MEMS Fabry-Perot interferometer with Si-air mirrors for mid-and thermal infrared

Mikko Tuohiniemi, Antti Näsilä, Altti Akujärvi

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)


    We studied how a surface-micromachined Fabry-Perot interferometer, realized with Si/air-gap distributed Bragg reflectors, would perform at the middle-infrared wavelengths. Compared with traditional solid-film pairs, this Si-FPI technology features better index contrast, which enables wider stop band and potentially higher resolution. Four different designs of interferometers were prepared and compared. Two designs apply the solid-film reflectors of Si/SiO2 structure. Their data is exploited as a reference of a middle-infrared interferometer and, as a template for mapping the performance from the simulation results to the measured data. The third design operates at the thermal infrared and it was our first embodiment with the Si/air-gap mirrors. The performance, reported earlier, is here referred to for estimating the technology scalability down to shorter wavelengths. Finally, we realized a non-tunable proof-of-concept version of the Si/air-gap technology for middle infrared. The measured data is mapped into an estimate of the achievable performance of a tunable version. We present the transmission and resolution data and argument the simulation models that reproduce the data. The prediction for the tunable middle-infrared Si-FPI is then presented. The results indicate that such a device is expected to have two-fold better resolution and a clearly wider stop band, compared with the prior art.
    Original languageEnglish
    Title of host publicationProceedings of SPIE
    Subtitle of host publicationVolume 8977, MOEMS and Miniaturized Systems XIII, 2014
    PublisherInternational Society for Optics and Photonics SPIE
    Number of pages10
    ISBN (Print)978-081949890-8
    Publication statusPublished - 2014
    MoE publication typeA4 Article in a conference publication
    EventMOEMS and Miniaturized Systems XIII - San Francisco, CA, United States
    Duration: 3 Feb 20146 Feb 2014

    Publication series

    SeriesProceedings of SPIE


    ConferenceMOEMS and Miniaturized Systems XIII
    Country/TerritoryUnited States
    CitySan Francisco, CA


    • Fabry-Perot interferometers
    • microelectromechanical systems
    • mirrors
    • interferometers
    • simulations
    • reflectors
    • distributed Bragg reflectors


    Dive into the research topics of 'MEMS Fabry-Perot interferometer with Si-air mirrors for mid-and thermal infrared'. Together they form a unique fingerprint.

    Cite this