MEMS-based AC voltage reference

Anu Kärkkäinen (Corresponding Author), Nadine Pesonen, Mika Suhonen, Aarne S. Oja, Antti Manninen, Nikolai Tisnek, Heikki Seppä

    Research output: Contribution to journalArticleScientificpeer-review

    17 Citations (Scopus)


    An ac root-mean-square (RMS) voltage reference based on a microelectromechanical system (MEMS) component is presented. The device stability is investigated in various experiments. A time stability at a level of a few μV/V in 24 h was measured using an accelerometer MEMS component at an operating frequency of 100 kHz.
    Original languageEnglish
    Pages (from-to)595 - 599
    Number of pages5
    JournalIEEE Transactions on Instrumentation and Measurement
    Issue number2
    Publication statusPublished - 2005
    MoE publication typeA1 Journal article-refereed


    • capacitive sensors
    • AC voltage reference
    • microelectromechanical systems
    • MEMS
    • micromachining
    • silicon-on-insulator
    • SOI


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