MEMS-based AC voltage reference

Anu Kärkkäinen (Corresponding Author), Nadine Pesonen, Mika Suhonen, Aarne S. Oja, Antti Manninen, Nikolai Tisnek, Heikki Seppä

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)

Abstract

An ac root-mean-square (RMS) voltage reference based on a microelectromechanical system (MEMS) component is presented. The device stability is investigated in various experiments. A time stability at a level of a few μV/V in 24 h was measured using an accelerometer MEMS component at an operating frequency of 100 kHz.
Original languageEnglish
Pages (from-to)595 - 599
Number of pages5
JournalIEEE Transactions on Instrumentation and Measurement
Volume54
Issue number2
DOIs
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

Keywords

  • capacitive sensors
  • AC voltage reference
  • microelectromechanical systems
  • MEMS
  • micromachining
  • silicon-on-insulator
  • SOI

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