MEMS-based AC voltage reference

Anu Kärkkäinen; Nadine Pesonen; Mika Suhonen; Aarne S. Oja; Antti Manninen; Nikolai Tisnek; Heikki Seppä

doi:10.1109/TIM.2004.843422

MEMS-based AC voltage reference

Anu Kärkkäinen^*
, Nadine Pesonen
, Mika Suhonen
, Aarne S. Oja
, Antti Manninen
, Nikolai Tisnek
, Heikki Seppä

^*Corresponding author for this work

Centre for Metrology and Accreditation Finland (MIKES)
VTT (former employee or external)

Research output: Contribution to journal › Article › Scientific › peer-review

17 Citations (Scopus)

Abstract

An ac root-mean-square (RMS) voltage reference based on a microelectromechanical system (MEMS) component is presented. The device stability is investigated in various experiments. A time stability at a level of a few µV/V in 24 h was measured using an accelerometer MEMS component at an operating frequency of 100 kHz.

Original language	English
Pages (from-to)	595-599
Journal	IEEE Transactions on Instrumentation and Measurement
Volume	54
Issue number	2
DOIs	https://doi.org/10.1109/TIM.2004.843422
Publication status	Published - 2005
MoE publication type	A1 Journal article-refereed

Keywords

capacitive sensors
AC voltage reference
microelectromechanical systems
MEMS
micromachining
silicon-on-insulator
SOI

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10.1109/TIM.2004.843422

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abstract = "An ac root-mean-square (RMS) voltage reference based on a microelectromechanical system (MEMS) component is presented. The device stability is investigated in various experiments. A time stability at a level of a few µV/V in 24 h was measured using an accelerometer MEMS component at an operating frequency of 100 kHz.",

keywords = "capacitive sensors, AC voltage reference, microelectromechanical systems, MEMS, micromachining, silicon-on-insulator, SOI",

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AU - Kärkkäinen, Anu

AU - Pesonen, Nadine

AU - Suhonen, Mika

AU - Oja, Aarne S.

AU - Manninen, Antti

AU - Tisnek, Nikolai

AU - Seppä, Heikki

PY - 2005

Y1 - 2005

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AB - An ac root-mean-square (RMS) voltage reference based on a microelectromechanical system (MEMS) component is presented. The device stability is investigated in various experiments. A time stability at a level of a few µV/V in 24 h was measured using an accelerometer MEMS component at an operating frequency of 100 kHz.

KW - capacitive sensors

KW - AC voltage reference

KW - microelectromechanical systems

KW - MEMS

KW - micromachining

KW - silicon-on-insulator

KW - SOI

U2 - 10.1109/TIM.2004.843422

DO - 10.1109/TIM.2004.843422

M3 - Article

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SP - 595

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JO - IEEE Transactions on Instrumentation and Measurement

JF - IEEE Transactions on Instrumentation and Measurement

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ER -

MEMS-based AC voltage reference

Abstract

Keywords

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