MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range

Jussi Mäkynen, Mikko Tuohiniemi, Antti Näsilä, Rami Mannila, Jarkko Antila

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

5 Citations (Scopus)

Abstract

VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 ?m to 9.5 ?m. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 ?m to 9.5 ?m by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationSPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U
PublisherInternational Society for Optics and Photonics SPIE
Number of pages8
ISBN (Print)978-0-8194-9890-8
DOIs
Publication statusPublished - 2014
MoE publication typeA4 Article in a conference publication
EventSPIE Photonics West 2014 - San Francisco, United States
Duration: 1 Feb 20146 Feb 2014

Conference

ConferenceSPIE Photonics West 2014
CountryUnited States
CitySan Francisco
Period1/02/146/02/14

Fingerprint

Fabry-Perot interferometers
microelectromechanical systems
spectrometers
Finland
Bragg reflectors
wavelengths
modules
electric potential
gases

Keywords

  • MEMS
  • Fabry-Perot interferometer
  • spectroscopy
  • gas measurement

Cite this

Mäkynen, J., Tuohiniemi, M., Näsilä, A., Mannila, R., & Antila, J. (2014). MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range. In Proceedings: SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U International Society for Optics and Photonics SPIE. https://doi.org/10.1117/12.2036272
Mäkynen, Jussi ; Tuohiniemi, Mikko ; Näsilä, Antti ; Mannila, Rami ; Antila, Jarkko. / MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range. Proceedings: SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U. International Society for Optics and Photonics SPIE, 2014.
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abstract = "VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 ?m to 9.5 ?m. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 ?m to 9.5 ?m by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature",
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Mäkynen, J, Tuohiniemi, M, Näsilä, A, Mannila, R & Antila, J 2014, MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range. in Proceedings: SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U. International Society for Optics and Photonics SPIE, SPIE Photonics West 2014, San Francisco, United States, 1/02/14. https://doi.org/10.1117/12.2036272

MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range. / Mäkynen, Jussi; Tuohiniemi, Mikko; Näsilä, Antti; Mannila, Rami; Antila, Jarkko.

Proceedings: SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U. International Society for Optics and Photonics SPIE, 2014.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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N2 - VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 ?m to 9.5 ?m. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 ?m to 9.5 ?m by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature

AB - VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 ?m to 9.5 ?m. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 ?m to 9.5 ?m by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature

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Mäkynen J, Tuohiniemi M, Näsilä A, Mannila R, Antila J. MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range. In Proceedings: SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U. International Society for Optics and Photonics SPIE. 2014 https://doi.org/10.1117/12.2036272