Fabry-Perot Interferometers (FPIs). Lately several inventions have been made to enter new wavelengths in the VIS range and enlarge apertures of MEMS devices and also extending the wavelength range of piezo-actuated FPIs.
In this paper the background and the latest FPI technologies at VTT are reviewed and new results on components and system level demonstrators are presented.
The two FPI technologies are compared from performance and application point of view. Finally insight is given to the further development of next generation devices.
Original languageEnglish
Title of host publicationProceedings of SPIE
Subtitle of host publication Next-Generation Spectroscopic Technologies III
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)978-0-8194-8144-3
Publication statusPublished - 2010
MoE publication typeB3 Non-refereed article in conference proceedings
EventSPIE Defense, Security and Sensing 2010: Next-Generation Spectroscopic Technologies III - Orlando, United States
Duration: 5 Apr 20106 Apr 2010

Publication series

SeriesProceedings of SPIE


ConferenceSPIE Defense, Security and Sensing 2010
CountryUnited States


  • Fabry-Perot
  • imaging
  • MEMS
  • miniaturized spectrometer
  • NIR
  • piezo
  • VIS

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