Abstract
A measuring device includes an illuminating unit arranged to project an illuminating light beam on a surface of a target object so as to form an illuminated region on the surface, an image sensor, and focusing optics arranged to form a focused spot on the image sensor by focusing light reflected from the illuminated region such that the position of the spot depends on the height of the surface with respect to a reference plane, wherein the device is configured to determine a height of the surface from a detected position of the focused spot, and wherein the normal of the image sensor is inclined with respect to the optical axis of the focusing optics.
Patent family as of 8.12.2021
DE602016053625 D1 20210325 DE201660053625T 20160921
EP3353489 A1 20180801 EP20160774698 20160921
EP3353489 B1 20210303 EP20160774698 20160921
FI127908 B 20190515 FI20150005675 20150922
FI20155675 A 20170323 FI20150005675 20150922
US11047674 BB 20210629 US20180760796 20160921
US2018252516 AA 20180906 US20180760796 20160921
WO17051074 A1 20170330 WO2016FI50657 20160921
Patent family as of 8.12.2021
DE602016053625 D1 20210325 DE201660053625T 20160921
EP3353489 A1 20180801 EP20160774698 20160921
EP3353489 B1 20210303 EP20160774698 20160921
FI127908 B 20190515 FI20150005675 20150922
FI20155675 A 20170323 FI20150005675 20150922
US11047674 BB 20210629 US20180760796 20160921
US2018252516 AA 20180906 US20180760796 20160921
WO17051074 A1 20170330 WO2016FI50657 20160921
Link to currentpatent family on right
| Original language | English |
|---|---|
| Patent number | US2018252516 A |
| IPC | G01B 11/24,G01B11/06,G02B13/22,G02B27/42 |
| Priority date | 22/09/15 |
| Filing date | 6/09/18 |
| Publication status | Published - 6 Sept 2018 |
| MoE publication type | H1 Granted patent |