@inproceedings{aab1df78ec1a46d2b78b73b8867acca6,
title = "MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range",
abstract = "VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 ?m to 9.5 ?m. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 ?m to 9.5 ?m by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature",
keywords = "MEMS, Fabry-Perot interferometer, spectroscopy, gas measurement",
author = "M{\"a}kynen, {Jussi H.} and Mikko Tuohiniemi and Antti N{\"a}sil{\"a} and Rami Mannila and Antila, {Jarkko E.}",
note = "Project code: 75293; SPIE Photonics West 2014 ; Conference date: 01-02-2014 Through 06-02-2014",
year = "2014",
doi = "10.1117/12.2036272",
language = "English",
isbn = "978-0-8194-9890-8 ",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
editor = "Wibool Piyawattanametha and Yong-Hwa Park",
booktitle = "MOEMS and Miniaturized Systems XIII",
address = "United States",
}