Metal fluoride thin films prepared by atomic layer deposition

Timo Ranta-aho; Markku Ylilammi

Metal fluoride thin films prepared by atomic layer deposition

BA191A MEMS

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Proceedings of the XXVIII Annual Conference of the Finnish Physical Society
Editors	Mervi Hyvönen-Dabek
Place of Publication	Järvenpää
Publisher	Suomen Fyysikkoseura
ISBN (Print)	951-45-6557-6
Publication status	Published - 1994
MoE publication type	A4 Article in a conference publication
Event	XXVIII Annual Conference of the Finnish Physical Society - Järvenpää, Finland Duration: 17 Mar 1994 → 19 Mar 1994

Publication series

Series	University of Helsinki: Department of Physics. Report Series in Physics
Volume	260
ISSN	0355-5801

Conference

Conference	XXVIII Annual Conference of the Finnish Physical Society
Country	Finland
City	Järvenpää
Period	17/03/94 → 19/03/94

Cite this

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title = "Metal fluoride thin films prepared by atomic layer deposition",

author = "Timo Ranta-aho and Markku Ylilammi",

year = "1994",

language = "English",

isbn = "951-45-6557-6",

series = "University of Helsinki: Department of Physics. Report Series in Physics",

publisher = "Suomen Fyysikkoseura",

editor = "Mervi Hyv{\"o}nen-Dabek",

booktitle = "Proceedings of the XXVIII Annual Conference of the Finnish Physical Society",

address = "Finland",

note = "XXVIII Annual Conference of the Finnish Physical Society ; Conference date: 17-03-1994 Through 19-03-1994",

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Ranta-aho, T & Ylilammi, M 1994, Metal fluoride thin films prepared by atomic layer deposition. in M Hyvönen-Dabek (ed.), Proceedings of the XXVIII Annual Conference of the Finnish Physical Society., 12:10, Suomen Fyysikkoseura, Järvenpää, University of Helsinki: Department of Physics. Report Series in Physics, vol. 260, XXVIII Annual Conference of the Finnish Physical Society, Järvenpää, Finland, 17/03/94.

Metal fluoride thin films prepared by atomic layer deposition. / Ranta-aho, Timo; Ylilammi, Markku.

Proceedings of the XXVIII Annual Conference of the Finnish Physical Society. ed. / Mervi Hyvönen-Dabek. Järvenpää : Suomen Fyysikkoseura, 1994. 12:10 (University of Helsinki: Department of Physics. Report Series in Physics, Vol. 260).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Metal fluoride thin films prepared by atomic layer deposition

AU - Ranta-aho, Timo

AU - Ylilammi, Markku

PY - 1994

Y1 - 1994

M3 - Conference article in proceedings

SN - 951-45-6557-6

T3 - University of Helsinki: Department of Physics. Report Series in Physics

BT - Proceedings of the XXVIII Annual Conference of the Finnish Physical Society

A2 - Hyvönen-Dabek, Mervi

PB - Suomen Fyysikkoseura

CY - Järvenpää

T2 - XXVIII Annual Conference of the Finnish Physical Society

Y2 - 17 March 1994 through 19 March 1994

ER -