@inproceedings{092c52eba99c4290b64e79fa15f20cde,
title = "Mems packaging using precision machined LTCC substrates",
keywords = "micromechanical devices, optical surface waves, micromaching, MEMS packaging, LTCC substrates",
author = "Veli Heikkinen and Janne Aikio and Teemu Alajoki and Jussi Hiltunen and Mattila Antti-Jussi and Jyrki Ollila and Pentti Karioja",
year = "2003",
doi = "10.1109/OMEMS.2003.1233477",
language = "English",
isbn = "0-7803-7830-X",
pages = "81--82",
booktitle = "IEEE/LEOS International Conference on Optical MEMS",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
address = "United States",
note = "International Conference on Optical MEMS, MOEMS 2003, MOEMS 2003 ; Conference date: 18-08-2003 Through 21-08-2003",
}