Abstract
| Original language | English |
|---|---|
| Title of host publication | Proceedings |
| Subtitle of host publication | SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U |
| Publisher | International Society for Optics and Photonics SPIE |
| Number of pages | 8 |
| ISBN (Print) | 978-0-8194-9890-8 |
| DOIs | |
| Publication status | Published - 2014 |
| MoE publication type | A4 Article in a conference publication |
| Event | SPIE Photonics West 2014 - San Francisco, United States Duration: 1 Feb 2014 → 6 Feb 2014 |
Conference
| Conference | SPIE Photonics West 2014 |
|---|---|
| Country | United States |
| City | San Francisco |
| Period | 1/02/14 → 6/02/14 |
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Keywords
- MEMS
- Fabry-Perot interferometer
- spectroscopy
- gas measurement
Cite this
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MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range. / Mäkynen, Jussi; Tuohiniemi, Mikko; Näsilä, Antti; Mannila, Rami; Antila, Jarkko.
Proceedings: SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U. International Society for Optics and Photonics SPIE, 2014.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
TY - GEN
T1 - MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range
AU - Mäkynen, Jussi
AU - Tuohiniemi, Mikko
AU - Näsilä, Antti
AU - Mannila, Rami
AU - Antila, Jarkko
N1 - Project code: 75293
PY - 2014
Y1 - 2014
N2 - VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 ?m to 9.5 ?m. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 ?m to 9.5 ?m by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature
AB - VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 ?m to 9.5 ?m. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 ?m to 9.5 ?m by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature
KW - MEMS
KW - Fabry-Perot interferometer
KW - spectroscopy
KW - gas measurement
U2 - 10.1117/12.2036272
DO - 10.1117/12.2036272
M3 - Conference article in proceedings
SN - 978-0-8194-9890-8
BT - Proceedings
PB - International Society for Optics and Photonics SPIE
ER -