MEMS Fabry-Perot interferometer based spectral sensors for industrial applications

Anna Rissanen, Claudio Avila, Bin Guo, Uula Kantojärvi, Matti Tammi, Richard Bourne, Frans Muller

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

This presentation gives an overview of recent advances in the 1st- and 2nd generation MEMS FPI processes for near- and mid- infrared (NIR-MIR) wavelength sensing applications for automotive- and process industry. The measured values for the 1st generation NIR MEMS FPI devices for λ = 1.5 – 2.0 µm show FWHM = 15 nm at the optimization wavelength of 1750 nm. The 2nd generation MEMS process for produced devices for NIR λ = 1.9 – 2.5 µm (FWHM = 17nm) and MIR λ = 2.9 – 3.6 µm (FWHM = 22nm). A novel NIR sensor based on the 2nd generation MEMS FPI chips has been realized. The developed sensors are being validated for application in process control. Preliminary results show good signal levels, which allow following the status of esterification process.
Original languageEnglish
Title of host publicationImaging and Applied Optics, IAO 2017
PublisherOptical Society of America OSA
VolumePart F45-IAO 2017
ISBN (Electronic)9781557528209
ISBN (Print)978-1-943580-29-3
DOIs
Publication statusPublished - 1 Jan 2017
MoE publication typeA4 Article in a conference publication
EventImaging and Applied Optics, IAO 2017 - San Francisco, United States
Duration: 26 Jun 201729 Jun 2017

Conference

ConferenceImaging and Applied Optics, IAO 2017
Abbreviated titleIAO 2017
CountryUnited States
CitySan Francisco
Period26/06/1729/06/17

Fingerprint

Fabry-Perot interferometers
Industrial applications
MEMS
Full width at half maximum
Sensors
Wavelength
Esterification
Process control
Infrared radiation
Industry

Keywords

  • Automotive
  • Fabry-Perot interferometer
  • Gas sensing
  • Microspectrometers
  • MOEMS
  • NIR - MIR

Cite this

Rissanen, A., Avila, C., Guo, B., Kantojärvi, U., Tammi, M., Bourne, R., & Muller, F. (2017). MEMS Fabry-Perot interferometer based spectral sensors for industrial applications. In Imaging and Applied Optics, IAO 2017 (Vol. Part F45-IAO 2017). [ATu1A.1] Optical Society of America OSA. https://doi.org/10.1364/AIO.2017.ATu1A.1
Rissanen, Anna ; Avila, Claudio ; Guo, Bin ; Kantojärvi, Uula ; Tammi, Matti ; Bourne, Richard ; Muller, Frans. / MEMS Fabry-Perot interferometer based spectral sensors for industrial applications. Imaging and Applied Optics, IAO 2017. Vol. Part F45-IAO 2017 Optical Society of America OSA, 2017.
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abstract = "This presentation gives an overview of recent advances in the 1st- and 2nd generation MEMS FPI processes for near- and mid- infrared (NIR-MIR) wavelength sensing applications for automotive- and process industry. The measured values for the 1st generation NIR MEMS FPI devices for λ = 1.5 – 2.0 µm show FWHM = 15 nm at the optimization wavelength of 1750 nm. The 2nd generation MEMS process for produced devices for NIR λ = 1.9 – 2.5 µm (FWHM = 17nm) and MIR λ = 2.9 – 3.6 µm (FWHM = 22nm). A novel NIR sensor based on the 2nd generation MEMS FPI chips has been realized. The developed sensors are being validated for application in process control. Preliminary results show good signal levels, which allow following the status of esterification process.",
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Rissanen, A, Avila, C, Guo, B, Kantojärvi, U, Tammi, M, Bourne, R & Muller, F 2017, MEMS Fabry-Perot interferometer based spectral sensors for industrial applications. in Imaging and Applied Optics, IAO 2017. vol. Part F45-IAO 2017, ATu1A.1, Optical Society of America OSA, Imaging and Applied Optics, IAO 2017, San Francisco, United States, 26/06/17. https://doi.org/10.1364/AIO.2017.ATu1A.1

MEMS Fabry-Perot interferometer based spectral sensors for industrial applications. / Rissanen, Anna; Avila, Claudio; Guo, Bin; Kantojärvi, Uula; Tammi, Matti; Bourne, Richard; Muller, Frans.

Imaging and Applied Optics, IAO 2017. Vol. Part F45-IAO 2017 Optical Society of America OSA, 2017. ATu1A.1.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Rissanen A, Avila C, Guo B, Kantojärvi U, Tammi M, Bourne R et al. MEMS Fabry-Perot interferometer based spectral sensors for industrial applications. In Imaging and Applied Optics, IAO 2017. Vol. Part F45-IAO 2017. Optical Society of America OSA. 2017. ATu1A.1 https://doi.org/10.1364/AIO.2017.ATu1A.1