MEMS-based voltage detector

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

Abstract

A novel principle of low-noise voltage measurement based on microelectromechanical systems (MEMS) is introduced and experimentally demonstrated. The method is based on parametric conversion of voltage via electromechanical force to the amplitude of the RF signal of the capacitive measurement circuit that detects the displacement of a moving-plate MEMS capacitor. Both theory and experiments show that the noise of voltage measurement can be considerably decreased by biasing the MEMS device near its pull-in point. Experimental results are in agreement with theoretical predictions and they indicate the potential of the method as a competitor of state-of-the-art low-noise voltmeters in special applications.
Original languageEnglish
Pages (from-to)99-103
JournalSensors and Actuators A: Physical
Volume234
DOIs
Publication statusPublished - 2015
MoE publication typeA1 Journal article-refereed

Fingerprint

microelectromechanical systems
MEMS
Voltage measurement
Detectors
low noise
electrical measurement
detectors
Electric potential
electric potential
Voltmeters
voltmeters
capacitors
Capacitors
Networks (circuits)
predictions
Experiments

Keywords

  • capacitive sensors
  • MEMS
  • noise
  • pull-in
  • readout
  • voltage measurement

Cite this

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title = "MEMS-based voltage detector",
abstract = "A novel principle of low-noise voltage measurement based on microelectromechanical systems (MEMS) is introduced and experimentally demonstrated. The method is based on parametric conversion of voltage via electromechanical force to the amplitude of the RF signal of the capacitive measurement circuit that detects the displacement of a moving-plate MEMS capacitor. Both theory and experiments show that the noise of voltage measurement can be considerably decreased by biasing the MEMS device near its pull-in point. Experimental results are in agreement with theoretical predictions and they indicate the potential of the method as a competitor of state-of-the-art low-noise voltmeters in special applications.",
keywords = "capacitive sensors, MEMS, noise, pull-in, readout, voltage measurement",
author = "Panu Helist{\"o} and Hannu Sipola and Heikki Sepp{\"a} and Manninen, {Antti J.}",
year = "2015",
doi = "10.1016/j.sna.2015.08.011",
language = "English",
volume = "234",
pages = "99--103",
journal = "Sensors and Actuators A: Physical",
issn = "0924-4247",
publisher = "Elsevier",

}

MEMS-based voltage detector. / Helistö, Panu (Corresponding Author); Sipola, Hannu; Seppä, Heikki; Manninen, Antti J.

In: Sensors and Actuators A: Physical, Vol. 234, 2015, p. 99-103.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - MEMS-based voltage detector

AU - Helistö, Panu

AU - Sipola, Hannu

AU - Seppä, Heikki

AU - Manninen, Antti J.

PY - 2015

Y1 - 2015

N2 - A novel principle of low-noise voltage measurement based on microelectromechanical systems (MEMS) is introduced and experimentally demonstrated. The method is based on parametric conversion of voltage via electromechanical force to the amplitude of the RF signal of the capacitive measurement circuit that detects the displacement of a moving-plate MEMS capacitor. Both theory and experiments show that the noise of voltage measurement can be considerably decreased by biasing the MEMS device near its pull-in point. Experimental results are in agreement with theoretical predictions and they indicate the potential of the method as a competitor of state-of-the-art low-noise voltmeters in special applications.

AB - A novel principle of low-noise voltage measurement based on microelectromechanical systems (MEMS) is introduced and experimentally demonstrated. The method is based on parametric conversion of voltage via electromechanical force to the amplitude of the RF signal of the capacitive measurement circuit that detects the displacement of a moving-plate MEMS capacitor. Both theory and experiments show that the noise of voltage measurement can be considerably decreased by biasing the MEMS device near its pull-in point. Experimental results are in agreement with theoretical predictions and they indicate the potential of the method as a competitor of state-of-the-art low-noise voltmeters in special applications.

KW - capacitive sensors

KW - MEMS

KW - noise

KW - pull-in

KW - readout

KW - voltage measurement

U2 - 10.1016/j.sna.2015.08.011

DO - 10.1016/j.sna.2015.08.011

M3 - Article

VL - 234

SP - 99

EP - 103

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

SN - 0924-4247

ER -