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MEMS-based AC voltage reference
Anu Kärkkäinen
*
, Nadine Pesonen
,
Mika Suhonen
, Aarne S. Oja
,
Antti Manninen
, Nikolai Tisnek
, Heikki Seppä
*
Corresponding author for this work
Centre for Metrology and Accreditation Finland (MIKES)
VTT (former employee or external)
Research output
:
Contribution to journal
›
Article
›
Scientific
›
peer-review
17
Citations (Scopus)
Overview
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Keyphrases
Micro-electro-mechanical Systems
100%
AC Voltage Reference
100%
Systems-based
100%
System Components
66%
Accelerometer
33%
Voltage Reference
33%
Root Mean Square
33%
V(V)
33%
Operating Frequency
33%
Square Wave Voltage
33%
Time Stability
33%
Device Stability
33%
Reference Dependence
33%
INIS
voltage
100%
microelectromechanical systems
100%
stability
66%
levels
33%
devices
33%
accelerometers
33%
roots
33%
khz range
33%
Engineering
Microelectromechanical System
100%
System Component
66%
Root Mean Square
33%
Operating Frequency
33%