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MEMS and piezo actuator based Fabry-Perot interferometer technologies and applications at VTT
Jarkko Antila, Akseli Miranto, Jussi Mäkynen, Mari Laamanen, Anna Rissanen, Martti Blomberg, Heikki Saari, Jouko Malinen
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific
40
Citations
(Scopus)