Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices

M. Koskenvuori, V.-P. Rytkönen, Pekka Rantakari, I. Tittonen

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)

    Abstract

    A method to measure built-in voltages on the material interfaces in capacitive MEMS-devices inside closed cavities is presented. The method is based on a vibrating capacitor (Kelvin-probe) principle and it can even be used to measure closed cavity samples. The suggested set-up is tested by measuring various capacitive accelerometers and the results are compared with those obtained from capacitance-voltage (C-V) measurements. The potential of the method for high-speed measurements is explored by demonstrating an accurate determination of built-in voltages by measuring only a few data points for a device due to a very highly linear response of the method.
    Original languageEnglish
    Pages (from-to)5558-5563
    JournalJournal of Physics D: Applied Physics
    Volume40
    Issue number18
    DOIs
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    microelectromechanical systems
    MEMS
    cavities
    Capacitance measurement
    Voltage measurement
    Electric potential
    electric potential
    Accelerometers
    Capacitors
    accelerometers
    electrical measurement
    capacitors
    capacitance
    high speed
    probes

    Keywords

    • MEMS
    • MEMS-devices
    • Kelvin-probe
    • cavity spaces
    • built-in voltage
    • CPD

    Cite this

    Koskenvuori, M. ; Rytkönen, V.-P. ; Rantakari, Pekka ; Tittonen, I. / Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices. In: Journal of Physics D: Applied Physics. 2007 ; Vol. 40, No. 18. pp. 5558-5563.
    @article{721c1f68035d487e9d9ce475ce997bb6,
    title = "Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices",
    abstract = "A method to measure built-in voltages on the material interfaces in capacitive MEMS-devices inside closed cavities is presented. The method is based on a vibrating capacitor (Kelvin-probe) principle and it can even be used to measure closed cavity samples. The suggested set-up is tested by measuring various capacitive accelerometers and the results are compared with those obtained from capacitance-voltage (C-V) measurements. The potential of the method for high-speed measurements is explored by demonstrating an accurate determination of built-in voltages by measuring only a few data points for a device due to a very highly linear response of the method.",
    keywords = "MEMS, MEMS-devices, Kelvin-probe, cavity spaces, built-in voltage, CPD",
    author = "M. Koskenvuori and V.-P. Rytk{\"o}nen and Pekka Rantakari and I. Tittonen",
    year = "2007",
    doi = "10.1088/0022-3727/40/18/008",
    language = "English",
    volume = "40",
    pages = "5558--5563",
    journal = "Journal of Physics D: Applied Physics",
    issn = "0022-3727",
    publisher = "Institute of Physics IOP",
    number = "18",

    }

    Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices. / Koskenvuori, M.; Rytkönen, V.-P.; Rantakari, Pekka; Tittonen, I.

    In: Journal of Physics D: Applied Physics, Vol. 40, No. 18, 2007, p. 5558-5563.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices

    AU - Koskenvuori, M.

    AU - Rytkönen, V.-P.

    AU - Rantakari, Pekka

    AU - Tittonen, I.

    PY - 2007

    Y1 - 2007

    N2 - A method to measure built-in voltages on the material interfaces in capacitive MEMS-devices inside closed cavities is presented. The method is based on a vibrating capacitor (Kelvin-probe) principle and it can even be used to measure closed cavity samples. The suggested set-up is tested by measuring various capacitive accelerometers and the results are compared with those obtained from capacitance-voltage (C-V) measurements. The potential of the method for high-speed measurements is explored by demonstrating an accurate determination of built-in voltages by measuring only a few data points for a device due to a very highly linear response of the method.

    AB - A method to measure built-in voltages on the material interfaces in capacitive MEMS-devices inside closed cavities is presented. The method is based on a vibrating capacitor (Kelvin-probe) principle and it can even be used to measure closed cavity samples. The suggested set-up is tested by measuring various capacitive accelerometers and the results are compared with those obtained from capacitance-voltage (C-V) measurements. The potential of the method for high-speed measurements is explored by demonstrating an accurate determination of built-in voltages by measuring only a few data points for a device due to a very highly linear response of the method.

    KW - MEMS

    KW - MEMS-devices

    KW - Kelvin-probe

    KW - cavity spaces

    KW - built-in voltage

    KW - CPD

    U2 - 10.1088/0022-3727/40/18/008

    DO - 10.1088/0022-3727/40/18/008

    M3 - Article

    VL - 40

    SP - 5558

    EP - 5563

    JO - Journal of Physics D: Applied Physics

    JF - Journal of Physics D: Applied Physics

    SN - 0022-3727

    IS - 18

    ER -