MEMS-based AC voltage reference

Anu Kärkkäinen (Corresponding Author), Nadine Pesonen, Mika Suhonen, Aarne S. Oja, Antti Manninen, Nikolai Tisnek, Heikki Seppä

Research output: Contribution to journalArticleScientificpeer-review

16 Citations (Scopus)

Abstract

An ac root-mean-square (RMS) voltage reference based on a microelectromechanical system (MEMS) component is presented. The device stability is investigated in various experiments. A time stability at a level of a few μV/V in 24 h was measured using an accelerometer MEMS component at an operating frequency of 100 kHz.
Original languageEnglish
Pages (from-to)595 - 599
Number of pages5
JournalIEEE Transactions on Instrumentation and Measurement
Volume54
Issue number2
DOIs
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

Fingerprint

microelectromechanical systems
MEMS
alternating current
Electric potential
electric potential
accelerometers
Accelerometers
Experiments

Keywords

  • capacitive sensors
  • AC voltage reference
  • microelectromechanical systems
  • MEMS
  • micromachining
  • silicon-on-insulator
  • SOI

Cite this

Kärkkäinen, Anu ; Pesonen, Nadine ; Suhonen, Mika ; Oja, Aarne S. ; Manninen, Antti ; Tisnek, Nikolai ; Seppä, Heikki. / MEMS-based AC voltage reference. In: IEEE Transactions on Instrumentation and Measurement. 2005 ; Vol. 54, No. 2. pp. 595 - 599.
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MEMS-based AC voltage reference. / Kärkkäinen, Anu (Corresponding Author); Pesonen, Nadine; Suhonen, Mika; Oja, Aarne S.; Manninen, Antti; Tisnek, Nikolai; Seppä, Heikki.

In: IEEE Transactions on Instrumentation and Measurement, Vol. 54, No. 2, 2005, p. 595 - 599.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - MEMS-based AC voltage reference

AU - Kärkkäinen, Anu

AU - Pesonen, Nadine

AU - Suhonen, Mika

AU - Oja, Aarne S.

AU - Manninen, Antti

AU - Tisnek, Nikolai

AU - Seppä, Heikki

PY - 2005

Y1 - 2005

N2 - An ac root-mean-square (RMS) voltage reference based on a microelectromechanical system (MEMS) component is presented. The device stability is investigated in various experiments. A time stability at a level of a few μV/V in 24 h was measured using an accelerometer MEMS component at an operating frequency of 100 kHz.

AB - An ac root-mean-square (RMS) voltage reference based on a microelectromechanical system (MEMS) component is presented. The device stability is investigated in various experiments. A time stability at a level of a few μV/V in 24 h was measured using an accelerometer MEMS component at an operating frequency of 100 kHz.

KW - capacitive sensors

KW - AC voltage reference

KW - microelectromechanical systems

KW - MEMS

KW - micromachining

KW - silicon-on-insulator

KW - SOI

U2 - 10.1109/TIM.2004.843422

DO - 10.1109/TIM.2004.843422

M3 - Article

VL - 54

SP - 595

EP - 599

JO - IEEE Transactions on Instrumentation and Measurement

JF - IEEE Transactions on Instrumentation and Measurement

SN - 0018-9456

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ER -