Mems packaging using precision machined LTCC substrates

Veli Heikkinen, Janne Aikio, Teemu Alajoki, Jussi Hiltunen, Mattila Antti-Jussi, Jyrki Ollila, Pentti Karioja

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMS
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages81-82
ISBN (Print)0-7803-7830-X
DOIs
Publication statusPublished - 2003
MoE publication typeA4 Article in a conference publication
EventInternational Conference on Optical MEMS, MOEMS 2003 - Waikoloa, United States
Duration: 18 Aug 200321 Aug 2003

Conference

ConferenceInternational Conference on Optical MEMS, MOEMS 2003
Abbreviated titleMOEMS 2003
CountryUnited States
CityWaikoloa
Period18/08/0321/08/03

Keywords

  • micromechanical devices
  • optical surface waves
  • micromaching
  • MEMS packaging
  • LTCC substrates

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