Original language | Finnish |
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Pages (from-to) | 40-41 |
Journal | Prosessori |
Issue number | 2 |
Publication status | Published - 2005 |
MoE publication type | D1 Article in a trade journal |
MEMS-kulut kuriin
Kimmo Henttinen, Suni, Antti Lipsanen, Ismo Luusua, Markku Ylilammi, Hannu Kattelus
Research output: Contribution to journal › Article › Professional