MEMS Fabry-Perot interferometer based spectral sensors for industrial applications

Anna Rissanen, Claudio Avila, Bin Guo, Uula Kantojärvi, Matti Tammi, Richard Bourne, Frans Muller

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    Chemical Compounds

    Engineering & Materials Science