MEMS Fabry-Perot interferometer with Si-air mirrors for mid-and thermal infrared

Mikko Tuohiniemi, Antti Näsilä, Altti Akujärvi

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    2 Citations (Scopus)


    We studied how a surface-micromachined Fabry-Perot interferometer, realized with Si/air-gap distributed Bragg reflectors, would perform at the middle-infrared wavelengths. Compared with traditional solid-film pairs, this Si-FPI technology features better index contrast, which enables wider stop band and potentially higher resolution. Four different designs of interferometers were prepared and compared. Two designs apply the solid-film reflectors of Si/SiO2 structure. Their data is exploited as a reference of a middle-infrared interferometer and, as a template for mapping the performance from the simulation results to the measured data. The third design operates at the thermal infrared and it was our first embodiment with the Si/air-gap mirrors. The performance, reported earlier, is here referred to for estimating the technology scalability down to shorter wavelengths. Finally, we realized a non-tunable proof-of-concept version of the Si/air-gap technology for middle infrared. The measured data is mapped into an estimate of the achievable performance of a tunable version. We present the transmission and resolution data and argument the simulation models that reproduce the data. The prediction for the tunable middle-infrared Si-FPI is then presented. The results indicate that such a device is expected to have two-fold better resolution and a clearly wider stop band, compared with the prior art.
    Original languageEnglish
    Title of host publicationMOEMS and Miniaturized Systems XIII
    EditorsWibool Piyawattanametha, Yong-Hwa Park
    PublisherInternational Society for Optics and Photonics SPIE
    Number of pages10
    ISBN (Print)978-0-8194-9890-8
    Publication statusPublished - 2014
    MoE publication typeA4 Article in a conference publication
    EventMOEMS and Miniaturized Systems XIII - San Francisco, CA, United States
    Duration: 3 Feb 20146 Feb 2014

    Publication series

    SeriesProceedings of SPIE


    ConferenceMOEMS and Miniaturized Systems XIII
    Country/TerritoryUnited States
    CitySan Francisco, CA


    • Fabry-Perot interferometers
    • microelectromechanical systems
    • mirrors
    • interferometers
    • simulations
    • reflectors
    • distributed Bragg reflectors


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