Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices

M. Koskenvuori; V.-P. Rytkönen; Pekka Rantakari; I. Tittonen

doi:10.1088/0022-3727/40/18/008

Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices

M. Koskenvuori, V.-P. Rytkönen, Pekka Rantakari, I. Tittonen

Helsinki University of Technology

Research output: Contribution to journal › Article › Scientific › peer-review

3 Citations (Scopus)

Abstract

A method to measure built-in voltages on the material interfaces in capacitive MEMS-devices inside closed cavities is presented. The method is based on a vibrating capacitor (Kelvin-probe) principle and it can even be used to measure closed cavity samples. The suggested set-up is tested by measuring various capacitive accelerometers and the results are compared with those obtained from capacitance-voltage (C-V) measurements. The potential of the method for high-speed measurements is explored by demonstrating an accurate determination of built-in voltages by measuring only a few data points for a device due to a very highly linear response of the method.

Original language	English
Pages (from-to)	5558-5563
Journal	Journal of Physics D: Applied Physics
Volume	40
Issue number	18
DOIs	https://doi.org/10.1088/0022-3727/40/18/008
Publication status	Published - 2007
MoE publication type	A1 Journal article-refereed

Keywords

MEMS
MEMS-devices
Kelvin-probe
cavity spaces
built-in voltage
CPD

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10.1088/0022-3727/40/18/008

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title = "Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices",

abstract = "A method to measure built-in voltages on the material interfaces in capacitive MEMS-devices inside closed cavities is presented. The method is based on a vibrating capacitor (Kelvin-probe) principle and it can even be used to measure closed cavity samples. The suggested set-up is tested by measuring various capacitive accelerometers and the results are compared with those obtained from capacitance-voltage (C-V) measurements. The potential of the method for high-speed measurements is explored by demonstrating an accurate determination of built-in voltages by measuring only a few data points for a device due to a very highly linear response of the method.",

keywords = "MEMS, MEMS-devices, Kelvin-probe, cavity spaces, built-in voltage, CPD",

author = "M. Koskenvuori and V.-P. Rytk{\"o}nen and Pekka Rantakari and I. Tittonen",

year = "2007",

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T1 - Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices

AU - Koskenvuori, M.

AU - Rytkönen, V.-P.

AU - Rantakari, Pekka

AU - Tittonen, I.

PY - 2007

Y1 - 2007

N2 - A method to measure built-in voltages on the material interfaces in capacitive MEMS-devices inside closed cavities is presented. The method is based on a vibrating capacitor (Kelvin-probe) principle and it can even be used to measure closed cavity samples. The suggested set-up is tested by measuring various capacitive accelerometers and the results are compared with those obtained from capacitance-voltage (C-V) measurements. The potential of the method for high-speed measurements is explored by demonstrating an accurate determination of built-in voltages by measuring only a few data points for a device due to a very highly linear response of the method.

AB - A method to measure built-in voltages on the material interfaces in capacitive MEMS-devices inside closed cavities is presented. The method is based on a vibrating capacitor (Kelvin-probe) principle and it can even be used to measure closed cavity samples. The suggested set-up is tested by measuring various capacitive accelerometers and the results are compared with those obtained from capacitance-voltage (C-V) measurements. The potential of the method for high-speed measurements is explored by demonstrating an accurate determination of built-in voltages by measuring only a few data points for a device due to a very highly linear response of the method.

KW - MEMS

KW - MEMS-devices

KW - Kelvin-probe

KW - cavity spaces

KW - built-in voltage

KW - CPD

U2 - 10.1088/0022-3727/40/18/008

DO - 10.1088/0022-3727/40/18/008

M3 - Article

SN - 0022-3727

VL - 40

SP - 5558

EP - 5563

JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

IS - 18

ER -

Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices

Abstract

Keywords

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