Abstract
Several metal contacts (Au, Ag, Pt, Pd, Cu, Ni, Ge, Ti, Cr, and Al) were tested on Metalorganic vapour phase epitaxy (MOVPE)-grown InN. Current-voltage (I-V) measurements were carried out. Most of the metals showed ohmic behavior. Pt and Ge yielded some Schottky contact behavior, but were very unstable. Al formed a stable rectifying contact after thermal annealing over 500°C. Several annealing temperatures and times were studied. The rectifying behavior is explained in terms of N atoms reacting with In and Al to form a layer of AlInN, which has a larger band gap than InN. 10.1143/JJAP.45.36 ©2006 The Japan Society of Applied Physics.
| Original language | English |
|---|---|
| Pages (from-to) | 36-39 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 45 |
| Issue number | 1R |
| DOIs | |
| Publication status | Published - 10 Jan 2006 |
| MoE publication type | A1 Journal article-refereed |
Keywords
- Annealing
- InN
- Metal contact
- Ohmic behavior
- Rectifying behavior
- Schottky contact