MEMS, MOEMS, RF-MEMS and photonics packaging based on LTCC technology

Pentti Karioja, Kari Kautio, Jyrki Ollila, Kimmo Keränen, Mikko Karppinen, Veli Heikkinen, Tuomo Jaakola, Markku Lahti

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    7 Citations (Scopus)

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    INIS

    Engineering

    Material Science