Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices

M. Koskenvuori, V.-P. Rytkönen, Pekka Rantakari, I. Tittonen

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)

    Abstract

    A method to measure built-in voltages on the material interfaces in capacitive MEMS-devices inside closed cavities is presented. The method is based on a vibrating capacitor (Kelvin-probe) principle and it can even be used to measure closed cavity samples. The suggested set-up is tested by measuring various capacitive accelerometers and the results are compared with those obtained from capacitance-voltage (C-V) measurements. The potential of the method for high-speed measurements is explored by demonstrating an accurate determination of built-in voltages by measuring only a few data points for a device due to a very highly linear response of the method.
    Original languageEnglish
    Pages (from-to)5558-5563
    JournalJournal of Physics D: Applied Physics
    Volume40
    Issue number18
    DOIs
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed

    Keywords

    • MEMS
    • MEMS-devices
    • Kelvin-probe
    • cavity spaces
    • built-in voltage
    • CPD

    Fingerprint Dive into the research topics of 'Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices'. Together they form a unique fingerprint.

  • Cite this