MEMS-controlled paper-like transmissive flexible display

C.-Y. Lo, Olli-Heikki Huttunen, Johanna Hiitola-Keinänen, Jarno Petäjä, H. Fujita, H. Toshiyoshi

Research output: Contribution to journalArticleScientificpeer-review

35 Citations (Scopus)


A novel microelectromechanical-systems (MEMS)-controlled paper-like transmissive flexible display device was modeled by a combination of a cantilever with a flat plate and was realized by roll-to-roll printing process for the first time. This model provides predictions as well as improvement suggestions to both mechanical and electrical designs. A newly developed roll-to-roll printing process which was composed of flexography, gravure, lift-off, and lamination techniques used to manufacture this device was proved applicable on flexible electronics with high-volume, low-cost, and large-area solutions. This 20 V-driven device provided distinguishable three primary colors with averaged transmittance of 50% in visible region for full color flexible display applications and showed commercialization compatibility. Its electrical, mechanical, and optical characteristics excelled previous similar works. The proved major advantages of mechanical reliability, low operation voltage, and process simplicity done by this work made the MEMS flexible display an important alternative to electrophoretic, electrowetting, and electrochromic systems.
Original languageEnglish
Pages (from-to)410-418
Number of pages9
JournalJournal of Microelectromechanical Systems
Issue number2
Publication statusPublished - 2010
MoE publication typeA1 Journal article-refereed


  • electronic paper
  • Fabry-Perot
  • interferometer
  • microelectromechanical systems
  • MEMS
  • roll-to-roll

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