Fingerprint
Dive into the research topics of 'MEMS on cavity-SOI wafers'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
MEMS on cavity-SOI wafers
Hannu Luoto, Kimmo Henttinen (Corresponding Author), Tommi Suni, James Dekker, Jari Mäkinen, Altti Torkkeli
Research output: Contribution to journal › Article › Scientific › peer-review
30
Citations
(Scopus)