MEMS-based voltage detector

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Abstract

A novel principle of low-noise voltage measurement based on microelectromechanical systems (MEMS) is introduced and experimentally demonstrated. The method is based on parametric conversion of voltage via electromechanical force to the amplitude of the RF signal of the capacitive measurement circuit that detects the displacement of a moving-plate MEMS capacitor. Both theory and experiments show that the noise of voltage measurement can be considerably decreased by biasing the MEMS device near its pull-in point. Experimental results are in agreement with theoretical predictions and they indicate the potential of the method as a competitor of state-of-the-art low-noise voltmeters in special applications.
Original languageEnglish
Pages (from-to)99-103
JournalSensors and Actuators A: Physical
Volume234
DOIs
Publication statusPublished - 2015
MoE publication typeA1 Journal article-refereed

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Keywords

  • capacitive sensors
  • MEMS
  • noise
  • pull-in
  • readout
  • voltage measurement

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