Mems packaging using precision machined LTCC substrates

Veli Heikkinen; Janne Aikio; Teemu Alajoki; Jussi Hiltunen; Mattila Antti-Jussi; Jyrki Ollila; Pentti Karioja

doi:10.1109/OMEMS.2003.1233477

Mems packaging using precision machined LTCC substrates

Veli Heikkinen, Janne Aikio, Teemu Alajoki, Jussi Hiltunen, Mattila Antti-Jussi, Jyrki Ollila, Pentti Karioja

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

1 Citation (Scopus)

Abstract

The use of low-temperature co-fired ceramic (LTCC) substrate as a wiring board for a silicon surface micromachined Fabry-Perot interferometer (FPI) device is presented. FPI is an electrically controlled optical bandpass filter that is widely used in spectroscopy. In this paper, the FPI device is applied to demonstrate a wavelength tunable diode laser in an external cavity configuration.

Original language	English
Title of host publication	IEEE/LEOS International Conference on Optical MEMS (MOEMS 2003)
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	81-82
ISBN (Print)	978-0-7803-7830-8
DOIs	https://doi.org/10.1109/OMEMS.2003.1233477
Publication status	Published - 2003
MoE publication type	A4 Article in a conference publication
Event	International Conference on Optical MEMS, MOEMS 2003 - Waikoloa, United States Duration: 18 Aug 2003 → 21 Aug 2003

Conference

Conference	International Conference on Optical MEMS, MOEMS 2003
Abbreviated title	MOEMS 2003
Country/Territory	United States
City	Waikoloa
Period	18/08/03 → 21/08/03

Keywords

micromechanical devices
optical surface waves
micromaching
MEMS packaging
LTCC substrates

Access to Document

10.1109/OMEMS.2003.1233477

Cite this

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title = "Mems packaging using precision machined LTCC substrates",

abstract = "The use of low-temperature co-fired ceramic (LTCC) substrate as a wiring board for a silicon surface micromachined Fabry-Perot interferometer (FPI) device is presented. FPI is an electrically controlled optical bandpass filter that is widely used in spectroscopy. In this paper, the FPI device is applied to demonstrate a wavelength tunable diode laser in an external cavity configuration.",

keywords = "micromechanical devices, optical surface waves, micromaching, MEMS packaging, LTCC substrates",

author = "Veli Heikkinen and Janne Aikio and Teemu Alajoki and Jussi Hiltunen and Mattila Antti-Jussi and Jyrki Ollila and Pentti Karioja",

year = "2003",

doi = "10.1109/OMEMS.2003.1233477",

language = "English",

isbn = "978-0-7803-7830-8",

pages = "81--82",

booktitle = "IEEE/LEOS International Conference on Optical MEMS (MOEMS 2003)",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "International Conference on Optical MEMS, MOEMS 2003, MOEMS 2003 ; Conference date: 18-08-2003 Through 21-08-2003",

}

Heikkinen, V, Aikio, J, Alajoki, T , Hiltunen, J, Antti-Jussi, M, Ollila, J & Karioja, P 2003, Mems packaging using precision machined LTCC substrates. in IEEE/LEOS International Conference on Optical MEMS (MOEMS 2003). IEEE Institute of Electrical and Electronic Engineers, pp. 81-82, International Conference on Optical MEMS, MOEMS 2003, Waikoloa, Hawaii, United States, 18/08/03. https://doi.org/10.1109/OMEMS.2003.1233477

Mems packaging using precision machined LTCC substrates. / Heikkinen, Veli; Aikio, Janne; Alajoki, Teemu et al.
IEEE/LEOS International Conference on Optical MEMS (MOEMS 2003). IEEE Institute of Electrical and Electronic Engineers, 2003. p. 81-82.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Mems packaging using precision machined LTCC substrates

AU - Heikkinen, Veli

AU - Aikio, Janne

AU - Alajoki, Teemu

AU - Hiltunen, Jussi

AU - Antti-Jussi, Mattila

AU - Ollila, Jyrki

AU - Karioja, Pentti

PY - 2003

Y1 - 2003

N2 - The use of low-temperature co-fired ceramic (LTCC) substrate as a wiring board for a silicon surface micromachined Fabry-Perot interferometer (FPI) device is presented. FPI is an electrically controlled optical bandpass filter that is widely used in spectroscopy. In this paper, the FPI device is applied to demonstrate a wavelength tunable diode laser in an external cavity configuration.

AB - The use of low-temperature co-fired ceramic (LTCC) substrate as a wiring board for a silicon surface micromachined Fabry-Perot interferometer (FPI) device is presented. FPI is an electrically controlled optical bandpass filter that is widely used in spectroscopy. In this paper, the FPI device is applied to demonstrate a wavelength tunable diode laser in an external cavity configuration.

KW - micromechanical devices

KW - optical surface waves

KW - micromaching

KW - MEMS packaging

KW - LTCC substrates

U2 - 10.1109/OMEMS.2003.1233477

DO - 10.1109/OMEMS.2003.1233477

M3 - Conference article in proceedings

SN - 978-0-7803-7830-8

SP - 81

EP - 82

BT - IEEE/LEOS International Conference on Optical MEMS (MOEMS 2003)

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - International Conference on Optical MEMS, MOEMS 2003

Y2 - 18 August 2003 through 21 August 2003

ER -

Mems packaging using precision machined LTCC substrates

Abstract

Conference

Keywords

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