Method and apparatus for measuring the height of a surface

Kai Ojala (Inventor)

    Research output: PatentPatent

    Abstract

    A measuring device includes an illuminating unit arranged to project an illuminating light beam on a surface of a target object so as to form an illuminated region on the surface, an image sensor, and focusing optics arranged to form a focused spot on the image sensor by focusing light reflected from the illuminated region such that the position of the spot depends on the height of the surface with respect to a reference plane, wherein the device is configured to determine a height of the surface from a detected position of the focused spot, and wherein the normal of the image sensor is inclined with respect to the optical axis of the focusing optics.

    Patent family as of 8.12.2021
    DE602016053625 D1 20210325 DE201660053625T 20160921      
    EP3353489 A1 20180801 EP20160774698 20160921      
    EP3353489 B1 20210303 EP20160774698 20160921      
    FI127908 B 20190515 FI20150005675 20150922      
    FI20155675 A 20170323 FI20150005675 20150922      
    US11047674 BB 20210629 US20180760796 20160921      
    US2018252516 AA 20180906 US20180760796 20160921      
    WO17051074 A1 20170330 WO2016FI50657 20160921

    Link to currentpatent family on right 

    Original languageEnglish
    Patent number US2018252516 A
    IPCG01B 11/24,G01B11/06,G02B13/22,G02B27/42
    Priority date22/09/15
    Filing date6/09/18
    Publication statusPublished - 6 Sep 2018
    MoE publication typeH1 Granted patent

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