Metal fluoride thin films prepared by atomic layer deposition

Timo Ranta-aho, Markku Ylilammi

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publicationProceedings of the XXVIII Annual Conference of the Finnish Physical Society
EditorsMervi Hyvönen-Dabek
Place of PublicationJärvenpää
PublisherSuomen Fyysikkoseura
ISBN (Print)951-45-6557-6
Publication statusPublished - 1994
MoE publication typeA4 Article in a conference publication
EventXXVIII Annual Conference of the Finnish Physical Society - Järvenpää, Finland
Duration: 17 Mar 199419 Mar 1994

Publication series

SeriesUniversity of Helsinki: Department of Physics. Report Series in Physics
Volume260
ISSN0355-5801

Conference

ConferenceXXVIII Annual Conference of the Finnish Physical Society
CountryFinland
CityJärvenpää
Period17/03/9419/03/94

Cite this

Ranta-aho, T., & Ylilammi, M. (1994). Metal fluoride thin films prepared by atomic layer deposition. In M. Hyvönen-Dabek (Ed.), Proceedings of the XXVIII Annual Conference of the Finnish Physical Society [12:10] Suomen Fyysikkoseura. University of Helsinki: Department of Physics. Report Series in Physics, Vol.. 260