@inproceedings{40b639641c414d458bef77de03ea3cbc,
title = "Metal fluoride thin films prepared by atomic layer deposition",
author = "Timo Ranta-aho and Markku Ylilammi",
year = "1994",
language = "English",
isbn = "951-45-6557-6",
series = "University of Helsinki: Department of Physics. Report Series in Physics",
publisher = "Suomen Fyysikkoseura",
editor = "Mervi Hyv{\"o}nen-Dabek",
booktitle = "Proceedings of the XXVIII Annual Conference of the Finnish Physical Society",
address = "Finland",
note = "XXVIII Annual Conference of the Finnish Physical Society ; Conference date: 17-03-1994 Through 19-03-1994",
}