MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range

Jussi Mäkynen, Mikko Tuohiniemi, Antti Näsilä, Rami Mannila, Jarkko Antila

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    5 Citations (Scopus)

    Abstract

    VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 ?m to 9.5 ?m. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 ?m to 9.5 ?m by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publicationSPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U
    PublisherInternational Society for Optics and Photonics SPIE
    Number of pages8
    ISBN (Print)978-0-8194-9890-8
    DOIs
    Publication statusPublished - 2014
    MoE publication typeA4 Article in a conference publication
    EventSPIE Photonics West 2014 - San Francisco, United States
    Duration: 1 Feb 20146 Feb 2014

    Conference

    ConferenceSPIE Photonics West 2014
    CountryUnited States
    CitySan Francisco
    Period1/02/146/02/14

    Keywords

    • MEMS
    • Fabry-Perot interferometer
    • spectroscopy
    • gas measurement

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  • Cite this

    Mäkynen, J., Tuohiniemi, M., Näsilä, A., Mannila, R., & Antila, J. (2014). MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range. In Proceedings: SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U International Society for Optics and Photonics SPIE. https://doi.org/10.1117/12.2036272