MEMS-based AC voltage reference

Anu Kärkkäinen; Nadine Pesonen; Mika Suhonen; Aarne S. Oja; Antti Manninen; Nikolai Tisnek; Heikki Seppä

doi:10.1109/TIM.2004.843422

MEMS-based AC voltage reference

Anu Kärkkäinen^*, Nadine Pesonen, Mika Suhonen, Aarne S. Oja, Antti Manninen, Nikolai Tisnek, Heikki Seppä

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

17 Citations (Scopus)

Abstract

An ac root-mean-square (RMS) voltage reference based on a microelectromechanical system (MEMS) component is presented. The device stability is investigated in various experiments. A time stability at a level of a few µV/V in 24 h was measured using an accelerometer MEMS component at an operating frequency of 100 kHz.

Original language	English
Pages (from-to)	595-599
Journal	IEEE Transactions on Instrumentation and Measurement
Volume	54
Issue number	2
DOIs	https://doi.org/10.1109/TIM.2004.843422
Publication status	Published - 2005
MoE publication type	A1 Journal article-refereed

Keywords

capacitive sensors
AC voltage reference
microelectromechanical systems
MEMS
micromachining
silicon-on-insulator
SOI

Access to Document

10.1109/TIM.2004.843422

Cite this

@article{f293a1a293cb497f89214b273d03a0ef,

title = "MEMS-based AC voltage reference",

abstract = "An ac root-mean-square (RMS) voltage reference based on a microelectromechanical system (MEMS) component is presented. The device stability is investigated in various experiments. A time stability at a level of a few µV/V in 24 h was measured using an accelerometer MEMS component at an operating frequency of 100 kHz.",

keywords = "capacitive sensors, AC voltage reference, microelectromechanical systems, MEMS, micromachining, silicon-on-insulator, SOI",

author = "Anu K{\"a}rkk{\"a}inen and Nadine Pesonen and Mika Suhonen and Oja, \{Aarne S.\} and Antti Manninen and Nikolai Tisnek and Heikki Sepp{\"a}",

year = "2005",

doi = "10.1109/TIM.2004.843422",

language = "English",

volume = "54",

pages = "595--599",

journal = "IEEE Transactions on Instrumentation and Measurement",

issn = "0018-9456",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

number = "2",

}

TY - JOUR

T1 - MEMS-based AC voltage reference

AU - Kärkkäinen, Anu

AU - Pesonen, Nadine

AU - Suhonen, Mika

AU - Oja, Aarne S.

AU - Manninen, Antti

AU - Tisnek, Nikolai

AU - Seppä, Heikki

PY - 2005

Y1 - 2005

N2 - An ac root-mean-square (RMS) voltage reference based on a microelectromechanical system (MEMS) component is presented. The device stability is investigated in various experiments. A time stability at a level of a few µV/V in 24 h was measured using an accelerometer MEMS component at an operating frequency of 100 kHz.

AB - An ac root-mean-square (RMS) voltage reference based on a microelectromechanical system (MEMS) component is presented. The device stability is investigated in various experiments. A time stability at a level of a few µV/V in 24 h was measured using an accelerometer MEMS component at an operating frequency of 100 kHz.

KW - capacitive sensors

KW - AC voltage reference

KW - microelectromechanical systems

KW - MEMS

KW - micromachining

KW - silicon-on-insulator

KW - SOI

U2 - 10.1109/TIM.2004.843422

DO - 10.1109/TIM.2004.843422

M3 - Article

SN - 0018-9456

VL - 54

SP - 595

EP - 599

JO - IEEE Transactions on Instrumentation and Measurement

JF - IEEE Transactions on Instrumentation and Measurement

IS - 2

ER -

MEMS-based AC voltage reference

Abstract

Keywords

Access to Document

Fingerprint

Cite this