Metal fluoride thin films deposited by atomic layer epitaxy

Markku Ylilammi, Timo Ranta-aho

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publication9th International Conference on Thin Films, ICTF9
    Subtitle of host publicationBook of Abstracts
    Place of PublicationWien
    Publication statusPublished - 1993
    MoE publication typeNot Eligible
    Event9th International Conference on Thin Films, ICTF9 - Wien, Austria
    Duration: 6 Sep 199310 Sep 1993

    Conference

    Conference9th International Conference on Thin Films, ICTF9
    Country/TerritoryAustria
    CityWien
    Period6/09/9310/09/93

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