Metal fluoride thin films deposited by atomic layer epitaxy

Markku Ylilammi, Timo Ranta-aho

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	9th International Conference on Thin Films, ICTF9
Subtitle of host publication	Book of Abstracts
Place of Publication	Wien
Publication status	Published - 1993
MoE publication type	Not Eligible
Event	9th International Conference on Thin Films, ICTF9 - Wien, Austria Duration: 6 Sept 1993 → 10 Sept 1993

Conference	9th International Conference on Thin Films, ICTF9
Country/Territory	Austria
City	Wien
Period	6/09/93 → 10/09/93

Cite this

@inbook{f6b3b671ebf247d08d1a43810244bbb0,

title = "Metal fluoride thin films deposited by atomic layer epitaxy",

author = "Markku Ylilammi and Timo Ranta-aho",

year = "1993",

language = "English",

booktitle = "9th International Conference on Thin Films, ICTF9",

note = "9th International Conference on Thin Films, ICTF9 ; Conference date: 06-09-1993 Through 10-09-1993",

}