MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT
- Jarkko Antila
- , Akseli Miranto
- , Jussi Mäkynen
- , Mari Laamanen
- , Anna Rissanen
- , Martti Blomberg
- , Heikki Saari
- , Jouko Malinen
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific
44
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(Scopus)