Metal fluoride thin films prepared by atomic layer deposition

Timo Ranta-aho, Markku Ylilammi

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the XXVIII Annual Conference of the Finnish Physical Society
    EditorsMervi Hyvönen-Dabek
    Place of PublicationJärvenpää
    PublisherSuomen Fyysikkoseura
    ISBN (Print)951-45-6557-6
    Publication statusPublished - 1994
    MoE publication typeA4 Article in a conference publication
    EventXXVIII Annual Conference of the Finnish Physical Society - Järvenpää, Finland
    Duration: 17 Mar 199419 Mar 1994

    Publication series

    SeriesUniversity of Helsinki: Department of Physics. Report Series in Physics
    Volume260
    ISSN0355-5801

    Conference

    ConferenceXXVIII Annual Conference of the Finnish Physical Society
    CountryFinland
    CityJärvenpää
    Period17/03/9419/03/94

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