MEMS-based voltage detector

Panu Helistö; Hannu Sipola; Heikki Seppä; Antti J. Manninen

doi:10.1016/j.sna.2015.08.011

MEMS-based voltage detector

Panu Helistö (Corresponding Author), Hannu Sipola, Heikki Seppä, Antti J. Manninen

Research output: Contribution to journal › Article › Scientific › peer-review

3 Citations (Scopus)

Abstract

A novel principle of low-noise voltage measurement based on microelectromechanical systems (MEMS) is introduced and experimentally demonstrated. The method is based on parametric conversion of voltage via electromechanical force to the amplitude of the RF signal of the capacitive measurement circuit that detects the displacement of a moving-plate MEMS capacitor. Both theory and experiments show that the noise of voltage measurement can be considerably decreased by biasing the MEMS device near its pull-in point. Experimental results are in agreement with theoretical predictions and they indicate the potential of the method as a competitor of state-of-the-art low-noise voltmeters in special applications.

Original language	English
Pages (from-to)	99-103
Journal	Sensors and Actuators A: Physical
Volume	234
DOIs	https://doi.org/10.1016/j.sna.2015.08.011
Publication status	Published - 2015
MoE publication type	A1 Journal article-refereed

Keywords

capacitive sensors
MEMS
noise
pull-in
readout
voltage measurement

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10.1016/j.sna.2015.08.011

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@article{e8be1bce28c94507a98c072f0cbf4b8c,

title = "MEMS-based voltage detector",

abstract = "A novel principle of low-noise voltage measurement based on microelectromechanical systems (MEMS) is introduced and experimentally demonstrated. The method is based on parametric conversion of voltage via electromechanical force to the amplitude of the RF signal of the capacitive measurement circuit that detects the displacement of a moving-plate MEMS capacitor. Both theory and experiments show that the noise of voltage measurement can be considerably decreased by biasing the MEMS device near its pull-in point. Experimental results are in agreement with theoretical predictions and they indicate the potential of the method as a competitor of state-of-the-art low-noise voltmeters in special applications.",

keywords = "capacitive sensors, MEMS, noise, pull-in, readout, voltage measurement",

author = "Panu Helist{\"o} and Hannu Sipola and Heikki Sepp{\"a} and Manninen, {Antti J.}",

year = "2015",

doi = "10.1016/j.sna.2015.08.011",

language = "English",

volume = "234",

pages = "99--103",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - MEMS-based voltage detector

AU - Helistö, Panu

AU - Sipola, Hannu

AU - Seppä, Heikki

AU - Manninen, Antti J.

PY - 2015

Y1 - 2015

N2 - A novel principle of low-noise voltage measurement based on microelectromechanical systems (MEMS) is introduced and experimentally demonstrated. The method is based on parametric conversion of voltage via electromechanical force to the amplitude of the RF signal of the capacitive measurement circuit that detects the displacement of a moving-plate MEMS capacitor. Both theory and experiments show that the noise of voltage measurement can be considerably decreased by biasing the MEMS device near its pull-in point. Experimental results are in agreement with theoretical predictions and they indicate the potential of the method as a competitor of state-of-the-art low-noise voltmeters in special applications.

AB - A novel principle of low-noise voltage measurement based on microelectromechanical systems (MEMS) is introduced and experimentally demonstrated. The method is based on parametric conversion of voltage via electromechanical force to the amplitude of the RF signal of the capacitive measurement circuit that detects the displacement of a moving-plate MEMS capacitor. Both theory and experiments show that the noise of voltage measurement can be considerably decreased by biasing the MEMS device near its pull-in point. Experimental results are in agreement with theoretical predictions and they indicate the potential of the method as a competitor of state-of-the-art low-noise voltmeters in special applications.

KW - capacitive sensors

KW - MEMS

KW - noise

KW - pull-in

KW - readout

KW - voltage measurement

U2 - 10.1016/j.sna.2015.08.011

DO - 10.1016/j.sna.2015.08.011

M3 - Article

SN - 0924-4247

VL - 234

SP - 99

EP - 103

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

ER -

MEMS-based voltage detector

Abstract

Keywords

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