MEMS-anturit prosessien ja laitteiden kunnonvalvonnassa sekä diagnostiikassa

Jari Halme, Jussi Lehtonen, Risto Parikka

Research output: Book/Report › Report

Original language	Finnish
Publisher	VTT Technical Research Centre of Finland
Number of pages	24
Publication status	Published - 2001
MoE publication type	D4 Published development or research report or study

Series	VTT Valmistustekniikka. Tutkimusraportti
Number	BVAL73-011095

Cite this

@book{f45fa5898bd24cd297f633094bcf87aa,

title = "MEMS-anturit prosessien ja laitteiden kunnonvalvonnassa sek{\"a} diagnostiikassa",

author = "Jari Halme and Jussi Lehtonen and Risto Parikka",

year = "2001",

language = "Finnish",

series = "VTT Valmistustekniikka. Tutkimusraportti",

publisher = "VTT Technical Research Centre of Finland",

number = "BVAL73-011095",

address = "Finland",

}