MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range

Jussi Mäkynen, Mikko Tuohiniemi, Antti Näsilä, Rami Mannila, Jarkko Antila

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    5 Citations (Scopus)

    Abstract

    VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 ?m to 9.5 ?m. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 ?m to 9.5 ?m by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publicationSPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U
    PublisherInternational Society for Optics and Photonics SPIE
    Number of pages8
    ISBN (Print)978-0-8194-9890-8
    DOIs
    Publication statusPublished - 2014
    MoE publication typeA4 Article in a conference publication
    EventSPIE Photonics West 2014 - San Francisco, United States
    Duration: 1 Feb 20146 Feb 2014

    Conference

    ConferenceSPIE Photonics West 2014
    CountryUnited States
    CitySan Francisco
    Period1/02/146/02/14

    Fingerprint

    Fabry-Perot interferometers
    microelectromechanical systems
    spectrometers
    Finland
    Bragg reflectors
    wavelengths
    modules
    electric potential
    gases

    Keywords

    • MEMS
    • Fabry-Perot interferometer
    • spectroscopy
    • gas measurement

    Cite this

    Mäkynen, J., Tuohiniemi, M., Näsilä, A., Mannila, R., & Antila, J. (2014). MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range. In Proceedings: SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U International Society for Optics and Photonics SPIE. https://doi.org/10.1117/12.2036272
    Mäkynen, Jussi ; Tuohiniemi, Mikko ; Näsilä, Antti ; Mannila, Rami ; Antila, Jarkko. / MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range. Proceedings: SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U. International Society for Optics and Photonics SPIE, 2014.
    @inproceedings{aab1df78ec1a46d2b78b73b8867acca6,
    title = "MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range",
    abstract = "VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 ?m to 9.5 ?m. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 ?m to 9.5 ?m by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature",
    keywords = "MEMS, Fabry-Perot interferometer, spectroscopy, gas measurement",
    author = "Jussi M{\"a}kynen and Mikko Tuohiniemi and Antti N{\"a}sil{\"a} and Rami Mannila and Jarkko Antila",
    note = "Project code: 75293",
    year = "2014",
    doi = "10.1117/12.2036272",
    language = "English",
    isbn = "978-0-8194-9890-8",
    booktitle = "Proceedings",
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    Mäkynen, J, Tuohiniemi, M, Näsilä, A, Mannila, R & Antila, J 2014, MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range. in Proceedings: SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U. International Society for Optics and Photonics SPIE, SPIE Photonics West 2014, San Francisco, United States, 1/02/14. https://doi.org/10.1117/12.2036272

    MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range. / Mäkynen, Jussi; Tuohiniemi, Mikko; Näsilä, Antti; Mannila, Rami; Antila, Jarkko.

    Proceedings: SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U. International Society for Optics and Photonics SPIE, 2014.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    AU - Mäkynen, Jussi

    AU - Tuohiniemi, Mikko

    AU - Näsilä, Antti

    AU - Mannila, Rami

    AU - Antila, Jarkko

    N1 - Project code: 75293

    PY - 2014

    Y1 - 2014

    N2 - VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 ?m to 9.5 ?m. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 ?m to 9.5 ?m by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature

    AB - VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 ?m to 9.5 ?m. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 ?m to 9.5 ?m by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature

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    KW - Fabry-Perot interferometer

    KW - spectroscopy

    KW - gas measurement

    U2 - 10.1117/12.2036272

    DO - 10.1117/12.2036272

    M3 - Conference article in proceedings

    SN - 978-0-8194-9890-8

    BT - Proceedings

    PB - International Society for Optics and Photonics SPIE

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    Mäkynen J, Tuohiniemi M, Näsilä A, Mannila R, Antila J. MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range. In Proceedings: SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770U. International Society for Optics and Photonics SPIE. 2014 https://doi.org/10.1117/12.2036272