Abstract
VTT Technical research centre of Finland has developed a
MEMS Fabry-Perot interferometer (FPI) for the wavelength
range from 7.5 ?m to 9.5 ?m. The device consists of two
Distributed Bragg Reflectors (DBR) manufactured with MEMS
processing techniques. The full width half maximum of the
transmission peak is 150nm. This transmission peak can be
tuned from 7.5 ?m to 9.5 ?m by applying a control voltage
from 0 V to 30 V. A laboratory demonstrator has been put
together to show the use of this module as a part of a
spectral measurement setup. Several gas samples have been
measured with the setup and compared against measurement
results found in literature
| Original language | English |
|---|---|
| Title of host publication | Proceedings |
| Subtitle of host publication | SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U |
| Publisher | International Society for Optics and Photonics SPIE |
| Number of pages | 8 |
| ISBN (Print) | 978-0-8194-9890-8 |
| DOIs | |
| Publication status | Published - 2014 |
| MoE publication type | A4 Article in a conference publication |
| Event | SPIE Photonics West 2014 - San Francisco, United States Duration: 1 Feb 2014 → 6 Feb 2014 |
Conference
| Conference | SPIE Photonics West 2014 |
|---|---|
| Country | United States |
| City | San Francisco |
| Period | 1/02/14 → 6/02/14 |
Keywords
- MEMS
- Fabry-Perot interferometer
- spectroscopy
- gas measurement
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Cite this
Mäkynen, J., Tuohiniemi, M., Näsilä, A., Mannila, R., & Antila, J. (2014). MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range. In Proceedings: SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U International Society for Optics and Photonics SPIE. https://doi.org/10.1117/12.2036272