MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT

Jarkko Antila, Akseli Miranto, Jussi Mäkynen, Mari Laamanen, Anna Rissanen, Martti Blomberg, Heikki Saari, Jouko Malinen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

18 Citations (Scopus)

Abstract

Miniaturized spectrometers covering spectral regions from UV to thermal IR are of interest for several applications.
For these purposes VTT has for many years been developing tuneable MEMS-based and more recently piezo-actuated Fabry-Perot Interferometers (FPIs). Lately several inventions have been made to enter new wavelengths in the VIS range and enlarge apertures of MEMS devices and also extending the wavelength range of piezo-actuated FPIs.
In this paper the background and the latest FPI technologies at VTT are reviewed and new results on components and system level demonstrators are presented.
The two FPI technologies are compared from performance and application point of view. Finally insight is given to the further development of next generation devices.
Original languageEnglish
Title of host publicationProceedings of SPIE
Subtitle of host publication Next-Generation Spectroscopic Technologies III
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)978-0-8194-8144-3
DOIs
Publication statusPublished - 2010
MoE publication typeB3 Non-refereed article in conference proceedings
EventSPIE Defense, Security and Sensing 2010: Next-Generation Spectroscopic Technologies III - Orlando, United States
Duration: 5 Apr 20106 Apr 2010

Publication series

SeriesProceedings of SPIE
Volume7680
ISSN0277-786X

Conference

ConferenceSPIE Defense, Security and Sensing 2010
CountryUnited States
CityOrlando
Period5/04/106/04/10

Fingerprint

Fabry-Perot interferometers
MEMS
Actuators
Wavelength
Patents and inventions
Spectrometers

Keywords

  • Fabry-Perot
  • imaging
  • MEMS
  • miniaturized spectrometer
  • NIR
  • piezo
  • VIS

Cite this

Antila, J., Miranto, A., Mäkynen, J., Laamanen, M., Rissanen, A., Blomberg, M., ... Malinen, J. (2010). MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT. In Proceedings of SPIE : Next-Generation Spectroscopic Technologies III [76800U] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 7680 https://doi.org/10.1117/12.850164
Antila, Jarkko ; Miranto, Akseli ; Mäkynen, Jussi ; Laamanen, Mari ; Rissanen, Anna ; Blomberg, Martti ; Saari, Heikki ; Malinen, Jouko. / MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT. Proceedings of SPIE : Next-Generation Spectroscopic Technologies III. International Society for Optics and Photonics SPIE, 2010. (Proceedings of SPIE, Vol. 7680).
@inproceedings{5c1bfa33c3b84849b2726c222d4c62ab,
title = "MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT",
abstract = "Miniaturized spectrometers covering spectral regions from UV to thermal IR are of interest for several applications. For these purposes VTT has for many years been developing tuneable MEMS-based and more recently piezo-actuated Fabry-Perot Interferometers (FPIs). Lately several inventions have been made to enter new wavelengths in the VIS range and enlarge apertures of MEMS devices and also extending the wavelength range of piezo-actuated FPIs. In this paper the background and the latest FPI technologies at VTT are reviewed and new results on components and system level demonstrators are presented. The two FPI technologies are compared from performance and application point of view. Finally insight is given to the further development of next generation devices.",
keywords = "Fabry-Perot, imaging, MEMS, miniaturized spectrometer, NIR, piezo, VIS",
author = "Jarkko Antila and Akseli Miranto and Jussi M{\"a}kynen and Mari Laamanen and Anna Rissanen and Martti Blomberg and Heikki Saari and Jouko Malinen",
year = "2010",
doi = "10.1117/12.850164",
language = "English",
isbn = "978-0-8194-8144-3",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
booktitle = "Proceedings of SPIE",
address = "United States",

}

Antila, J, Miranto, A, Mäkynen, J, Laamanen, M, Rissanen, A, Blomberg, M, Saari, H & Malinen, J 2010, MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT. in Proceedings of SPIE : Next-Generation Spectroscopic Technologies III., 76800U, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 7680, SPIE Defense, Security and Sensing 2010, Orlando, United States, 5/04/10. https://doi.org/10.1117/12.850164

MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT. / Antila, Jarkko; Miranto, Akseli; Mäkynen, Jussi; Laamanen, Mari; Rissanen, Anna; Blomberg, Martti; Saari, Heikki; Malinen, Jouko.

Proceedings of SPIE : Next-Generation Spectroscopic Technologies III. International Society for Optics and Photonics SPIE, 2010. 76800U (Proceedings of SPIE, Vol. 7680).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

TY - GEN

T1 - MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT

AU - Antila, Jarkko

AU - Miranto, Akseli

AU - Mäkynen, Jussi

AU - Laamanen, Mari

AU - Rissanen, Anna

AU - Blomberg, Martti

AU - Saari, Heikki

AU - Malinen, Jouko

PY - 2010

Y1 - 2010

N2 - Miniaturized spectrometers covering spectral regions from UV to thermal IR are of interest for several applications. For these purposes VTT has for many years been developing tuneable MEMS-based and more recently piezo-actuated Fabry-Perot Interferometers (FPIs). Lately several inventions have been made to enter new wavelengths in the VIS range and enlarge apertures of MEMS devices and also extending the wavelength range of piezo-actuated FPIs. In this paper the background and the latest FPI technologies at VTT are reviewed and new results on components and system level demonstrators are presented. The two FPI technologies are compared from performance and application point of view. Finally insight is given to the further development of next generation devices.

AB - Miniaturized spectrometers covering spectral regions from UV to thermal IR are of interest for several applications. For these purposes VTT has for many years been developing tuneable MEMS-based and more recently piezo-actuated Fabry-Perot Interferometers (FPIs). Lately several inventions have been made to enter new wavelengths in the VIS range and enlarge apertures of MEMS devices and also extending the wavelength range of piezo-actuated FPIs. In this paper the background and the latest FPI technologies at VTT are reviewed and new results on components and system level demonstrators are presented. The two FPI technologies are compared from performance and application point of view. Finally insight is given to the further development of next generation devices.

KW - Fabry-Perot

KW - imaging

KW - MEMS

KW - miniaturized spectrometer

KW - NIR

KW - piezo

KW - VIS

U2 - 10.1117/12.850164

DO - 10.1117/12.850164

M3 - Conference article in proceedings

SN - 978-0-8194-8144-3

T3 - Proceedings of SPIE

BT - Proceedings of SPIE

PB - International Society for Optics and Photonics SPIE

ER -

Antila J, Miranto A, Mäkynen J, Laamanen M, Rissanen A, Blomberg M et al. MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT. In Proceedings of SPIE : Next-Generation Spectroscopic Technologies III. International Society for Optics and Photonics SPIE. 2010. 76800U. (Proceedings of SPIE, Vol. 7680). https://doi.org/10.1117/12.850164