MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT

Jarkko Antila, Akseli Miranto, Jussi Mäkynen, Mari Laamanen, Anna Rissanen, Martti Blomberg, Heikki Saari, Jouko Malinen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

21 Citations (Scopus)

Fingerprint Dive into the research topics of 'MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT'. Together they form a unique fingerprint.

Agriculture & Biology