MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT

Jarkko Antila; Akseli Miranto; Jussi Mäkynen; Mari Laamanen; Anna Rissanen; Martti Blomberg; Heikki Saari; Jouko Malinen

doi:10.1117/12.850164

MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT

Jarkko Antila, Akseli Miranto, Jussi Mäkynen, Mari Laamanen, Anna Rissanen, Martti Blomberg, Heikki Saari, Jouko Malinen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

39 Citations (Scopus)

Abstract

Miniaturized spectrometers covering spectral regions from UV to thermal IR are of interest for several applications.
For these purposes VTT has for many years been developing tuneable MEMS-based and more recently piezo-actuated Fabry-Perot Interferometers (FPIs). Lately several inventions have been made to enter new wavelengths in the VIS range and enlarge apertures of MEMS devices and also extending the wavelength range of piezo-actuated FPIs.
In this paper the background and the latest FPI technologies at VTT are reviewed and new results on components and system level demonstrators are presented.
The two FPI technologies are compared from performance and application point of view. Finally insight is given to the further development of next generation devices.

Original language	English
Title of host publication	Proceedings of SPIE
Subtitle of host publication	Next-Generation Spectroscopic Technologies III
Publisher	International Society for Optics and Photonics SPIE
ISBN (Print)	978-0-8194-8144-3
DOIs	https://doi.org/10.1117/12.850164
Publication status	Published - 2010
MoE publication type	B3 Non-refereed article in conference proceedings
Event	SPIE Defense, Security and Sensing 2010: Next-Generation Spectroscopic Technologies III - Orlando, United States Duration: 5 Apr 2010 → 6 Apr 2010

Publication series

Series	Proceedings of SPIE
Volume	7680
ISSN	0277-786X

Conference

Conference	SPIE Defense, Security and Sensing 2010
Country/Territory	United States
City	Orlando
Period	5/04/10 → 6/04/10

Keywords

Fabry-Perot
imaging
MEMS
miniaturized spectrometer
NIR
piezo
VIS

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10.1117/12.850164

Cite this

Antila, J., Miranto, A., Mäkynen, J., Laamanen, M., Rissanen, A., Blomberg, M., Saari, H., & Malinen, J. (2010). MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT. In Proceedings of SPIE : Next-Generation Spectroscopic Technologies III Article 76800U International Society for Optics and Photonics SPIE. https://doi.org/10.1117/12.850164

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title = "MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT",

abstract = "Miniaturized spectrometers covering spectral regions from UV to thermal IR are of interest for several applications. For these purposes VTT has for many years been developing tuneable MEMS-based and more recently piezo-actuated Fabry-Perot Interferometers (FPIs). Lately several inventions have been made to enter new wavelengths in the VIS range and enlarge apertures of MEMS devices and also extending the wavelength range of piezo-actuated FPIs. In this paper the background and the latest FPI technologies at VTT are reviewed and new results on components and system level demonstrators are presented. The two FPI technologies are compared from performance and application point of view. Finally insight is given to the further development of next generation devices.",

keywords = "Fabry-Perot, imaging, MEMS, miniaturized spectrometer, NIR, piezo, VIS",

author = "Jarkko Antila and Akseli Miranto and Jussi M{\"a}kynen and Mari Laamanen and Anna Rissanen and Martti Blomberg and Heikki Saari and Jouko Malinen",

year = "2010",

doi = "10.1117/12.850164",

language = "English",

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series = "Proceedings of SPIE",

publisher = "International Society for Optics and Photonics SPIE",

booktitle = "Proceedings of SPIE",

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note = "SPIE Defense, Security and Sensing 2010 : Next-Generation Spectroscopic Technologies III ; Conference date: 05-04-2010 Through 06-04-2010",

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Antila, J, Miranto, A, Mäkynen, J, Laamanen, M, Rissanen, A, Blomberg, M, Saari, H & Malinen, J 2010, MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT. in Proceedings of SPIE : Next-Generation Spectroscopic Technologies III., 76800U, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 7680, SPIE Defense, Security and Sensing 2010, Orlando, Florida, United States, 5/04/10. https://doi.org/10.1117/12.850164

MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT. / Antila, Jarkko; Miranto, Akseli; Mäkynen, Jussi et al.
Proceedings of SPIE : Next-Generation Spectroscopic Technologies III. International Society for Optics and Photonics SPIE, 2010. 76800U (Proceedings of SPIE, Vol. 7680).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

TY - GEN

T1 - MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT

AU - Antila, Jarkko

AU - Miranto, Akseli

AU - Mäkynen, Jussi

AU - Laamanen, Mari

AU - Rissanen, Anna

AU - Blomberg, Martti

AU - Saari, Heikki

AU - Malinen, Jouko

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N2 - Miniaturized spectrometers covering spectral regions from UV to thermal IR are of interest for several applications. For these purposes VTT has for many years been developing tuneable MEMS-based and more recently piezo-actuated Fabry-Perot Interferometers (FPIs). Lately several inventions have been made to enter new wavelengths in the VIS range and enlarge apertures of MEMS devices and also extending the wavelength range of piezo-actuated FPIs. In this paper the background and the latest FPI technologies at VTT are reviewed and new results on components and system level demonstrators are presented. The two FPI technologies are compared from performance and application point of view. Finally insight is given to the further development of next generation devices.

AB - Miniaturized spectrometers covering spectral regions from UV to thermal IR are of interest for several applications. For these purposes VTT has for many years been developing tuneable MEMS-based and more recently piezo-actuated Fabry-Perot Interferometers (FPIs). Lately several inventions have been made to enter new wavelengths in the VIS range and enlarge apertures of MEMS devices and also extending the wavelength range of piezo-actuated FPIs. In this paper the background and the latest FPI technologies at VTT are reviewed and new results on components and system level demonstrators are presented. The two FPI technologies are compared from performance and application point of view. Finally insight is given to the further development of next generation devices.

KW - Fabry-Perot

KW - imaging

KW - MEMS

KW - miniaturized spectrometer

KW - NIR

KW - piezo

KW - VIS

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DO - 10.1117/12.850164

M3 - Conference article in proceedings

SN - 978-0-8194-8144-3

T3 - Proceedings of SPIE

BT - Proceedings of SPIE

PB - International Society for Optics and Photonics SPIE

T2 - SPIE Defense, Security and Sensing 2010

Y2 - 5 April 2010 through 6 April 2010

ER -

MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT

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Keywords

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