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MEMS based voltage references: Dissertation
Anna-Maija Kärkkäinen
VTT Technical Research Centre of Finland
Research output
:
Thesis
›
Dissertation
›
Collection of Articles
3
Citations (Scopus)
Overview
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Dive into the research topics of 'MEMS based voltage references: Dissertation'. Together they form a unique fingerprint.
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Keyphrases
Micro-electro-mechanical Systems
100%
Voltage Reference
100%
Systems-based
100%
DC Voltage
63%
AC Voltage Reference
45%
AC Voltage
36%
System Components
27%
Charging Effect
18%
Josephson Voltage Standard
18%
Built-in Voltage
18%
Voltage Metrology
18%
Mechanical Properties
9%
Low Temperature
9%
Mechanical Stability
9%
Measurement Results
9%
Commercial Application
9%
Manufacturing Materials
9%
Manufacturing Process
9%
Actuation
9%
Long-term Stability
9%
Cryogenic Temperature
9%
First-order
9%
Multicrystalline Silicon
9%
Design Decisions
9%
Temperature Coefficient
9%
Performance Level
9%
Component Design
9%
Three-section
9%
Temperature Compensation
9%
Silicon-on-insulator
9%
Ppm Level
9%
Micromechanics
9%
Measurement Period
9%
Material Choice
9%
Metallized
9%
Mechanical Stress
9%
Excellent Mechanical Properties
9%
Moving Plate
9%
No-reference
9%
Stress Effect
9%
Capacitor Electrode
9%
Fusion Bonding
9%
Readout Electronics
9%
Plate Capacitor
9%
Electrostatic Discharge
9%
Hermetic Packaging
9%
Metrological Applications
9%
Component Manufacturing
9%
Device Stability
9%
Data Logging System
9%
Instability Phenomena
9%
Component Temperature
9%
Stability Issues
9%
Reference Dependence
9%
Metrology System
9%
Electromechanical Coupling
9%
Zener Diode
9%
Methods Section
9%
Section Design
9%
Digital multimeter
9%
Voltage Compensation
9%
Manufacturing Design
9%
Pull-in Voltage
9%
Fundamental Building Blocks
9%
Reference Voltage
9%
Electrostatic Instabilities
9%
INIS
voltage
100%
microelectromechanical systems
100%
stability
24%
applications
13%
devices
10%
silicon
10%
manufacturing
10%
electrostatics
10%
performance
6%
comparative evaluations
6%
levels
6%
design
6%
mechanical properties
6%
packaging
6%
metrology
6%
capacitors
6%
data
3%
bonding
3%
single crystals
3%
feedback
3%
coupling
3%
low temperature
3%
equations
3%
reduction
3%
plates
3%
electrodes
3%
cryogenics
3%
instability
3%
readout systems
3%
temperature coefficient
3%
commercialization
3%
digital systems
3%
zener diodes
3%
Engineering
Microelectromechanical System
100%
System Component
27%
Building Block
9%
Application Area
9%
Low-Temperature
9%
Term Stability
9%
Manufacturing Process
9%
Temperature Coefficient
9%
Major Factor
9%
Measurement Period
9%
Mechanical Stress
9%
Data Logging
9%
Silicon Single Crystal
9%
Reference Voltage
9%
Multimeter
9%
Silicon on Insulator
9%
Pull-in Voltage
9%
Mechanical Stability
9%
Actuation
9%
Cryogenic Temperature
9%
Digital Systems
9%