Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices

M. Koskenvuori, V.-P. Rytkönen, Pekka Rantakari, I. Tittonen

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

Abstract

A method to measure built-in voltages on the material interfaces in capacitive MEMS-devices inside closed cavities is presented. The method is based on a vibrating capacitor (Kelvin-probe) principle and it can even be used to measure closed cavity samples. The suggested set-up is tested by measuring various capacitive accelerometers and the results are compared with those obtained from capacitance-voltage (C-V) measurements. The potential of the method for high-speed measurements is explored by demonstrating an accurate determination of built-in voltages by measuring only a few data points for a device due to a very highly linear response of the method.
Original languageEnglish
Pages (from-to)5558-5563
JournalJournal of Physics D: Applied Physics
Volume40
Issue number18
DOIs
Publication statusPublished - 2007
MoE publication typeA1 Journal article-refereed

Fingerprint

microelectromechanical systems
MEMS
cavities
Capacitance measurement
Voltage measurement
Electric potential
electric potential
Accelerometers
Capacitors
accelerometers
electrical measurement
capacitors
capacitance
high speed
probes

Keywords

  • MEMS
  • MEMS-devices
  • Kelvin-probe
  • cavity spaces
  • built-in voltage
  • CPD

Cite this

Koskenvuori, M. ; Rytkönen, V.-P. ; Rantakari, Pekka ; Tittonen, I. / Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices. In: Journal of Physics D: Applied Physics. 2007 ; Vol. 40, No. 18. pp. 5558-5563.
@article{721c1f68035d487e9d9ce475ce997bb6,
title = "Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices",
abstract = "A method to measure built-in voltages on the material interfaces in capacitive MEMS-devices inside closed cavities is presented. The method is based on a vibrating capacitor (Kelvin-probe) principle and it can even be used to measure closed cavity samples. The suggested set-up is tested by measuring various capacitive accelerometers and the results are compared with those obtained from capacitance-voltage (C-V) measurements. The potential of the method for high-speed measurements is explored by demonstrating an accurate determination of built-in voltages by measuring only a few data points for a device due to a very highly linear response of the method.",
keywords = "MEMS, MEMS-devices, Kelvin-probe, cavity spaces, built-in voltage, CPD",
author = "M. Koskenvuori and V.-P. Rytk{\"o}nen and Pekka Rantakari and I. Tittonen",
year = "2007",
doi = "10.1088/0022-3727/40/18/008",
language = "English",
volume = "40",
pages = "5558--5563",
journal = "Journal of Physics D: Applied Physics",
issn = "0022-3727",
publisher = "Institute of Physics IOP",
number = "18",

}

Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices. / Koskenvuori, M.; Rytkönen, V.-P.; Rantakari, Pekka; Tittonen, I.

In: Journal of Physics D: Applied Physics, Vol. 40, No. 18, 2007, p. 5558-5563.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices

AU - Koskenvuori, M.

AU - Rytkönen, V.-P.

AU - Rantakari, Pekka

AU - Tittonen, I.

PY - 2007

Y1 - 2007

N2 - A method to measure built-in voltages on the material interfaces in capacitive MEMS-devices inside closed cavities is presented. The method is based on a vibrating capacitor (Kelvin-probe) principle and it can even be used to measure closed cavity samples. The suggested set-up is tested by measuring various capacitive accelerometers and the results are compared with those obtained from capacitance-voltage (C-V) measurements. The potential of the method for high-speed measurements is explored by demonstrating an accurate determination of built-in voltages by measuring only a few data points for a device due to a very highly linear response of the method.

AB - A method to measure built-in voltages on the material interfaces in capacitive MEMS-devices inside closed cavities is presented. The method is based on a vibrating capacitor (Kelvin-probe) principle and it can even be used to measure closed cavity samples. The suggested set-up is tested by measuring various capacitive accelerometers and the results are compared with those obtained from capacitance-voltage (C-V) measurements. The potential of the method for high-speed measurements is explored by demonstrating an accurate determination of built-in voltages by measuring only a few data points for a device due to a very highly linear response of the method.

KW - MEMS

KW - MEMS-devices

KW - Kelvin-probe

KW - cavity spaces

KW - built-in voltage

KW - CPD

U2 - 10.1088/0022-3727/40/18/008

DO - 10.1088/0022-3727/40/18/008

M3 - Article

VL - 40

SP - 5558

EP - 5563

JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

SN - 0022-3727

IS - 18

ER -