MEMS based tunable circuits for millimetre wave systems

Tauno Vähä-Heikkilä, Jussi Varis, Jussi Tuovinen (Corresponding author)

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review


    In this paper we describe millimetre wave impedance matching circuits based on Microelectro Mechanical Systems (MEMS) technology enabling easily more than one octave operation. The designs are based on the use of capacitive switches in a triple, double, and singe stub configurations as well as in a distributed transmission line design. The use of capacitive switches will enable 2^n number of impedance points (n is number of the switches), which cover practically fully the smith chart. Furthermore, very wide band and low loss operation of the tuner has been demonstrated. Measured results are shown over 20-110 GHz.
    Original languageEnglish
    Title of host publicationProceedings of XXVIII URSI General Assembly
    Subtitle of host publicationNew Delhi, India, 23-29 October 2005
    PublisherInternational Union of Radio Science (URSI)
    Number of pages4
    Publication statusPublished - 2005
    MoE publication typeNot Eligible


    • RF MEMS
    • millimetre wave
    • matching network
    • impedance tuner


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