MEMS Fabry-Perot interferometer with Si-air mirrors for mid-and thermal infrared

Mikko Tuohiniemi, Antti Näsilä, Altti Akujärvi

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)

Abstract

We studied how a surface-micromachined Fabry-Perot interferometer, realized with Si/air-gap distributed Bragg reflectors, would perform at the middle-infrared wavelengths. Compared with traditional solid-film pairs, this Si-FPI technology features better index contrast, which enables wider stop band and potentially higher resolution. Four different designs of interferometers were prepared and compared. Two designs apply the solid-film reflectors of Si/SiO2 structure. Their data is exploited as a reference of a middle-infrared interferometer and, as a template for mapping the performance from the simulation results to the measured data. The third design operates at the thermal infrared and it was our first embodiment with the Si/air-gap mirrors. The performance, reported earlier, is here referred to for estimating the technology scalability down to shorter wavelengths. Finally, we realized a non-tunable proof-of-concept version of the Si/air-gap technology for middle infrared. The measured data is mapped into an estimate of the achievable performance of a tunable version. We present the transmission and resolution data and argument the simulation models that reproduce the data. The prediction for the tunable middle-infrared Si-FPI is then presented. The results indicate that such a device is expected to have two-fold better resolution and a clearly wider stop band, compared with the prior art.
Original languageEnglish
Title of host publicationProceedings of SPIE
Subtitle of host publicationVolume 8977, MOEMS and Miniaturized Systems XIII, 2014
PublisherInternational Society for Optics and Photonics SPIE
Number of pages10
ISBN (Print)978-081949890-8
DOIs
Publication statusPublished - 2014
MoE publication typeA4 Article in a conference publication
EventMOEMS and Miniaturized Systems XIII - San Francisco, CA, United States
Duration: 3 Feb 20146 Feb 2014

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume8977
ISSN (Print)0277-786X

Conference

ConferenceMOEMS and Miniaturized Systems XIII
CountryUnited States
CitySan Francisco, CA
Period3/02/146/02/14

Fingerprint

Fabry-Perot interferometers
microelectromechanical systems
mirrors
air
infrared interferometers
broadband
arts
Bragg reflectors
wavelengths
reflectors
estimating
templates
interferometers
simulation
high resolution
estimates
predictions

Keywords

  • Fabry-Perot interferometers
  • microelectromechanical systems
  • mirrors
  • interferometers
  • simulations
  • reflectors
  • distributed Bragg reflectors

Cite this

Tuohiniemi, M., Näsilä, A., & Akujärvi, A. (2014). MEMS Fabry-Perot interferometer with Si-air mirrors for mid-and thermal infrared. In Proceedings of SPIE: Volume 8977, MOEMS and Miniaturized Systems XIII, 2014 [89770G] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 8977 https://doi.org/10.1117/12.2037915
Tuohiniemi, Mikko ; Näsilä, Antti ; Akujärvi, Altti. / MEMS Fabry-Perot interferometer with Si-air mirrors for mid-and thermal infrared. Proceedings of SPIE: Volume 8977, MOEMS and Miniaturized Systems XIII, 2014. International Society for Optics and Photonics SPIE, 2014. (Proceedings of SPIE, Vol. 8977).
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abstract = "We studied how a surface-micromachined Fabry-Perot interferometer, realized with Si/air-gap distributed Bragg reflectors, would perform at the middle-infrared wavelengths. Compared with traditional solid-film pairs, this Si-FPI technology features better index contrast, which enables wider stop band and potentially higher resolution. Four different designs of interferometers were prepared and compared. Two designs apply the solid-film reflectors of Si/SiO2 structure. Their data is exploited as a reference of a middle-infrared interferometer and, as a template for mapping the performance from the simulation results to the measured data. The third design operates at the thermal infrared and it was our first embodiment with the Si/air-gap mirrors. The performance, reported earlier, is here referred to for estimating the technology scalability down to shorter wavelengths. Finally, we realized a non-tunable proof-of-concept version of the Si/air-gap technology for middle infrared. The measured data is mapped into an estimate of the achievable performance of a tunable version. We present the transmission and resolution data and argument the simulation models that reproduce the data. The prediction for the tunable middle-infrared Si-FPI is then presented. The results indicate that such a device is expected to have two-fold better resolution and a clearly wider stop band, compared with the prior art.",
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Tuohiniemi, M, Näsilä, A & Akujärvi, A 2014, MEMS Fabry-Perot interferometer with Si-air mirrors for mid-and thermal infrared. in Proceedings of SPIE: Volume 8977, MOEMS and Miniaturized Systems XIII, 2014., 89770G, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 8977, MOEMS and Miniaturized Systems XIII, San Francisco, CA, United States, 3/02/14. https://doi.org/10.1117/12.2037915

MEMS Fabry-Perot interferometer with Si-air mirrors for mid-and thermal infrared. / Tuohiniemi, Mikko; Näsilä, Antti; Akujärvi, Altti.

Proceedings of SPIE: Volume 8977, MOEMS and Miniaturized Systems XIII, 2014. International Society for Optics and Photonics SPIE, 2014. 89770G (Proceedings of SPIE, Vol. 8977).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AB - We studied how a surface-micromachined Fabry-Perot interferometer, realized with Si/air-gap distributed Bragg reflectors, would perform at the middle-infrared wavelengths. Compared with traditional solid-film pairs, this Si-FPI technology features better index contrast, which enables wider stop band and potentially higher resolution. Four different designs of interferometers were prepared and compared. Two designs apply the solid-film reflectors of Si/SiO2 structure. Their data is exploited as a reference of a middle-infrared interferometer and, as a template for mapping the performance from the simulation results to the measured data. The third design operates at the thermal infrared and it was our first embodiment with the Si/air-gap mirrors. The performance, reported earlier, is here referred to for estimating the technology scalability down to shorter wavelengths. Finally, we realized a non-tunable proof-of-concept version of the Si/air-gap technology for middle infrared. The measured data is mapped into an estimate of the achievable performance of a tunable version. We present the transmission and resolution data and argument the simulation models that reproduce the data. The prediction for the tunable middle-infrared Si-FPI is then presented. The results indicate that such a device is expected to have two-fold better resolution and a clearly wider stop band, compared with the prior art.

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BT - Proceedings of SPIE

PB - International Society for Optics and Photonics SPIE

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Tuohiniemi M, Näsilä A, Akujärvi A. MEMS Fabry-Perot interferometer with Si-air mirrors for mid-and thermal infrared. In Proceedings of SPIE: Volume 8977, MOEMS and Miniaturized Systems XIII, 2014. International Society for Optics and Photonics SPIE. 2014. 89770G. (Proceedings of SPIE, Vol. 8977). https://doi.org/10.1117/12.2037915