MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT

Jarkko Antila, Akseli Miranto, Jussi Mäkynen, Mari Laamanen, Anna Rissanen, Martti Blomberg, Heikki Saari, Jouko Malinen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    39 Citations (Scopus)

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    Physics