MEMS Fabry-Perot interferometer based spectral sensors for industrial applications

Anna Rissanen, Claudio Avila, Bin Guo, Uula Kantojärvi, Matti Tammi, Richard Bourne, Frans Muller

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    This presentation gives an overview of recent advances in the 1st- and 2nd generation MEMS FPI processes for near- and mid- infrared (NIR-MIR) wavelength sensing applications for automotive- and process industry. The measured values for the 1st generation NIR MEMS FPI devices for λ = 1.5 – 2.0 µm show FWHM = 15 nm at the optimization wavelength of 1750 nm. The 2nd generation MEMS process for produced devices for NIR λ = 1.9 – 2.5 µm (FWHM = 17nm) and MIR λ = 2.9 – 3.6 µm (FWHM = 22nm). A novel NIR sensor based on the 2nd generation MEMS FPI chips has been realized. The developed sensors are being validated for application in process control. Preliminary results show good signal levels, which allow following the status of esterification process.
    Original languageEnglish
    Title of host publicationImaging and Applied Optics, IAO 2017
    PublisherOptical Society of America OSA
    VolumePart F45-IAO 2017
    ISBN (Electronic)9781557528209
    ISBN (Print)978-1-943580-29-3
    DOIs
    Publication statusPublished - 1 Jan 2017
    MoE publication typeA4 Article in a conference publication
    EventImaging and Applied Optics, IAO 2017 - San Francisco, United States
    Duration: 26 Jun 201729 Jun 2017

    Conference

    ConferenceImaging and Applied Optics, IAO 2017
    Abbreviated titleIAO 2017
    CountryUnited States
    CitySan Francisco
    Period26/06/1729/06/17

    Fingerprint

    Fabry-Perot interferometers
    Industrial applications
    MEMS
    Full width at half maximum
    Sensors
    Wavelength
    Esterification
    Process control
    Infrared radiation
    Industry

    Keywords

    • Automotive
    • Fabry-Perot interferometer
    • Gas sensing
    • Microspectrometers
    • MOEMS
    • NIR - MIR

    Cite this

    Rissanen, A., Avila, C., Guo, B., Kantojärvi, U., Tammi, M., Bourne, R., & Muller, F. (2017). MEMS Fabry-Perot interferometer based spectral sensors for industrial applications. In Imaging and Applied Optics, IAO 2017 (Vol. Part F45-IAO 2017). [ATu1A.1] Optical Society of America OSA. https://doi.org/10.1364/AIO.2017.ATu1A.1
    Rissanen, Anna ; Avila, Claudio ; Guo, Bin ; Kantojärvi, Uula ; Tammi, Matti ; Bourne, Richard ; Muller, Frans. / MEMS Fabry-Perot interferometer based spectral sensors for industrial applications. Imaging and Applied Optics, IAO 2017. Vol. Part F45-IAO 2017 Optical Society of America OSA, 2017.
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    title = "MEMS Fabry-Perot interferometer based spectral sensors for industrial applications",
    abstract = "This presentation gives an overview of recent advances in the 1st- and 2nd generation MEMS FPI processes for near- and mid- infrared (NIR-MIR) wavelength sensing applications for automotive- and process industry. The measured values for the 1st generation NIR MEMS FPI devices for λ = 1.5 – 2.0 µm show FWHM = 15 nm at the optimization wavelength of 1750 nm. The 2nd generation MEMS process for produced devices for NIR λ = 1.9 – 2.5 µm (FWHM = 17nm) and MIR λ = 2.9 – 3.6 µm (FWHM = 22nm). A novel NIR sensor based on the 2nd generation MEMS FPI chips has been realized. The developed sensors are being validated for application in process control. Preliminary results show good signal levels, which allow following the status of esterification process.",
    keywords = "Automotive, Fabry-Perot interferometer, Gas sensing, Microspectrometers, MOEMS, NIR - MIR",
    author = "Anna Rissanen and Claudio Avila and Bin Guo and Uula Kantoj{\"a}rvi and Matti Tammi and Richard Bourne and Frans Muller",
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    Rissanen, A, Avila, C, Guo, B, Kantojärvi, U, Tammi, M, Bourne, R & Muller, F 2017, MEMS Fabry-Perot interferometer based spectral sensors for industrial applications. in Imaging and Applied Optics, IAO 2017. vol. Part F45-IAO 2017, ATu1A.1, Optical Society of America OSA, Imaging and Applied Optics, IAO 2017, San Francisco, United States, 26/06/17. https://doi.org/10.1364/AIO.2017.ATu1A.1

    MEMS Fabry-Perot interferometer based spectral sensors for industrial applications. / Rissanen, Anna; Avila, Claudio; Guo, Bin; Kantojärvi, Uula; Tammi, Matti; Bourne, Richard; Muller, Frans.

    Imaging and Applied Optics, IAO 2017. Vol. Part F45-IAO 2017 Optical Society of America OSA, 2017. ATu1A.1.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    AU - Tammi, Matti

    AU - Bourne, Richard

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    AB - This presentation gives an overview of recent advances in the 1st- and 2nd generation MEMS FPI processes for near- and mid- infrared (NIR-MIR) wavelength sensing applications for automotive- and process industry. The measured values for the 1st generation NIR MEMS FPI devices for λ = 1.5 – 2.0 µm show FWHM = 15 nm at the optimization wavelength of 1750 nm. The 2nd generation MEMS process for produced devices for NIR λ = 1.9 – 2.5 µm (FWHM = 17nm) and MIR λ = 2.9 – 3.6 µm (FWHM = 22nm). A novel NIR sensor based on the 2nd generation MEMS FPI chips has been realized. The developed sensors are being validated for application in process control. Preliminary results show good signal levels, which allow following the status of esterification process.

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    Rissanen A, Avila C, Guo B, Kantojärvi U, Tammi M, Bourne R et al. MEMS Fabry-Perot interferometer based spectral sensors for industrial applications. In Imaging and Applied Optics, IAO 2017. Vol. Part F45-IAO 2017. Optical Society of America OSA. 2017. ATu1A.1 https://doi.org/10.1364/AIO.2017.ATu1A.1