MEMS based tunable circuits for millimetre wave systems

Tauno Vähä-Heikkilä; Jussi Varis; Jussi Tuovinen

MEMS based tunable circuits for millimetre wave systems

Tauno Vähä-Heikkilä, Jussi Varis, Jussi Tuovinen (Corresponding author)

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

In this paper we describe millimetre wave impedance matching circuits based on Microelectro Mechanical Systems (MEMS) technology enabling easily more than one octave operation. The designs are based on the use of capacitive switches in a triple, double, and singe stub configurations as well as in a distributed transmission line design. The use of capacitive switches will enable 2^n number of impedance points (n is number of the switches), which cover practically fully the smith chart. Furthermore, very wide band and low loss operation of the tuner has been demonstrated. Measured results are shown over 20-110 GHz.

Original language	English
Title of host publication	Proceedings of XXVIII URSI General Assembly
Subtitle of host publication	New Delhi, India, 23-29 October 2005
Publisher	International Union of Radio Science (URSI)
Number of pages	4
Publication status	Published - 2005
MoE publication type	Not Eligible

Keywords

RF MEMS
millimetre wave
matching network
impedance tuner

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http://www.ursi.org/proceedings/procGA05/pdf/D01.1(01812).pdf

Cite this

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title = "MEMS based tunable circuits for millimetre wave systems",

abstract = "In this paper we describe millimetre wave impedance matching circuits based on Microelectro Mechanical Systems (MEMS) technology enabling easily more than one octave operation. The designs are based on the use of capacitive switches in a triple, double, and singe stub configurations as well as in a distributed transmission line design. The use of capacitive switches will enable 2^n number of impedance points (n is number of the switches), which cover practically fully the smith chart. Furthermore, very wide band and low loss operation of the tuner has been demonstrated. Measured results are shown over 20-110 GHz.",

keywords = "RF MEMS, millimetre wave, matching network, impedance tuner",

author = "Tauno V{\"a}h{\"a}-Heikkil{\"a} and Jussi Varis and Jussi Tuovinen",

note = "No ISBN/ISSN found for the proceedings",

year = "2005",

language = "English",

booktitle = "Proceedings of XXVIII URSI General Assembly",

publisher = "International Union of Radio Science (URSI)",

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MEMS based tunable circuits for millimetre wave systems. / Vähä-Heikkilä, Tauno ; Varis, Jussi; Tuovinen, Jussi (Corresponding author).

Proceedings of XXVIII URSI General Assembly: New Delhi, India, 23-29 October 2005. International Union of Radio Science (URSI), 2005.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - MEMS based tunable circuits for millimetre wave systems

AU - Vähä-Heikkilä, Tauno

AU - Varis, Jussi

AU - Tuovinen, Jussi

N1 - No ISBN/ISSN found for the proceedings

PY - 2005

Y1 - 2005

N2 - In this paper we describe millimetre wave impedance matching circuits based on Microelectro Mechanical Systems (MEMS) technology enabling easily more than one octave operation. The designs are based on the use of capacitive switches in a triple, double, and singe stub configurations as well as in a distributed transmission line design. The use of capacitive switches will enable 2^n number of impedance points (n is number of the switches), which cover practically fully the smith chart. Furthermore, very wide band and low loss operation of the tuner has been demonstrated. Measured results are shown over 20-110 GHz.

AB - In this paper we describe millimetre wave impedance matching circuits based on Microelectro Mechanical Systems (MEMS) technology enabling easily more than one octave operation. The designs are based on the use of capacitive switches in a triple, double, and singe stub configurations as well as in a distributed transmission line design. The use of capacitive switches will enable 2^n number of impedance points (n is number of the switches), which cover practically fully the smith chart. Furthermore, very wide band and low loss operation of the tuner has been demonstrated. Measured results are shown over 20-110 GHz.

KW - RF MEMS

KW - millimetre wave

KW - matching network

KW - impedance tuner

M3 - Conference article in proceedings

BT - Proceedings of XXVIII URSI General Assembly

PB - International Union of Radio Science (URSI)

ER -

MEMS based tunable circuits for millimetre wave systems

Abstract

Keywords

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