Abstract
The use of low-temperature co-fired ceramic (LTCC) substrate as a wiring board for a silicon surface micromachined Fabry-Perot interferometer (FPI) device is presented. FPI is an electrically controlled optical bandpass filter that is widely used in spectroscopy. In this paper, the FPI device is applied to demonstrate a wavelength tunable diode laser in an external cavity configuration.
Original language | English |
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Title of host publication | IEEE/LEOS International Conference on Optical MEMS (MOEMS 2003) |
Publisher | IEEE Institute of Electrical and Electronic Engineers |
Pages | 81-82 |
ISBN (Print) | 978-0-7803-7830-8 |
DOIs | |
Publication status | Published - 2003 |
MoE publication type | A4 Article in a conference publication |
Event | International Conference on Optical MEMS, MOEMS 2003 - Waikoloa, United States Duration: 18 Aug 2003 → 21 Aug 2003 |
Conference
Conference | International Conference on Optical MEMS, MOEMS 2003 |
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Abbreviated title | MOEMS 2003 |
Country/Territory | United States |
City | Waikoloa |
Period | 18/08/03 → 21/08/03 |
Keywords
- micromechanical devices
- optical surface waves
- micromaching
- MEMS packaging
- LTCC substrates