MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range

Jussi Mäkynen; Mikko Tuohiniemi; Antti Näsilä; Rami Mannila; Jarkko Antila

doi:10.1117/12.2036272

MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range

Jussi Mäkynen, Mikko Tuohiniemi, Antti Näsilä, Rami Mannila, Jarkko Antila

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

5 Citations (Scopus)

Abstract

VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 ?m to 9.5 ?m. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 ?m to 9.5 ?m by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature

Original language	English
Title of host publication	Proceedings
Subtitle of host publication	SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U
Publisher	International Society for Optics and Photonics SPIE
Number of pages	8
ISBN (Print)	978-0-8194-9890-8
DOIs	https://doi.org/10.1117/12.2036272
Publication status	Published - 2014
MoE publication type	A4 Article in a conference publication
Event	SPIE Photonics West 2014 - San Francisco, United States Duration: 1 Feb 2014 → 6 Feb 2014

Conference

Conference	SPIE Photonics West 2014
Country	United States
City	San Francisco
Period	1/02/14 → 6/02/14

Keywords

MEMS
Fabry-Perot interferometer
spectroscopy
gas measurement

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@inproceedings{aab1df78ec1a46d2b78b73b8867acca6,

title = "MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range",

abstract = "VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 ?m to 9.5 ?m. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 ?m to 9.5 ?m by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature",

keywords = "MEMS, Fabry-Perot interferometer, spectroscopy, gas measurement",

author = "Jussi M{\"a}kynen and Mikko Tuohiniemi and Antti N{\"a}sil{\"a} and Rami Mannila and Jarkko Antila",

note = "Project code: 75293; SPIE Photonics West 2014 ; Conference date: 01-02-2014 Through 06-02-2014",

year = "2014",

doi = "10.1117/12.2036272",

language = "English",

isbn = "978-0-8194-9890-8 ",

booktitle = "Proceedings",

publisher = "International Society for Optics and Photonics SPIE",

address = "United States",

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Mäkynen, J, Tuohiniemi, M, Näsilä, A , Mannila, R & Antila, J 2014, MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range. in Proceedings: SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U. International Society for Optics and Photonics SPIE, SPIE Photonics West 2014, San Francisco, United States, 1/02/14. https://doi.org/10.1117/12.2036272

MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range. / Mäkynen, Jussi; Tuohiniemi, Mikko; Näsilä, Antti ; Mannila, Rami; Antila, Jarkko.

Proceedings: SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U. International Society for Optics and Photonics SPIE, 2014.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range

AU - Mäkynen, Jussi

AU - Tuohiniemi, Mikko

AU - Näsilä, Antti

AU - Mannila, Rami

AU - Antila, Jarkko

N1 - Project code: 75293

PY - 2014

Y1 - 2014

N2 - VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 ?m to 9.5 ?m. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 ?m to 9.5 ?m by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature

AB - VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 ?m to 9.5 ?m. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 ?m to 9.5 ?m by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature

KW - MEMS

KW - Fabry-Perot interferometer

KW - spectroscopy

KW - gas measurement

U2 - 10.1117/12.2036272

DO - 10.1117/12.2036272

M3 - Conference article in proceedings

SN - 978-0-8194-9890-8

BT - Proceedings

PB - International Society for Optics and Photonics SPIE

T2 - SPIE Photonics West 2014

Y2 - 1 February 2014 through 6 February 2014

ER -